EP0534720A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Register marks
Assignee: Individual
•
Filing: 1992-09-23
•
Granted: —
•
Expires: 2012-09-23
Abstract
Abstract A register mark and a system for bringing a pair of register marks into alignment is disclosed. A first two-dimensional register mark (Fig. 1) comprises a plurality of dots of a first frequency, and a second two-dimensional register mark (Fig. 2) comprises a plurality of dots of a second, generally higher frequency. When the first and second register marks are overlaid, an interference pattern resulting from the difference in frequency is observed. The first and second register marks are in alignment when the interference pattern produces a maximum bright spot in the center of the register mark. A small relative movement of the first and second register marks results in a larger relative movement of center of the bright spot. The position of the bright spot indicates which direction and how much to move the second register mark in order to achieve image registration. It is preferred that the frequency of dots in each register mark is warped with distance from the center of the mark. The frequency of the dots of the second register mark is also warped with distance from the center, but overall has a generally higher frequency of dots as compared to the first register mark. In the resulting interference pattern the bright spot occurs unambiguously when the two register marks are in alignment. At misalignments of more than one dot width, the bright spot breaks up so that the overlaid register marks may serve as quick visual check of proper alignment. The register marks may be in a single dimension along a line.
Inventors
- 👤 Raphael L. Levien
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 18:18
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
66 words
A register mark arrangement comprising: a first register mark including a first plurality of dots at a first frequency; and a second register mark including a second plurality of dots at a second frequency; wherein said second register mark is disposed in overlaid relation to said first register mark to thereby produce an interference pattern indicative of the registration of said first and second register marks.
Claim 2
Dependent Claim
29 words
A register mark arrangement in accordance with claim 1, wherein the frequency of dots in each register mark varies with distance from the center of each said register mark.
Claim 3
Dependent Claim
29 words
A register mark in accordance with claim 2, wherein the frequency of dots in each register mark generally decreases with distance from the center of each said register mark.
Claim 4
Dependent Claim
29 words
A register mark in accordance with claim 2, wherein the frequency of dots in each register mark generally increases with distance from the center of each said register mark.
Claim 5
Dependent Claim
29 words
A register mark in accordance with claim 1, 2 or 3 wherein said first register mark is printed, and second register mark is printed over said first register mark.
Claim 6
Dependent Claim
29 words
A register mark in accordance with claim 1, 2 or 3 wherein said first register mark is printed, and second register mark is projected over said first register mark.
Claim 7
Dependent Claim
77 words
A register mark arrangement comprising: a first register mark including a first plurality of dots at a first frequency arranged in a two dimensional array; and a second register mark including a second plurality of dots at a second frequency arranged in two dimensional array; wherein said second register mark is disposed in overlaid relation to said first register mark to thereby produce an interference pattern indicative of the registration of said first and second register marks.
Claim 8
Dependent Claim
30 words
A register mark arrangement in accordance with claim 7, wherein the frequency of dots in each register mark varies with radial distance from the center of each said register mark.
Claim 9
Dependent Claim
30 words
A register mark in accordance with claim 8, wherein the frequency of dots in each register mark generally decreases with radial distance from the center of each said register mark.
Claim 10
Dependent Claim
29 words
A register mark in accordance with claim 8, wherein the frequency of dots in each register mark generally increases with distance from the center of each said register mark.
Claim 11
Dependent Claim
29 words
A register mark in accordance with claim 7, 8 or 9, wherein said first register mark is printed, and second register mark is printed over said first register mark.
Claim 12
Dependent Claim
29 words
A register mark in accordance with claim 7, 8 or 9 wherein said first register mark is printed, and second register mark is projected over said first register mark.
Claim 13
Independent Claim
132 words
A method for aligning first and second objects, wherein said first and second objects are coupled to respective first and second register marks, said first register mark including a first plurality of dots at a first frequency and said second register mark including a second plurality of dots at a second frequency, said method comprising: positioning at least one of said first and second objects so that said second register mark is disposed in overlaid relation to said first register mark, thereby producing a bright spot indicative of the registration of said first and second register marks; detecting the position of said bright spot; and moving said one of said first and second objects to reposition said bright spot towards the center of said one of said first and second register marks.
Claim 14
Dependent Claim
27 words
A method in accordance with claim 13, wherein the frequency of dots in each register mark varies with distance from the center of each said register mark.
Claim 15
Dependent Claim
28 words
A method in accordance with claim 14, wherein the frequency of dots in each register mark generally decreases with distance from the center of each said register mark.
Claim 16
Dependent Claim
29 words
A register mark in accordance with claim 14, wherein the frequency of dots in each register mark generally increases with distance from the center of each said register mark.
Claim 17
Dependent Claim
29 words
A method in accordance with claim 13, 14, 15 or 16 wherein said first register mark is printed, and second register mark is printed over said first register mark.
Claim 18
Dependent Claim
29 words
A method in accordance with claim 13, 14, 15 or 16 wherein said first register mark is printed, and second register mark is projected over said first register mark.
Claim 19
Dependent Claim
39 words
A method in accordance with claim 13, 14, 15 or 16 wherein said first object represents a first color plane of a printed color image and said second object represents a second color plane of said printed color image.
Claim 20
Dependent Claim
37 words
A method in accordance with claim 13, 14, 15 or 16 wherein said first object is a first semiconductor mask of an integrated circuit, and said second object is a second semiconductor mask of said integrated circuit.
