EP0561566A2
Expired / Lapsed
EP
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Solid state condenser and microphone
Assignee: Knowles Electronics LLC
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Filing: 1993-03-11
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Granted: —
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Expires: 2013-03-11
Abstract
Abstract A solid state miniature condenser and condenser microphone of good sensitivity is provided. It comprises a fixed perforated backplate that constitutes a fixed electrode in a parallel plate condenser, a diaphragm sensitive to incident sound pressure waves that constitutes a moveable plate in the parallel plate condenser, means to position the diaphragm in relationship to the backplate without applying appreciable tension to the diaphragm, and FET circuitry which provides an output proportional to the change in capacitance of the condenser when the diaphragm moves in relationship to the backplate.
Inventors
- 👤 Peter V. c/o Monolithic Sensors Inc. Loeppert
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 11:35
CPC Classifications
B; B81; B81B; B81B3/00; B81B3/0064; B81B3/0067; B81B3/0072; G; G01; G01H; G01H11/00; G01H11/06; H; H04; H04R; H04R19/00; H04R19/04; B81B2201/00; B81B2201/02; B81B2201/0257; H04R25/00; H04R25/60; H04R25/604
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
60 words
A solid state condenser device comprising: (a) a fixed perforated backplate which constitutes a fixed electrode in a parallel plate condenser; (b) a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; and (c) means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm.
Claim 2
Dependent Claim
60 words
A solid state condenser device comprising: (a) a fixed perforated backplate which constitutes a fixed electrode in a parallel plate condenser; (b) a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; and (c) means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm.
Claim 3
Dependent Claim
19 words
The solid state condenser device of claim 1 wherein the backplate is prepared from a boron doped silicon wafer.
Claim 4
Dependent Claim
16 words
The solid state condenser device of claim 1 wherein the diaphragm is a silicon nitride diaphragm.
Claim 5
Dependent Claim
28 words
The solid state condenser device of claim 1 wherein the diaphragm is retained in relation to said backplate by clamps and a tail member fixed to the backplate.
Claim 6
Dependent Claim
28 words
The solid state condenser device of claim 1, wherein the diaphragm includes spring elements attached to the backplate thereby to retain it in operative relation to said backplate.
Claim 7
Dependent Claim
20 words
The solid state condenser device of claim 1, wherein the parallel plate condenser is prepared from a single silicon wafer.
Claim 8
Dependent Claim
97 words
A solid state condenser microphone device comprising: (a) a fixed perforated backplate which constitutes a fixed electrode in a parallel plate condenser; (b) a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; (c) means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm; and (d) a Field Effect Transistor circuit electrically connected to said backplate and said diaphragm to provide an output proportional to the change in capacitance of said condenser when said diaphragm moves in relationship to said backplate.
Claim 9
Dependent Claim
97 words
A solid state condenser microphone device comprising: (a) a fixed perforated backplate which constitutes a fixed electrode in a parallel plate condenser; (b) a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; (c) means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm; and (d) a Field Effect Transistor circuit electrically connected to said backplate and said diaphragm to provide an output proportional to the change in capacitance of said condenser when said diaphragm moves in relationship to said backplate.
Claim 10
Dependent Claim
20 words
The solid state condenser microphone device of claim 7 wherein the backplate is prepared from a boron doped silicon wafer.
Claim 11
Dependent Claim
17 words
The solid state condenser microphone device of claim 7 wherein the diaphragm is a silicon nitride diaphragm.
Claim 12
Dependent Claim
29 words
The solid state condenser microphone device of claim 7 wherein the diaphragm is retained in relation to said backplate by clamps and a tail member fixed to the backplate.
Claim 13
Dependent Claim
29 words
The solid state condenser microphone device of claim 7, wherein the diaphragm includes spring elements attached to the backplate thereby to retain it in operative relation to said backplate.
Claim 14
Dependent Claim
31 words
The solid state condenser microphone device of claim 7 which is prepared from two silicon wafers and which contain the Field Effect Transistor circuitry integrated on one of the silicon wafers.
Claim 15
Dependent Claim
19 words
The solid state condenser microphone device of claim 12 which contains means to prevent acoustical leaks around the diaphragm.
Claim 16
Dependent Claim
109 words
A solid state condenser microphone device prepared on a single silicon wafer which comprises: (a) a fixed perforated backplate, prepared from said silicon wafer, which constitutes a fixed electrode in a parallel plate condenser; (b) a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; (c) means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm; and (d) a Field Effect Transistor circuit electrically connected to said backplate and said diaphragm to provide an output proportional to the change in capacitance of said condenser when said diaphragm moves in relationship to said backplate.
Claim 17
Dependent Claim
109 words
A solid state condenser microphone device prepared on a single silicon wafer which comprises: (a) a fixed perforated backplate, prepared from said silicon wafer, which constitutes a fixed electrode in a parallel plate condenser; (b) a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; (c) means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm; and (d) a Field Effect Transistor circuit electrically connected to said backplate and said diaphragm to provide an output proportional to the change in capacitance of said condenser when said diaphragm moves in relationship to said backplate.
Claim 18
Dependent Claim
20 words
The solid state condenser microphone device of claim 14 wherein the backplate is prepared from a boron doped silicon wafer.
Claim 19
Dependent Claim
17 words
The solid state condenser microphone device of claim 14 wherein the diaphragm is a silicon nitride diaphragm.
Claim 20
Dependent Claim
29 words
The solid state condenser microphone device of claim 14 wherein the diaphragm is retained in relation to said backplate by clamps and a tail member fixed to the backplate.
Claim 21
Dependent Claim
29 words
The solid state condenser microphone device of claim 14, wherein the diaphragm includes spring elements attached to the backplate thereby to retain it in operative relation to said backplate.
Claim 22
Dependent Claim
21 words
The solid state condenser microphone device of claim 14 wherein the Field Effect Transistor circuitry is integrated on the silicon wafer.
Claim 23
Dependent Claim
19 words
The solid state condenser microphone device of claim 14 which contains means to prevent acoustical leaks around the diaphragm.
References Cited (Backward Citations)
No citation records indexed.
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