EP0674182A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Hybrid sensor
Assignee: Honda Motor Co Ltd
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Filing: 1995-03-24
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Granted: —
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Expires: 2015-03-24
Abstract
Abstract A hybrid sensor (1) comprises an acceleration sensor (5) for detecting acceleration based on a temperature distribution of a gas hermetically enclosed within a fluid-tight space (7), and an angular velocity sensor (4) for detecting angular velocity based on a deviation of a flow (F Y ) of a gas, both sensors (4,5) being formed in one piece by the use of semiconductor processing technology. The acceleration and angular velocity sensors (4,5) are formed on a plurality of semiconductor substrates (2,3), which are superposed one upon another and united into a laminate. A sensitivity coefficient and an offset value for the two sensors are corrected based on the detection of angular velocities, accelerations and speeds of the object to which the sensor is attached, over a set time.
Inventors
- 👤 Tomoyuki C/O Honda R&D Co. Ltd. Nishio
- 👤 Satoshi C/O Honda R&D Co. Ltd. Hiyama
- 👤 Mizuho C/O Honda R&D Co. Ltd. Doi
- 👤 Nobuhiro C/O Honda R&D Co. Ltd. Fueki
- 👤 Hiroshi C/O Honda R&D Co. Ltd. Yamakawa
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 23:04
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01C; G01C19/00; G01C19/58; G01C21/00; G01C21/10; G01C21/12; G01C21/16; G01P15/006; G01P15/008; G01P15/12; G01P15/18
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
79 words
A hybrid sensor comprising: an acceleration sensor for detecting acceleration based on a temperature distribution of a gas hermitically enclosed within a fluid-tight space; and an angular velocity sensor for detecting angular velocity based on a deviation of a flow of a gas; the hybrid sensor comprising a plurality of semiconductor substrates superposed one upon another and united into a laminate, said acceleration sensor and said angular velocity sensor being formed on said semiconductor substrates through semiconductor processing technology.
Claim 2
Dependent Claim
48 words
A hybrid sensor according to claim 1, wherein said acceleration sensor comprises heat-generating resistance means for heating said gas to form said temperature distribution within said fluid-tight space, and temperature-sensitive resistance means for detecting a change in said temperature distribution caused by acceleration acting on said hybrid sensor.
Claim 3
Dependent Claim
68 words
A hybrid sensor according to claim 2, wherein said heat-generating resistance means comprises a heat-generating resistance element arranged at a center of said fluid-tight space, and said temperature-sensitive resistance means comprises at least one pair of temperature-sensitive resistance elements, said temperature-sensitive resistance elements of each pair being arranged in a fashion being symmetrical with respect to said heat-generating resistance element along a corresponding one of plurality of axes.
Claim 4
Dependent Claim
26 words
A hybrid sensor according to claim 1, 2 or 3, wherein said gas enclosed within said fluid-tight space is a pressurized gas having low thermal conductivity.
Claim 5
Dependent Claim
52 words
A hybrid sensor according to any preceding claim, wherein said angular velocity sensor comprises a gas passage through which said gas is caused to flow, and heat wire resistance means arranged within said gas passage for detecting said deviation of said flow of said gas caused by action of said angular velocity.
Claim 6
Dependent Claim
61 words
A hybrid sensor according to claim 5, wherein said heat wire resistance means comprises at least one pair of heat wire temperature-sensitive resistance elements, said heat wire temperature-sensitive resistance elements of each pair being arranged in a fashion being symmetrical with respect to a central axis of said flow of said gas along a corresponding one of a plurality of axes.
Claim 7
Dependent Claim
28 words
A hybrid sensor according to any preceding claim, wherein said acceleration sensor is a two-axis acceleration sensor and said angular velocity sensor is a one-axis angular velocity sensor.
Claim 8
Dependent Claim
31 words
A hybrid sensor according to any of claims 1 to 6, wherein said acceleration sensor is a three-axis acceleration sensor and said angular velocity sensor is a one-axis angular velocity sensor.
Claim 9
Dependent Claim
31 words
A hybrid sensor according to any of claims 1 to 6, wherein said acceleration sensor is a three-axis acceleration sensor and said angular velocity sensor is a two-axis angular velocity sensor.
Claim 10
Dependent Claim
31 words
A hybrid sensor according to any of claims 1 to 6, wherein said acceleration sensor is a three-axis acceleration sensor and said angular velocity sensor is a three-axis angular velocity sensor.
Claim 11
Dependent Claim
41 words
A hybrid sensor according to any preceding claim, wherein said hybrid sensor is installed on a moving object, and wherein said acceleration sensor detects acceleration of said moving object and said angular velocity sensor detects angular velocity of said moving object.
Claim 12
Dependent Claim
15 words
A hybrid sensor according to claim 11, wherein said moving object is an automotive vehicle.
Claim 13
Independent Claim
94 words
A method of forming a hybrid sensor comprising an acceleration sensor for detecting acceleration based on a temperature distribution of a gas hermitically enclosed within a fluid-tight space, and an angular velocity sensor for detecting angular velocity based on a deviation of a flow of a gas; the method comprising the steps of: forming said acceleration and angular velocity sensors on a plurality of semiconductor substrates by forming resistor elements and portions of gas passages and/or gas spaces therein using a semiconductor production process; and laminating together said substrates to form the hybrid sensor.
Claim 14
Dependent Claim
136 words
A hybrid sensor for use in a moving object, for detecting a moving direction of said moving object and acceleration acting on said moving object, during movement of said moving object, comprising: an angular velocity sensor for detecting angular velocity of said moving object and delivering an angular velocity signal indicative of the detected angular velocity; an acceleration sensor for detecting said acceleration acting on said moving object and delivering an acceleration signal indicative of the detected acceleration; and sensor-correcting means for correcting a sensitivity coefficient and an offset value of at least one of said angular velocity sensor and said acceleration sensor, based on said angular velocity signal from said angular velocity sensor, said acceleration signal from said acceleration sensor, and a speed signal from a speed sensor for detecting speed of said moving object.
Claim 15
Dependent Claim
97 words
A hybrid sensor according to claim 14, wherein said sensor-correcting means comprises sensor data-storing means for reading data of said angular velocity signal from said angular velocity sensor, data of said acceleration signal from said acceleration sensor, and data of said speed signal from said speed sensor, a predetermined number of times per a predetermined time period, and for storing the read data, variable-calculating means for calculating said sensitivity coefficient and said offset value, based on said data stored in said sensor data-storing means, and control means for controlling said sensor data-storing means and said variable-calculating means.
Claim 16
Dependent Claim
126 words
A hybrid sensor according to claim 14, wherein said sensor-correcting means includes sensor data-storing means for reading data of said angular velocity signal from said angular velocity sensor, data of said acceleration signal from said acceleration sensor, and data of said speed signal from said speed sensor, a predetermined number of times per a predetermined time period, and for storing the read data, variable-calculating means for calculating said sensitivity coefficient and said offset value, based on said data stored in said sensor data-storing means, parameter-calculating means for calculating an actual value of said acceleration and an actual value of said angular velocity, based on an output from said parameter-calculating means, and control means for controlling said sensor data-storing means, said variable-calculating means, and said parameter-calculating means.
Claim 17
Dependent Claim
70 words
A hybrid sensor according to claim 16, wherein said variable-calculating means includes updated data-storing means for storing updated data of said sensitivity coefficient and said offset value calculated immediately before said moving object is stopped, and wherein said parameter-calculating means calculates said angular velocity, based on said updated data of said sensitivity coefficient and said offset value read from said updated data-storing means, when said moving object is started again.
References Cited (Backward Citations)
No citation records indexed.
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