EP0690472A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Electron beam apparatus and image forming apparatus
Assignee: Canon Inc
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Filing: 1995-06-27
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Granted: —
•
Expires: 2015-06-27
Abstract
Abstract An electron beam apparatus comprises an electron source having an electron-emitting device, an electrode for controlling an electron beam emitted from the electron source, a target to be irradiated with an electron beam emitted from the electron source and a spacer (20) arranged between the electron source and the electrode. The spacer (20) has a semiconductor film (20b) on the surface thereof that is electrically connected to said electron source and said electrode.
Inventors
- 👤 Hideaki C/O Canon K.K. Mitsutake
- 👤 Shinichi C/O Canon K.K. Kawate
- 👤 Naoto C/O Canon K.K. Nakamura
- 👤 Yoshihisa C/O Canon K.K. Sano
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 17:33
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J9/00; H01J9/24; H01J9/241; H01J9/242; H01J29/00; H01J29/02; H01J29/028; H01J29/86; H01J29/864; H01J31/00; H01J31/08; H01J31/10; H01J31/12; H01J31/123; H01J31/125; H01J31/127; H01J9/02; H01J9/18; H01J9/185; H01J2201/00; H01J2201/30; H01J2201/316; H01J2201/3165; H01J2329/00; H01J2329/86; H01J2329/8625; H01J2329/864; H01J2329/8645; H01J2329/865; H01J2329/8655
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
73 words
An electron beam apparatus comprising an electron source having an electron-emitting device, an electrode for controlling an electron beam emitted from said electron source, a target to be irradiated with an electron beam emitted from said electron source and a spacer arranged between said electron source and said electrode, characterized in that: said spacer has a semiconductor film on the surface thereof that is electrically connected to said electron source and said electrode.
Claim 2
Dependent Claim
40 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said semiconductor film on the surface of said spacer is electrically connected to said wiring and said electrode.
Claim 3
Dependent Claim
50 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said spacer is arranged between said wiring and said electrode, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 4
Dependent Claim
69 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said spacer is a rectangularly parallelepipedic and arranged between said wiring and said electrode in such a way that the longitudinal direction thereof is in parallel with said wiring, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 5
Dependent Claim
47 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said electrode is arranged on said target, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 6
Dependent Claim
57 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said electrode is arranged on said target, said spacer being arranged between said wiring and said electrode, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 7
Dependent Claim
75 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said electrode is arranged on said target, said spacer being rectangularly parallelepipedic and arranged between said wiring and said electrode in such a way that the longitudinal direction thereof is in parallel with said wiring, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 8
Dependent Claim
66 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said semiconductor film on the surface of said spacer is electrically connected to at least one of said row-directed wirings or said column-directed wirings and to said electrode.
Claim 9
Dependent Claim
85 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said spacer is arranged between at least one of said row-directed wirings or said column-directed wirings and said electrode, said semiconductor film on the surface of said spacer being electrically connected to at least one of said row-directed wirings or said column-directed wirings and to said electrode.
Claim 10
Dependent Claim
103 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said spacer is rectangularly parallelepipedic and arranged between at least one of said row-directed wirings or said column-directed wirings and said electrode in such a way that the longitudinal direction thereof is in parallel with said wirings, said semiconductor film on the surface of said spacer being electrically connected to at least one of said row-directed wirings or said column-directed wirings and to said electrode.
Claim 11
Dependent Claim
73 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said electrode is arranged on said target, said semiconductor film on the surface of said spacer being electrically connected to at least one of said row-directed wirings or said column-directed wirings and to said electrode.
Claim 12
Dependent Claim
110 words
An electron beam apparatus according to claim 1, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said electrode is arranged on said target, said spacer being rectangularly parallelepipedic and arranged between at least one of said row-directed wirings or said column-directed wirings and said electrode in such a way that the longitudinal direction thereof is in parallel with said wirings, said semiconductor film on the surface of said spacer being electrically connected to at least one of said row-directed wirings or said column-directed wirings and to said electrode.
Claim 13
Dependent Claim
93 words
An electron beam apparatus comprising an electron source having an electron-emitting device, an electrode for controlling an electron beam emitted from said electron source, a target to be irradiated with an electron beam emitted from said electron source and a spacer arranged between said electron source and said electrode, characterized in that: said spacer has a semiconductor film on the surface thereof that is electrically connected to said electron source and said electrode and is provided with abutting members arranged at the abutments of said spacer and said electron source and said electrode.
Claim 14
Dependent Claim
40 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said semiconductor film on the surface of said spacer is electrically connected to said wiring and said electrode
Claim 15
Dependent Claim
50 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said spacer is arranged between said wiring and said electrode, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 16
Dependent Claim
69 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said spacer is a rectangularly parallelepipedic and arranged between said wiring and said electrode in such a way that the longitudinal direction thereof is in parallel with said wiring, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 17
Dependent Claim
47 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said electrode is arranged on said target, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 18
Dependent Claim
57 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said electrode is arranged on said target, said spacer being arranged between said wiring and said electrode, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 19
Dependent Claim
75 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and said electrode is arranged on said target, said spacer being rectangularly parallelepipedic and arranged between said wiring and said electrode in such a way that the longitudinal direction thereof is in parallel with said wiring, said semiconductor film on the surface of said spacer being electrically connected to said wiring and said electrode.
Claim 20
Dependent Claim
61 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said semiconductor film on the surface of said spacer is electrically connected to said row-directed wirings or said column-directed wirings and said electrode.
