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EP0530922A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method and apparatus for object inspection

Assignee: International Business Machines Corp
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Filing: 1992-09-03
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Granted: —
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Expires: 2012-09-03
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Abstract

Abstract A method and apparatus for the inspection and handling of surface level defects is taught. Briefly stated, the object to be inspected is positioned. A laser light (195) is polarized into at least one orientation and then reflected off of a rotated polygon mirror (210). This causes the light to "move" over the area of interest. A plurality of fiber optic bundles (42,56,58,60,62) are used to receive and conduct the reflected light back to photomultipliers. The photomultiplers convert the light into electrical signals while associated electronics digitize the signals, keeping track of pixels which are produced. By keeping track of pixel edge boundaries and determining if certain thresholds are exceeded or not met as appropriate, the area of interest can be checked for a variety of defects. By comparison of the defects to a reference base, the defects and hence the items inspected can be categorized.

Inventors

  • 👤 Kenneth Alfred Bird
  • 👤 Douglas Yong-Shik Kim
  • 👤 Stephen John Kish
  • 👤 Julius Jacob Lambright
  • 👤 Kurt Richard Muller
  • 👤 Lawrence Daniel Thorp

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 22:31
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/89; G01N21/8901; G01N21/8851; G01N2021/8854; G01N2021/8867; G01N2021/887; G01N2021/8902; G01N21/95; G01N21/956; G01N21/95607; G01N2021/95615

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 150 words
An inspection system apparatus, comprising: a means for translating in a first direction an item to be inspected; at least one optical energy source; means for scanning the light source across the item to be inspected; a telecentric lens positioned between the item to be inspected and the scanning means such that the scanned beam maintains a predetermined angle, with respect to an area of interest on the item to be inspected, as it scans thereacross; a plurality of optic fibers located at a plurality of angles to the item to be inspected, operative so as to receive reflections of the scanned beam from the item to be inspected; photomultiplier means connected to the optic fibers for converting the reflected light to an electrical signal; and processing means for analyzing the electrical signal, wherein the processing means compares the signal received from a series of scanning lines with reference values.
Claim 2
Dependent Claim 69 words
Method for inspecting an article whereby the article is translated in a first direction, the article is scanned by a light beam maintaining a predetermined angle with respect to an area of interest on the article, reflections of the light beam from the article are received and converted to an electrical signal, and the electrical signal is analyzed, wherein values of the electrical signal are compared with reference values.

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