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EP0636706A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Apparatus for chemical vapor deposition of diamond including graphite substrate holders

Assignee: General Electric Co
•
Filing: 1994-07-22
•
Granted: —
•
Expires: 2014-07-22
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Abstract

Abstract Graphite substrate holders for employment in apparatus for chemical vapor deposition of diamond decrease the tendency of the formed diamond sheets to crack or shatter upon separation from the substrates. Said holders and the substrates therein preferably have rounded edges, to suppress crack formation at sharp corners. The holders are preferably coated, at least in part, with a tie-layer and a hydride-forming metal such as niobium. Also, certain maximum distances between the edges of the holder and substrates are preferably maintained in order to prevent contact of diamond with a heated filament employed for thermal activation.

Inventors

  • 👤 Philip George Kosky
  • 👤 Friedel Siegried Knemeyer
  • 👤 David Earl Slutz

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-26 13:32
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4581; C23C16/01; C23C16/22; C23C16/26; C23C16/27; C23C16/271; Y; Y10; Y10T; Y10T428/00; Y10T428/30

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 75 words
Apparatus for receiving diamond produced by chemical vapor deposition, said apparatus comprising: at least one substrate holder comprising graphite, said substrate holder having at least one recess adapted to hold a substrate such that the surface of said substrate is flush with the surface of said holder surrounding said recess; and at least one substrate mounted in said recess, said substrate comprising a material effective to receive and subsequently release a layer of said diamond.
Claim 2
Dependent Claim 12 words
Apparatus according to claim 1 wherein the substrates are rectangular or square.
Claim 3
Dependent Claim 13 words
Apparatus according to claim 2 wherein the substrates and recesses have rounded corners.
Claim 4
Dependent Claim 16 words
Apparatus according to claim 3 wherein said corners are rounded on radii of about 3-5 mm.
Claim 5
Dependent Claim 12 words
Apparatus according to claim 1 for holding from 1 to 6 substrates.
Claim 6
Dependent Claim 23 words
Apparatus according to claim 1 wherein said substrate holder is coated at least in part with a tie-layer followed by a hydride-forming metal.
Claim 7
Dependent Claim 15 words
Apparatus according to claim 6 wherein the tie-layer is titanium and the metal is niobium.
Claim 8
Dependent Claim 10 words
Apparatus according to claim 1 wherein the substrates are molybdenum.
Claim 9
Dependent Claim 19 words
Apparatus according to claim 1 also including at least one filament parallel to the surface of said substrate holder.
Claim 10
Dependent Claim 12 words
Apparatus according to claim 9 wherein said filament is vertical or horizontal.
Claim 11
Dependent Claim 74 words
Apparatus according to claim 10 wherein the vertical distances between the horizontal substrate edges in a holder and between said edges and the horizontal edges of the holder are less than the distance between the substrate surface and the filament, and the horizontal distances between the vertical substrate edges and the vertical edges of the substrate holder are such that there is no contact between the filament and any diamond peeling from the holder.

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