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EP0675532A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method for forming solder bump in IC mounting board

Assignee: NGK Insulators Ltd
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Filing: 1995-03-31
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Granted: —
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Expires: 2015-03-31
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Abstract

Abstract [Objective] To provide a method of forming solder bumps whereby solder bumps of a sufficient amount of solder can be formed even if miniaturized. [Constitution] The method of forming solder bumps of this invention is a method of forming solder bumps on a board (1) for mounting IC chips on which conductor wiring has been formed, which method is characterized by forming a photosensitive first solder resist (3) on the surface of the board on which the conductor wiring (2) has been formed, forming first openings (3a) by photoetching at the sites of the first solder resist (3) where the solder bumps are to be formed, forming a second solder resist (4) on the first solder resist, forming second openings (4a) that connect with the first openings by photoetching at the sites of the second solder resist that correspond to the first openings, filling the first and second openings with solder (5), carrying out reflow treatment, and then etching in such a way that at least part of the first solder resist remains.

Inventors

  • 👤 Toro Fuwa
  • 👤 Mitsuo Nakahashi
  • 👤 Hiroki Kojo
  • 👤 Kazumasa Nemoto

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-03 21:02
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/20; H05; H05K; H05K3/00; H05K3/30; H05K3/32; H05K3/34; H05K3/3452; H10W70/00; H10W70/099; H05K1/00; H05K1/02; H05K1/11; H05K1/111; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/09654; H05K2201/09709; H05K2203/00; H05K2203/04; H05K2203/043; H05K2203/05; H05K2203/0562; H05K2203/0577; H05K2203/0588; H05K3/3465; H05K3/3485; H10W72/01; H10W72/012; H10W72/01251; H10W72/01255; H10W72/01257; H10W72/251

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 130 words
A method of forming solder bumps on a board for mounting IC chips on which conductor wiring has been formed, which method is characterized by forming a photosensitive first solder resist on the surface of the board on which the conductor wiring has been formed, forming first openings by photoetching in the sites of the first solder resist where the solder bumps are to be placed, next forming a second solder resist on the first solder resist, forming second openings that connect with the first openings by photoetching at sites of the second solder resist that correspond to the first openings, filling the first and second openings with solder, carrying out reflow treatment, and then etching in such a way that at least part of the first solder resist remains.
Claim 2
Independent Claim 111 words
A method of forming solder bumps on IC chip mounting boards on which conductor wiring has been formed, which method is characterized by coating a liquid first solder resist on the surface of the board on which the conductor wiring has been formed so that it fills the spaces between the conductor lines, forming a second solder resist on the first solder resist, forming openings by photoetching at the sites of the first and second solder resists where the solder bumps are to be formed, filling the openings with solder, carrying out reflow treatment, and then etching in such a way that at least part of the first solder resist remains.
Claim 3
Dependent Claim 24 words
The method of forming solder bumps of Claim 1 or 2 characterized by constructing the second solder resist from a film-like photosensitive solder resist.
Claim 4
Dependent Claim 40 words
The method of forming solder bumps of Claim 1 or 3 characterized by the fact that S₂/S₁ ≧ 1 , where S₁ is the opening area of the first openings and S₂ is the opening area of the second openings.
Claim 5
Independent Claim 41 words
The method of forming solder bumps of any of Claims 1 to 4 characterized by making the first solder resist from a material of slower etching rate than the material of the second solder resist with respect to a specific etchant.
Claim 6
Independent Claim 135 words
A method of forming solder bumps on IC chip mounting boards on which conductor wiring has been formed, which method is characterized by coating a liquid first solder resist on the surface of the board on which the conductor wiring has been formed so that it fills the spaces between conductor wires, forming a photosensitive second solder resist on the first solder resist, forming first openings at the sites of the second solder resist where the solder bumps are to be formed, forming a third solder resist on the second solder resist, forming second openings that connect with the first openings by photoetching at sites of the third solder resist that correspond to the first openings, filling the first and second openings with solder, carrying out reflow treatment, and then removing the third solder resist.
Claim 7
Dependent Claim 39 words
The method of forming solder bumps of Claim 6 which is characterized by establishing that S₂/S₁ ≧ 1 , where S₁ is the opening area of the first openings and S₂ is the opening area of the second openings.
Claim 8
Dependent Claim 19 words
The method of forming solder bumps of Claim 7 characterized by forming the said openings in a zigzag pattern.

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