EP0659904A2
Expired / Lapsed
EP
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Vaporized hydrogen silsesquioxane for depositing a coating
Assignee: Dow Silicones Corp
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Filing: 1992-05-12
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Granted: —
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Expires: 2012-05-12
Abstract
Abstract The present invention relates to compositions suitable for depositing coatings containing silicon and oxygen on a substrate. The compositions contain vaporized hydrogen silsesquioxane in a carrier gas.
Inventors
- 👤 Theresa Eileen Gentle
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 14:02
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; C; C09; C09D; C09D183/00; C09D183/04; C09D4/00; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; Y; Y10; Y10S; Y10S427/00; Y10S427/103; Y10S427/106
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
19 words
A composition for depositing a coating on a substrate said composition comprising vaporized hydrogen silsesquioxane in a carrier gas.
Claim 2
Dependent Claim
22 words
The composition of claim 1, in which the carrier gas is selected from inert gas, air, oxygen, oxygen plasma, ammonia, and amines.
Claim 3
Dependent Claim
22 words
The composition of claim 1, in which greater than 75% of the hydrogen silsesquioxane has a molecular weight of less than 2000.
Claim 4
Dependent Claim
22 words
The composition of claim 3, in which greater than 75% of the hydrogen silsesquioxane has a molecular weight of less than 1200.
Claim 5
Dependent Claim
21 words
A composition comprising hydrogen silsesquioxane in which greater than 75% of the species have a molecular weight between 400 and 1000.
Claim 6
Dependent Claim
19 words
Use of a composition comprising vaporized hydrogen silsesquioxane in a carrier gas for depositing a coating on a substrate.
Claim 7
Dependent Claim
17 words
Use according to claim 6 of a composition as defined in any of claims 2 to 5.
References Cited (Backward Citations)
No citation records indexed.
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