Claim 21
Independent Claim
135 words
A method for monitoring the alignment of first and second layers, wherein said first and second layers have a predetermined relation to respective first and second register marks, said first register mark including a first plurality of dots at a first frequency and said second register mark including a second plurality of dots at a second frequency, said method comprising: positioning at least one of said first and second layers so that said second register mark is disposed in overlaid relation to said first register mark, thereby producing a bright spot indicative of the registration of said first and second register marks; detecting the position of said bright spot; and providing an indication representative of the position of said bright spot relative to the center of said one of said first and second register marks.
Claim 22
Dependent Claim
27 words
A method in accordance with claim 21, wherein the frequency of dots in each register mark varies with distance from the center of each said register mark.
Claim 23
Dependent Claim
28 words
A method in accordance with claim 22, wherein the frequency of dots in each register mark generally decreases with distance from the center of each said register mark.
Claim 24
Dependent Claim
28 words
A method in accordance with claim 21, 22 or 23, wherein said first register mark is printed, and second register mark is printed over said first register mark.
Claim 25
Dependent Claim
38 words
A method in accordance with claim 21, 22 or 23, wherein said first layer represents a first color plane of a printed color image and said second layer represents a second color plane of said printed color image.
Claim 26
Dependent Claim
36 words
A method in accordance with claim 21, 22 or 23 wherein said first layer is a first semiconductor mask of an integrated circuit, and said second layer is a second semiconductor mask of said integrated circuit.
Claim 27
Independent Claim
66 words
A method in accordance with any one of claims 21 to 26, wherein said step of detecting the position of said bright spot indicative of the registration of said first and second register marks includes sensing one line of said first and second register marks; and moving said first and second register marks thereby forming a two dimensional image of said first and second register marks.
Claim 28
Independent Claim
138 words
An apparatus for aligning first and second objects, wherein said first and second objects are coupled to respective first and second register marks, said first register mark including a first plurality of dots at a first frequency and said second register mark including a second plurality of dots at a second frequency, said method comprising: means for positioning at least one of said first and second objects so that said second register mark is disposed in overlaid relation to said first register mark, thereby producing a bright spot indicative of the registration of said first and second register marks; means for detecting the position of said bright spot; and means for moving said one of said first and second objects to reposition said bright spot towards the center of said one of said first and second register marks.
Claim 29
Dependent Claim
27 words
An apparatus in accordance with claim 28, wherein the frequency of dots in each register mark varies with distance from the center of each said register mark.
Claim 30
Dependent Claim
28 words
An apparatus in accordance with claim 29, wherein the frequency of dots in each register mark generally decreases with distance from the center of each said register mark.
Claim 31
Dependent Claim
28 words
An apparatus in accordance with claim 29, wherein the frequency of dots in each register mark generally increases with distance from the center of each said register mark.
Claim 32
Dependent Claim
29 words
An apparatus in accordance with claim 28, 29, 30 or 31, wherein said first register mark is printed, and second register mark is printed over said first register mark.
Claim 33
Dependent Claim
29 words
An apparatus in accordance with claim 28, 29, 30 or 31, wherein said first register mark is printed, and second register mark is projected over said first register mark.
Claim 34
Dependent Claim
39 words
An apparatus in accordance with claim 28, 29, 30 or 31, wherein said first object represents a first color plane of a printed color image and said second object represents a second color plane of said printed color image.
Claim 35
Dependent Claim
37 words
An apparatus in accordance with claim 28, 29, 30 or 31, wherein said first object is a first semiconductor mask of an integrated circuit, and said second object is a second semiconductor mask of said integrated circuit.
Claim 36
Independent Claim
141 words
An apparatus for monitoring the alignment of first and second layers, wherein said first and second layers have a predetermined relation to respective first and second register marks, said first register mark including a first plurality of dots at a first frequency and said second register mark including a second plurality of dots at a second frequency, said method comprising: means for positioning at least one of said first and second layers so that said second register mark is disposed in overlaid relation to said first register mark, thereby producing a bright spot indicative of the registration of said first and second register marks; means for detecting the position of said bright spot; and means for providing an indication representative of the position of said bright spot relative to the center of said one of said first and second register marks.
Claim 37
Dependent Claim
27 words
An apparatus in accordance with claim 36, wherein the frequency of dots in each register mark varies with distance from the center of each said register mark.
Claim 38
Dependent Claim
28 words
An apparatus in accordance with claim 37, wherein the frequency of dots in each register mark generally decreases with distance from the center of each said register mark.
Claim 39
Dependent Claim
28 words
An apparatus in accordance with claim 36, 37 or 38, wherein said first register mark is printed, and second register mark is printed over said first register mark.
Claim 40
Dependent Claim
38 words
An apparatus in accordance with claim 36, 37 or 38 wherein said first layer represents a first color plane of a printed color image and said second layer represents a second color plane of said printed color image.
Claim 41
Dependent Claim
36 words
An apparatus in accordance with claim 36, 37 or 38 wherein said first layer is a first semiconductor mask of an integrated circuit, and said second layer is a second semiconductor mask of said integrated circuit.
Claim 42
Dependent Claim
68 words
An apparatus in accordance with claim 36, 37 or 38 wherein said means for detecting the position of said bright spot indicative of the registration of said first and second register marks includes means for sensing one line of said first and second register marks; and means for moving said first and second register marks thereby forming a two dimensional image of said first and second register marks.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.