EP0657918A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method and apparatus for baking and cooling semiconductor wafers and the like
Assignee: Semiconductor Systems Inc
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Filing: 1994-11-11
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Granted: —
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Expires: 2014-11-11
Abstract
Abstract A method and apparatus for quickly and uniformly baking and cooling semiconductor wafers, flat panels for flat panel displays, and the like, in which a wafer or flat panel is placed in close proximity to a hotplate and a thermally conductive, non-reactive gas, such as helium, is introduced into the airspace between the wafer or flat panel and the hotplate. The thermally conductive, non-reactive gas, in one embodiment, is preheated before introduction into the airspace between the wafer or flat panel and the hotplate, by being passed through a bore through the hotplate. Additionally, the wafer is automatically aligned in a milled recession in the hotplate surface for future handling.
Inventors
- 👤 William T. Batchelder
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 03:00
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7611; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; H10P72/04; H10P72/0431; H10P72/0434; H10P72/7612; H10P95/00; H10P95/90
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
35 words
A method comprising: placing a substantially flat article in proximity to a hotplate, which has a desired temperature, so as to form an airspace therebetween; and introducing a thermally conductive, non-reactive gas into the airspace.
Claim 2
Dependent Claim
21 words
The method of claim 1 further comprising: heating the gas prior to the step of introducing the gas into the airspace.
Claim 3
Dependent Claim
29 words
The method of claim 1 or 2 further comprising: bringing the gas to the temperature of the hotplate prior to the step of introducing the gas into the airspace.
Claim 4
Dependent Claim
40 words
The method of claim 3, wherein the step of bringing the gas to the temperature of the hotplate comprises: introducing the gas into a bore in the hotplate which opens into the airspace between the hotplate and the flat article.
Claim 5
Independent Claim
17 words
The method of any one of claims 1 to 4, wherein the desired temperature is room temperature.
Claim 6
Independent Claim
18 words
The method of any one of claims 1 to 5, wherein the thermally conductive, non-reactive gas is helium.
Claim 7
Independent Claim
47 words
The method of any one of claims 1 to 6, wherein the step of introducing the gas comprises: (a) introducing the gas into the airspace for a first period of time; and (b) ceasing introduction of the gas into the airspace for a second period of time.
Claim 8
Dependent Claim
35 words
The method of claim 7, wherein steps (a) and (b) are repeated so as to alternately introduce gas for a first period of time and cease introduction of gas for a second period of time.
Claim 9
Independent Claim
95 words
An apparatus for heating a substantially flat article to a desired temperature, the apparatus comprising: a hot plate, mounted on a support structure, having a top side; means for heating the hotplate to the desired temperature; support means on the top side of the hotplate for supporting the flat article in proximity to the hotplate and creating an airspace between the flat article and the hotplate; a thermally conductive, non-reactive gas source connected to the support structure; and means for introducing an amount of thermally conductive, non-reactive gas from the gas source into the airspace.
Claim 10
Dependent Claim
23 words
The apparatus of claim 9 further comprising means, connected to the gas source, for preheating the gas prior to introduction into the airspace.
Claim 11
Dependent Claim
28 words
The apparatus of claim 9 or 10, wherein the thermally conductive, non-reactive gas is helium and further wherein the thermally conductive, non-reactive gas source is a helium source.
Claim 12
Dependent Claim
52 words
The apparatus of claim 9, 10 or 11, wherein the hotplate has a bore therethrough and further wherein the means for introducing the gas into the airspace introduces the gas into the bore through the hotplate such that the gas is at the temperature of the hotplate when introduced into the airspace.
Claim 13
Independent Claim
100 words
The apparatus of any one of claims 9 to 12, wherein the means for introducing the gas comprises: a pressure regulator, coupled to the gas source and having an output, for regulating the pressure of the gas as the gas is released from the gas source; a solenoid valve, coupled to the output of the pressure regulator, for selectively controlling the flow of the gas from the gas source through a solenoid valve output to the airspace; and a flow meter, coupled to the solenoid valve output, for measuring the flow of gas from the gas source to the airspace.
Claim 14
Independent Claim
31 words
The apparatus of any one of claims 9 to 13, wherein the support means is an annular bench which supports the flat article near the outer edge of the flat article.
Claim 15
Dependent Claim
15 words
The apparatus of claim 14, wherein the annular bench includes an annular vacuum hold-down groove.
Claim 16
Independent Claim
92 words
An apparatus for cooling a substantially flat article to a desired temperature, the apparatus comprising: a chill plate, mounted on a support structure and having a desired temperature, having a top side; support means on the top side of the hotplate for supporting the flat article in proximity to the hotplate and creating an airspace between the flat article and the chill plate; a thermally conductive, non-reactive gas source connected to the support structure; and means for introducing an amount of thermally conductive, non-reactive gas from the gas source into the airspace.
References Cited (Backward Citations)
No citation records indexed.
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