Claim 21
Dependent Claim
78 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said spacer is arranged between said row-directed wirings or said column-directed wirings and said electrode, said semiconductor film on the surface of said spacer being electrically connected to said row-directed wirings or said column-directed wirings, whichever appropriate, and said electrode.
Claim 22
Dependent Claim
97 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said spacer is a rectangularly parallelepipedic and arranged between said row-directed wirings or said column-directed wirings and said electrode in such a way that the longitudinal direction thereof is in parallel with said wirings, said semiconductor film on the surface of said spacer being electrically connected to said row-directed wirings or said column-directed wirings, whichever appropriate, and said electrode.
Claim 23
Dependent Claim
68 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said electrode is arranged on said target, said semiconductor film on the surface of said spacer being electrically connected to said row-directed wirings or said column-directed wirings and said electrode.
Claim 24
Dependent Claim
110 words
An electron beam apparatus according to claim 13, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and said electrode is arranged on said target, said spacer being rectangularly parallelepipedic and arranged between said row-directed wirings or said column-directed wirings and said electrode in such a way that the longitudinal direction thereof is in parallel with said row-directed wirings or said column-directed wirings, whichever appropriate, said semiconductor film on the surface of said spacer being electrically connected to said row-directed wirings or said column-directed wirings, whichever appropriate, and said electrode.
Claim 25
Dependent Claim
49 words
An electron beam apparatus according to any of claims 13 to 24, wherein said abutting members of said spacer operate for both mechanically securing said spacer to said electron source and said electrode and electrically connecting the semiconductor film on said spacer to said electron source and said electrode.
Claim 26
Dependent Claim
54 words
An electron beam apparatus according to any of claims 13 to 24, wherein each of said abutting members of said spacer include a first member operating for mechanically securing said spacer to said electron source or said electrode and electrically connecting the semiconductor film on said spacer to said electron source or said electrode.
Claim 27
Dependent Claim
23 words
An electron beam apparatus according to any of claims 1 to 26, wherein said electrode accelerates electron beam emitted from said electron source.
Claim 28
Dependent Claim
99 words
An electron beam apparatus comprising an electron source having an electron-emitting device, an electrode for controlling an electron beam emitted from said electron source and a target to be irradiated with an electron beam emitted from said electron source, characterized in that: it further comprises a spacer arranged between at least two electrodes adapted to have respective electric potentials that are different from each other and said spacer has a semiconductor film on the surface thereof that is electrically connected to said electrodes and is provided with abutting members arranged at the abutments of said spacer and said electrodes.
Claim 29
Dependent Claim
29 words
An electron beam apparatus according to claim 28, wherein said electron source includes a plurality of electron-emitting devices wired by wiring and one of said electrodes is said wiring.
Claim 30
Dependent Claim
18 words
An electron beam apparatus according to claim 28, wherein one of said electrodes is arranged on said target.
Claim 31
Dependent Claim
50 words
An electron beam apparatus according to claim 28, wherein said electron source includes a plurality of electron-emitting devices wired by a plurality of row-directed wirings and a plurality of column-directed wirings to form a matrix wiring structure and one of said electrodes is said row-directed wirings or said column-directed wirings.
Claim 32
Dependent Claim
21 words
An electron beam apparatus according to claim 28, wherein one of said electrode accelerates electron beam emitted from said electron source.
Claim 33
Dependent Claim
41 words
An electron beam apparatus according to any of claims 28 to 32, wherein said abutting members of said spacer operate for both mechanically securing said spacer to said electrodes and electrically connecting the semiconductor film on said spacer to said electrodes.
Claim 34
Dependent Claim
50 words
An electron beam apparatus according to any of claims 28 to 32, wherein each of said abutting members of said spacer include a first member operating for mechanically securing said spacer to one of said electrodes and electrically connecting the semiconductor film on said spacer to one of said electrodes.
Claim 35
Dependent Claim
27 words
An electron beam apparatus according to any one of the preceding claims, wherein said semiconductor film has a surface electric resistance between 10⁵ [Ω/□] and 10¹ [Ω/□].
Claim 36
Dependent Claim
19 words
An electron beam apparatus according to any one of the preceding claims, wherein a plurality of spacers are arranged.
Claim 37
Dependent Claim
21 words
An electron beam apparatus according to any one of the preceding claims, wherein said electron-emitting device is a cold cathode device.
Claim 38
Dependent Claim
29 words
An electron beam apparatus according to any one of the preceding claims, wherein said electron-emitting device has an electroconductive film including an electron-emitting region between a pair of electrodes.
Claim 39
Dependent Claim
22 words
An electron beam apparatus according to any one of the preceding claims, wherein said electron-emitting device is a surface conduction electron-emitting device.
Claim 40
Dependent Claim
21 words
An electron beam apparatus according to claim any one of the preceding claims, wherein said apparatus is an image forming apparatus.
Claim 41
Dependent Claim
45 words
An electron beam apparatus according to any one of the preceding claims, wherein said spacer has a conductive film on the areas thereof abutting with said electron source and said electrode or with said electrodes, said conductive film being electrically connected to said semiconductor film.
Claim 42
Independent Claim
33 words
An apparatus comprising a radiation source, for example an electron source, for irradiating a target, the target being spaced from the radiation source by spacer means comprising means for inhibiting build-up of charge.
Claim 43
Independent Claim
57 words
An apparatus comprising a radiation source such as an electron source for irradiating a target spaced from the radiation source by spacer means at least part, for example a surface film, of which comprises a semiconductive material providing a conductive path to an electrode, for example an electrode for controlling emission of radiation from the radiation source.
References Cited (Backward Citations)
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