EP0564264A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Illumination device for projection exposure apparatus
Assignee: Canon Inc
•
Filing: 1993-03-31
•
Granted: —
•
Expires: 2013-03-31
Abstract
Abstract An illumination device (1-14), includes a secondary light source forming system (101) having a deflecting member (6) with a conical light deflecting surface for transforming received light into substantially ring-like light, the secondary light source forming system forming a ring-like secondary light source by using the ring-like light; and an optical system (13,14) for projecting divergent lights from portions of the secondary light source obliquely onto a surface (15) to be illuminated so that the projected lights are superposed one upon another on the surface.
Inventors
- 👤 Takahisa c/o Kosugi Jigyosho Shiozawa
- 👤 Masato C/O Kosugi Jigyosho Muraki
- 👤 Hiroyuki c/o Kosugi Jigyosho Ishii
- 👤 Shigeru c/o Kosugi Jigyosho Hayata
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 11:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70091; G03F7/70108; G03F7/70216; G03F7/70241
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
79 words
An illumination device, comprising: secondary light source forming means having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, said secondary light source forming means forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.
Claim 2
Dependent Claim
92 words
A device according to Claim 1, wherein said secondary light source forming means comprises a light source, reflecting means for reflecting the light from said light source and for forming an image of said light source, an optical integrator, and an imaging optical system for re-imaging the light source image, wherein said imaging optical system includes parallelizing means for transforming the light from the light source image into substantially parallel light, and collecting means for collecting the ring like light from said deflecting member substantially into a ring-like shape upon said integrator.
Claim 3
Dependent Claim
21 words
A device according to Claim 2, wherein said deflecting member is demountably mounted to the path of light to be received,
Claim 4
Dependent Claim
20 words
A device according to Claim 3, wherein said imaging optical system comprises an optical system having a variable imaging magnification.
Claim 5
Dependent Claim
27 words
A device according to Claim 3, further comprising means for moving said deflecting member in a direction intersecting with the optical axis of said imaging optical system.
Claim 6
Independent Claim
22 words
A device according to any of claims 2 to 5, further comprising means for rotating said deflecting member about the optical axis.
Claim 7
Independent Claim
30 words
A device according to any of claims 2 to 5, further comprising a second light deflecting member for reducing the angle of incidence of the ring-like light upon said integrator.
Claim 8
Dependent Claim
21 words
A device according to Claim 7, wherein said second light deflecting member comprises a prism having a conical light deflecting surface.
Claim 9
Dependent Claim
16 words
A device according to Claim 7, wherein said second light deflecting member comprises a field lens.
Claim 10
Dependent Claim
26 words
An exposure apparatus for exposing a substrate to a mask with light, said apparatus including an illumination device according to any of claims 1 to 9.
Claim 11
Dependent Claim
19 words
An apparatus according to Claim 10, further comprising means for imaging a pattern of the mask onto the substrate.
Claim 12
Independent Claim
70 words
A device manufacturing method including a step of exposing a workpiece to a mask, said method comprising the steps of: projecting light onto a light deflecting surface of conical shape to produce substantially ring-like light; forming a secondary light source by using the ring-like light; projecting lights from portions of the secondary light source obliquely onto the mask so that the lights are superposed one upon another on the mask,
Claim 13
Dependent Claim
17 words
A method according to Claim 12, wherein a pattern of the mask is imaged on the workpiece.
Claim 14
Dependent Claim
151 words
An illumination device, comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; and means for changing a positional relationship between an apex of said light deflecting surface and the optical axis.
Claim 15
Dependent Claim
22 words
A device according to Claim 14, wherein said deflecting member is demountably mounted to the path of light from said light source.
Claim 16
Dependent Claim
20 words
A device according to Claim 15, wherein said imaging optical system comprises an optical system having a variable imaging magnification.
Claim 17
Dependent Claim
21 words
A device according to claim 14, 15 or 16, further comprising means for rotating said deflecting member about the optical axis.
