EP0548831A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Resonant mirror and method of manufacture
Assignee: Texas Instruments Inc
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Filing: 1992-12-18
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Granted: —
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Expires: 2012-12-18
Abstract
Abstract A resonant mirror is disclosed which comprises a deflectable mirror (16) generally planar with the top surface of a substrate. The mirror is suspended adjacent the top surface by at least two supporting elements (20). At least one supporting element is displaced from an edge of the mirror. The supporting elements (20), being collinear, define an axis of rotation (24) about which the mirror may oscillate to steer incident light through an angle.
Inventors
- 👤 William E. Nelson
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 02:55
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
56 words
A light directing device comprising: a substrate having a top surface; a deflectable mirror element generally planar with the top surface; and at least two supporting elements for suspending the mirror element adjacent the top surface, the supporting elements defining an axis of rotation, at least one supporting element displaced from an edge of the mirror.
Claim 2
Dependent Claim
59 words
The device of claim 1 further comprising at least one electrode displaced outwardly in a first direction form the axis of rotation for periodically causing the mirror to rotate about the axis of rotation when a first of the electrode is electrically coupled to a first voltage source and the mirror is electrically coupled to a second voltage source.
Claim 3
Dependent Claim
40 words
The device of claim 2 further comprising a stop at the same electrical as the mirror element, the stop displaced outwardly from the or each electrode whereby said mirror element lands on the stop prior to landing on the electrode.
Claim 4
Dependent Claim
59 words
The device or claim 2 or claim 3 further comprising a second electrode displaced outwardly from the axis or rotation in a second direction, the second direction generally opposite to the first direction, the second electrode for periodically causing the mirror to rotate about the axis of rotation when the second electrode is coupled to a third voltage source.
Claim 5
Independent Claim
17 words
The device of any preceding claim, wherein the deflectable mirror element is an electrostatically deflectable mirror element.
Claim 6
Independent Claim
13 words
The device of any preceding claim, wherein the device is a resonant mirror.
Claim 7
Independent Claim
52 words
A method of manufacturing a light directing device on a substrate comprising: forming a rotatable mirror; and forming at least two supporting elements for supporting the mirror adjacent the substrate, the supporting elements forming an axis of rotation, at least one of the supporting elements displaced from an edge of the mirror.
Claim 8
Dependent Claim
98 words
The method of claim 7, wherein the forming steps comprise the steps of: fabricating at least one support on a substrate; depositing a spacer layer over the support; exposing the support; depositing a hinge layer on the spacer layer and the exposed support; coating porting of the hinge layer with an etch stop; depositing a mirror layer on the coated hinge layer; selectively etching the mirror and hinge layers to create a mirror having at least two supporting elements, at least one of the supporting elements displaced from an edge of the mirror; and removing the spacer layer.
Claim 9
Dependent Claim
23 words
The method of claim 8, wherein the step of depositing a spacer layer further comprises the step of depositing a layer of photomask.
Claim 10
Dependent Claim
39 words
The method of claim 8 or claim 9, wherein the steps of depositing a hinge layer and depositing a mirror layer further comprise the steps of: depositing a hinge layer of Ti:Si:Al; and depositing a mirror layer of Ti:Si:Al.
Claim 11
Independent Claim
16 words
The method of any of claims 7 to 10 for the manufacture of a resonant mirror.
Claim 12
Independent Claim
89 words
A method for periodically directing a beam of incident light through an angle comprising the steps of: reflecting a beam of light off a mirror, the mirror suspended by at least two supporting elements, at least one of the supporting elements displaced from an edge of the mirror, the elements forming an axis of rotation; and periodically applying a voltage to a first electrode to cause the mirror to rotate about the axis of rotation, the first electrode displaced outwardly from the axis of rotation in a first direction.
Claim 13
Dependent Claim
38 words
The method of claim 12 further comprising the step of periodically applying a voltage to a second electrode displaced outwardly from the axis of rotation in a second direction, the first direction generally opposite to the second direction.
Claim 14
Dependent Claim
38 words
The method of claim 12 or 13 wherein the steps of periodically applying a voltage to the electrode further comprise the steps of periodically applying a voltage with a frequency equal to the resonant frequency of the mirror.
References Cited (Backward Citations)
No citation records indexed.
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