EP0532236B1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
System for stabilizing the shapes of optical elements, exposure apparatus using this system and method of manufacturing semiconductor devices
Assignee: Canon Inc
•
Filing: 1992-09-04
•
Granted: 1997-07-16
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Expires: 2012-09-04
Abstract
No abstract record available.
Inventors
- 👤 Masahito C/O Canon Kabushiki Kaisha Niibe
- 👤 Yasuaki C/O Canon Kabushiki Kaisha Fukuda
- 👤 Masami C/O Canon Kabushiki Kaisha Hayashida
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/20; G03F7/70058; G03F7/702; G03F7/70216; G03F7/70233; G03F7/70258; G03F7/70266; G03F7/708; G03F7/70858; G03F7/70866; G03F7/70875; G03F7/70883; G03F7/70891
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
102 words
A method of stabilizing the shape of an object (2;17;101;138), the method comprising the steps of: measuring a temperature distribution of the object (2;17;101;138) which is irradiated with radiation energy; and controlling the temperature of a part of the object (2;17;101;138) on the basis of the measurement to control the shape of the object (2;17;101;138) characterised in that the object (2;17;101;138) is a reflective object having a reflective surface, and the temperature of the reflective surface and a surface opposed the reflective surface are separately controlled on the basis of the measurement to control the shape of the reflective object (2;17;101; 138).
Claim 2
Dependent Claim
25 words
A method as claimed in claim 1 wherein the temperature of the reflective surface and the opposed surface is controlled by applying heat selectively thereto.
Claim 3
Dependent Claim
27 words
A method as claimed in claim 2 wherein a part of the reflective object (2;17;101;138) is cooled to control the shape of the reflective object (2;17;101; 138).
Claim 4
Dependent Claim
19 words
A method as claimed in claim 2 or claim 3 wherein the opposed surface is heated by resistive heating.
Claim 5
Independent Claim
25 words
A method as claimed in any one of claims 2 to 4 wherein the temperature of the opposed surface is measured using a thermocouple (8).
Claim 6
Dependent Claim
35 words
A method as claimed in claim 1 wherein the temperature of the reflective surface is controlled by applying heat selectively thereto and the temperature of the opposed surface is controlled by the selective cooling thereof.
Claim 7
Independent Claim
22 words
A method as claimed in any one of claims 2 to 6 wherein the reflective surface is heated selectively by infrared radiation.
Claim 8
Independent Claim
20 words
A method as claimed in any one of claims 2 to 6 wherein the reflective surface is selectively resistively heated.
Claim 9
Independent Claim
23 words
A method as claimed in any preceding claim wherein the temperature distribution of the reflective surface is measured by an infrared camera (4;22;105;146).
Claim 10
Dependent Claim
116 words
Optical apparatus comprising: an object (2;17;101;138) for receiving radiation energy; temperature measuring means (4,8;22;105;146) for measuring a temperature distribution of the object (2;17;101;138) which is irradiated with radiation energy; and temperature control means (9,10,5,7;24,23,21;109, 107,108;102a;144,143) for controlling the temperature of a part of the object (2;17;101;138) on the basis of the measured temperature to control the shape of the object (2;17;101;178); characterised in that the object (2;17;101;138) is a reflective object having a reflective surface, and the temperature control means (9,10,5,7;24,23,21;109,107,108, 102a;144,143) is adapted to separately control the temperature of the reflective surface and a surface opposed the reflective surface on the basis of the measured temperature to control the shape of the reflective object (2;17;101;138).
Claim 11
Dependent Claim
28 words
Optical apparatus as claimed in claim 10 wherein said temperature control means (9,10,5,7;24,23,21;109, 107,108;102a;144,143) includes heating means (5,7;21;23;107,108;144) for selectively heating the reflective surface and the opposed surface.
Claim 12
Dependent Claim
28 words
Optical apparatus as claimed in claim 11 wherein said temperature control means (9,10,5,7;24;23;21;109, 107,108;102a;144,143) includes a cooling arrangement (10) arranged in the interior of the reflective object (2;17;101;138).
Claim 13
Dependent Claim
26 words
Optical apparatus as claimed in claim 11 or claim 12 wherein said temperature control means (9,10,5,7;24,23,21;109,107,108;102a;144,143) includes resistive heating means (7;23) arranged at the opposed surface.
Claim 14
Dependent Claim
30 words
Optical apparatus as claimed in any one of claims 11 to 13 wherein said temperature measuring means (4,8;22;105;146) includes a thermocouple (8) for measuring the temperature of the opposed surface.
Claim 15
Dependent Claim
34 words
Optical apparatus as claimed in claim 10 wherein said temperature control means (9,10,5,7;24,23,21;109, 107,108;102a;144,143) includes heating means (5;21;107,108;144) for selectively heating the reflective surface and cooling means (102a;143) for selectively cooling the opposed surface.
Claim 16
Dependent Claim
33 words
Optical apparatus as claimed in any one of claims 11 to 15 wherein said temperature control means (9,10,5, 7;24;23;21;109,107,108;102a;144,143) includes at least one infrared radiation source (5;107,144) for selectively heating the reflective surface.
Claim 17
Dependent Claim
30 words
Optical apparatus as claimed in any one of claims 11 to 15 wherein said temperature control means (9,10,5,7;24;23;21;109,107,108;102a;144,143) includes a resistive heating arrangement (21) for selectively heating the reflective surface.
Claim 18
Dependent Claim
23 words
Optical apparatus as claimed in any one of claims 10 to 17 wherein said temperature measuring means (4,8;22;105;146) includes an infrared camera (4;22;105;146).
Claim 19
Dependent Claim
38 words
Optical apparatus as claimed in claim 16 wherein said temperature control means (9,10,5,7;24;23;21;109, 107,108;102a;144,143) includes adjustment means (108) associated with the or each infrared radiation source (5;107;144) for selecting the region of the reflective surface to be heated.
Claim 20
Dependent Claim
19 words
Optical apparatus as claimed in claim 19 wherein said adjustment means (108) comprises a member for absorbing infrared radiation.
Claim 21
Dependent Claim
61 words
Exposure apparatus comprising: transfer means for exposing and transferring an exposure pattern to an object (139) to be exposed by irradiating a mask (17;137) having an exposure pattern formed thereon with exposure radiation energy; and the optical apparatus of any one of claims 10 to 20 wherein said reflective object (2;17;101;138) comprises a reflective optical element for the exposure radiation energy.
Claim 22
Dependent Claim
16 words
Exposure apparatus as claimed in claim 21 wherein said mask (17;137) comprises the reflective optical element.
Claim 23
Dependent Claim
24 words
Exposure apparatus as claimed in claim 21 or claim 22 wherein said mask (17;137) has a circuit pattern of a semi-conductor device formed thereon.
Claim 24
Independent Claim
72 words
A method of manufacturing a semi-conductor device comprising the steps of: preparing a reflection type mask (17;137) having a circuit pattern formed thereon; exposing and transferring the circuit pattern of said mask (17;137) on to a wafer (139) by irradiating said mask (17;137) with exposure radiation energy; and stabilising the shape of a reflective optical element used in the exposure step using the method of any one of claims 1 to 9.
Claim 25
Dependent Claim
27 words
A method as claimed in claim 24 wherein the shape of said mask (17;137) is stabilised using the method of any one of claims 1 to 9.
References Cited (Backward Citations)
EP0252734A2
Cited
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