Claim 18
Independent Claim
35 words
A device according to any of claims 14 to 17, further comprising a second light deflecting member for reducing the angle of incidence of the ring-like light or the plurality of lights upon said integrator.
Claim 19
Dependent Claim
21 words
A device according to Claim 18, wherein said second light deflecting member comprises a prism having a conical light deflecting surface.
Claim 20
Dependent Claim
15 words
A device-according to Claim 18, wherein said second light deflecting member comprises a field lens.
Claim 21
Dependent Claim
26 words
An exposure apparatus for exposing a substrate to a mask with light, said apparatus including an illumination device according to any of claims 14 to 20.
Claim 22
Dependent Claim
60 words
An apparatus according to Claim 21, wherein said imaging optical system comprises first image forming means for reflecting light from said light source and for forming an image of said light source, and second image forming means for re-imaging the light source image, wherein said second image forming means includes said parallelizing means, said deflecting member and said collecting means.
Claim 23
Dependent Claim
21 words
An apparatus according to claim 21 or 22, further comprising means for imaging a pattern of the mask onto the substrate.
Claim 24
Independent Claim
126 words
A device manufacturing method including a step of exposing a workpiece to a mask with light, said method comprising the steps of: projecting light to a light deflecting surface of conical shape or pyramidal shape to form ring-like light or a plurality of lights; forming a secondary light source by using the ring-like light or the plurality of lights; wherein, in said projection step and said secondary light source forming step, the positional relationship between an apex of the light deflecting surface and the optical axis is changed to provide the secondary light source of a desired intensity distribution; and projecting divergent lights from portions of the secondary light source obliquely upon the mask so that the lights are superposed one upon another on the mask.
Claim 25
Dependent Claim
17 words
A method according to Claim 24, wherein a pattern of the mask is imaged on the workpiece.
Claim 26
Dependent Claim
184 words
An illumination device, comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a first deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the lighT from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said first deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; and an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; wherein said collecting means of said imaging optical system includes a second deflecting member effective to reduce the angle of incidence upon said integrator of the ring-like light or of the plurality of lights; and wherein said first and second deflecting members are provided in a pair demountably mounted.
Claim 27
Dependent Claim
20 words
A device according to Claim 26, wherein said imaging optical system comprises an optical system having a variable imaging magnification.
Claim 28
Dependent Claim
30 words
A device according to claim 26 or 27, further comprising means for moving said first deflecting member in a direction intersecting with the optical axis of said imaging optical system.
Claim 29
Dependent Claim
22 words
A device according to claim 26, 27 or 28 further comprising means for rotating said first deflecting member about the optical axis.
Claim 30
Independent Claim
28 words
A device according to any of claims 26 to 29, wherein each of said first and second deflecting members comprise a prism having a conical light deflecting surface.
Claim 31
Independent Claim
28 words
A device according to any of claims 26 to 29, wherein each of said first and second deflecting members comprise a prism having a pyramidal light deflecting surface.
Claim 32
Independent Claim
19 words
A device according to any of claims 26 to 29, wherein said second deflecting member comprises a field lens.
Claim 33
Independent Claim
64 words
A device according to any of claims 26 to 32, wherein said imaging optical system comprises first image forming means for reflecting light from said light source and for forming an image of said light source, and second image forming means for re-imaging the light source image, wherein said second image forming means includes said parallelizing means, said deflecting member and said collecting means.
Claim 34
Dependent Claim
195 words
An exposure apparatus for exposing a substrate to a mask with light, said apparatus comprising: a light source; an optical integrator; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a first deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said first deflecting member into a substantially ring-like shape or a plurality of light spots upon said optical integrator; and an optical system for projecting lights from portions of a secondary light source formed by said integrator obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; wherein said collecting means of said imaging optical system includes a second deflecting member effective to reduce the angle of incidence upon said integrator of the ring-like light or of the plurality of lights; and wherein said first and second deflecting members are provided in a pair demountably mounted.
