Semiconductor matrix type sensor for very small surface pressure distribution

Claim 2

A semiconductor matrix type of very small surface pressure distribution sensor, comprising a plurality of crosspoints semiconductor switching elements formed on a semiconductor substrate, a field of partially exposed electrodes on said semiconductor substrate, each of said electrodes being individually associated with a corresponding switching element, a flexible film suspended over said field of electrodes, said flexible film having a conductive coating formed on a surface thereof which confronts said field of electrodes, said flexible film being deflected and said conductive coating being placed in electrical contact with some of the electrodes at positions corresponding to a pattern of surface pressures applied to said film, and measuring means for detecting said positions where said surface pressure places said conductive coating in contact with said electrodes.

Claim 3

The sensor of claim 1 wherein said measuring means measures voltage at said contact between said conductive coating and an electrode in order to detect the surface pressure distribution in terms of ON/OFF values.

Claim 4

The sensor of claim 1 wherein said measuring means measures the voltage level at said contact between said conductive coating and an electrode in order to detect the surface pressure distribution in terms of analog values.

Claim 5

The sensor according to claim 1, wherein said electrodes are orthogonally arranged in a matrix form on a major surface of a semiconductor chip, the distribution of said output electrodes being at very small pitches in the range of about 10 to 200 f..lm.

Claim 6

The sensor according to claim 1, and detector means, said electrodes serving as output electrodes to said detector means.

Claim 7

The sensor according to claim 1, and detector means, said electrodes serving as input electrodes to said switching elements.

Claim 8

A semiconductor matrix type small-surface pressure distribution sensor according to claim 1, and X- and Y-direction shift registers and detector means formed on said semiconductor substrate, shift registers being connected as scanning means for determining surface addresses of said electrodes in said field, and said detector means being connected for sequentially detecting an address in said field responsive to an output current at each contact between an electrode and said conductive coating.

Claim 9

A semiconductor matrix type small-surface pressure distribution sensor according to claim 1, and X- and Y-direction shift registers and a detector formed on said semiconductor substrate, shift register scanning means for determining surface addresses of electrodes in said field, and said detector means being connected to detect current responsive to each of said semiconductor switching elements that is individually associated with an electrode in contact with said conductive coating.

Claim 10

An electronic finger print reader comprising an integrated circuit chip, said integrated circuit comprising means for scanning an array of electrodes which are individually associated with electronic switching elements formed in an area on said chip corresponding to at least an area of a finger print, there being enough of said switching elements within said area to read a pattern of ridges and valleys in said finger print, each of said switching elements having an individually associated one of said electrodes at least partially exposed above a surface of said chip, said switching elements switching between ON and OFF in responsive to potentials applied to corresponding ones of said electrodes, a thin film having a conductive surface suspended over said electrodes, the ridges of said finger print pressing said conductive surface against individual ones of said electrodes to make contact therewith on a basis selected by the pattern of the ridges in said finger print, means responsive to said contact between said electrodes and said conductive surface for applying said potential to operate those of said switching elements which are individually associated with a contacted electrode, and detector means formed on said integrated circuit chip and responsive to said scanning means for detecting an address of each operated one of said switching elements.

Claim 11

An electronic finger print reader comprising an integrated circuit chip, said integrated circuit comprising means for scanning an array of electrodes which are individually associated with electronic switching elements formed in an area on said chip corresponding to at least an area of a finger print, there being enough of said switching elements within said area to read a pattern of ridges and valleys in said finger print, each of said switching elements having an individually associated one of said electrodes at least partially exposed above a surface of said chip, said switching elements switching between ON and OFF in responsive to potentials applied to corresponding ones of said electrodes, a thin film having a conductive surface suspended over said electrodes, the ridges of said finger print pressing said conductive surface against individual ones of said electrodes to make contact therewith on a basis selected by the pattern of the ridges in said finger print, means responsive to said contact between said electrodes and said conductive surface for applying said potential to operate those of said switching elements which are individually associated with a contacted electrode, and detector means formed on said integrated circuit chip and responsive to said scanning means for detecting an address of each operated one of said switching elements.

Claim 12

The reader of claim 9 wherein said detector means formed on said semiconductor chip reads signals which said scanning means sends to said electronic switching means.

Claim 13

The reader of claim 9 and a resistor connected to said conductive surface, said detector means being connected to detect a voltage drop across said resistor responsive to current flow through an electronic switch when it turns on responsive to said conductive surface being pressed against an electrode.

Claim 14

The reader of claim 9 and a resistor connected between each output of said scanning means and an input to said electronic switching elements, and said detector means is connected to detect a voltage drop across said resistors when an electronic switch operates in responsive said conductive surface touching an electrode individually associated with said operated switch.

Claim 15

A semiconductor device comprising a semiconductor substrate having an integrated circuit thereon, said integrated circuit having an orthogonal array of horizontal and vertical buses forming a matrix of crosspoints, an electronic switch at each of said crosspoint for selectively switching between on and off in responsive to a potential applied to an electrode individually associated therewith, a first shift register means coupled to said horizontal busses and a second shift register coupled to said vertical busses for scanning said crosspoints, a resilient conductive film stretched over said electrodes, said film selectively touching said electrodes in response to minute pressures, and detector means for detecting an address of a crosspoint which is operated when scanned by said shift registers.

Claim 16

A semiconductor device comprising a semiconductor substrate having an integrated circuit thereon, said integrated circuit having an orthogonal array of horizontal and vertical buses forming a matrix of crosspoints, an electronic switch at each of said crosspoint for selectively switching between on and off in responsive to a potential applied to an electrode individually associated therewith, a first shift register means coupled to said horizontal busses and a second shift register coupled to said vertical busses for scanning said crosspoints, a resilient conductive film stretched over said electrodes, said film selectively touching said electrodes in response to minute pressures, and detector means for detecting an address of a crosspoint which is operated when scanned by said shift registers.

Claim 17

The device of claim 13 wherein said electronic switches are logic gate means that are selectively switched between ON and OFF states in responsive to said film touching an electrode.

Claim 18

The device of claim 13 wherein said electronic switches are electronic devices which are switched between ON and OFF states in response to said film touching an electrode.

Claim 19

The device of claim 13 and means whereby said detector means gives an analog output in response to the amount of pressure appearing when said film touches said electrode.