Claim 35
Dependent Claim
19 words
An apparatus according to Claim 34, further comprising means for imaging a pattern of the mask on the substrate.
Claim 36
Independent Claim
158 words
A device manufacturing method including a step of exposing a workpiece to a mask, said method comprising the steps of: projecting parallel light on a first deflecting surface of conical shape or pyramidal shape to produce ring-like light or a plurality of lights; projecting the ring-like light or the plurality of lights to form a secondary light source; wherein in said secondary light source forming step, the ring-like light or the plurality of lights are deflected by a second deflecting surface to reduce thee angle of incidence thereof upon the plane; and projecting divergent lights from portions of the secondary light source obliquely onto the mask so that the lights are superposed one upon another on the mask; wherein the first and second deflecting surfaces are provided in a pair demountably mounted; and wherein the parallel light can be projected to an approximately central portion of the plane, when the first and second deflecting surfaces are not present.
Claim 37
Dependent Claim
17 words
A method according to Claim 36, wherein a pattern of the mask is imaged on the workpiece.
Claim 38
Dependent Claim
149 words
An illumination device, comprising: a light source; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light, (ii) a deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said deflecting member into a substantially ring-like shape or a plurality of light spots upon a plane; an optical system for projecting lights from portions of a secondary light source formed by the light from said deflecting obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; and means for changing the positional relationship between an apex of said deflecting surface and the optical axis.
Claim 39
Dependent Claim
183 words
An illumination device, comprising: a light source; an imaging optical system for imaging said light source, said imaging optical system including (i) parallelizing means for transforming light from said light source into substantially parallel light. (ii) a first deflecting member having a light deflecting surface of one of conical shape or pyramidal shape, for receiving the light from said parallelizing means, and (iii) light collecting means for collecting ring-like light or a plurality of lights from said first deflecting member into a substantially ring-like shape or a plurality of light spots upon a plane; and an optical system for projecting lights from portions of a secondary light source formed by the light from said first deflecting member, obliquely upon a surface to be illuminated so that the lights are superposed one upon another on the surface; wherein said collecting means of said imaging optical system includes a second deflecting member effective to reduce the angle of incidence upon said plane of the, light from said first deflecting surface; and wherein said first and second deflecting members are provided in a pair demountably mounted.
Claim 40
Dependent Claim
37 words
An illumination device comprising a light source and an optical systems the apparatus including means for altering the effective illumination distribution of the light source dependent on a desired resolution characteristic at a surface to be illuminated.
Claim 41
Dependent Claim
31 words
A device as claimed in claim 40 wherein for a higher level of resolution at the illuminated surface, an illumination distribution having a dark centre and generally brighter periphery is generated.
Claim 42
Dependent Claim
35 words
A device as claimed in claim 40 or 41, wherein the effective illumination distribution is defined by a deflecting element of the optical system, so as to maintain substantially the efficiency of the optical system.
Claim 43
Dependent Claim
29 words
A device as claimed in claim 40, 41 or 42, wherein the optical system includes an optical integrator whose output forms a secondary light source having the desired distribution.
Claim 44
Dependent Claim
48 words
An illumination device comprising a light source and an optical systems the light source having an effective illumination distribution darker at the centre and generally brighter at the periphery, the optical system including means for converging peripheral portions of the effective illumination onto a surface to be illuminated.
Claim 45
Dependent Claim
52 words
An exposure apparatus for exposing a workpiece to a mask, the apparatus including an illumination device as claimed in any of claims 40 to 44 for illuminating the mask with the desired level of resolution, and further comprising a projection system for projecting an image of the illuminated mask onto a workpiece.
Claim 46
Dependent Claim
53 words
A device manufacturing method including a step of exposing a work piece to a mask by means of an exposure device as claimed in claim 45, said method including the preliminary step of selecting an effective illumination distribution within the illumination device dependent on a level of resolution desired in the exposure step.
References Cited (Backward Citations)
US3795446A
Cited
US4931830A
Cited
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.