EP0527448A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Scanning tunnelling/atomic force microscope combined with optical microscope
Assignee: Nikon Corp
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Filing: 1992-08-07
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Granted: —
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Expires: 2012-08-07
Abstract
Abstract This invention provides a compound type microscope which can observe the measurement sample(57) of an atomic force microscope (AFM) by means of an optical microscope. This compound type microscope is comprised of an optical microscope having an objective (61) and an observation optical system (62), a cantilever (53) having a reflecting surface and detecting an atomic force, an irradiating optical system (51,52,60) for applying a spotlight to the cantilver, detecting means (54) for detecting the displacement of reflected light caused by the displacement of the cantilever, and a sample stage (55) for placing a sample thereon. Also, a scanning tunnel type microscope (STM) having an interchangeable probe and an optical microscope having an objective may be disposed coaxially with each other so that the sample can be measured by the STM instead of by the AFM, and provision may further be made of an AFM having a cantilever, and said probe and the cantilever may be selectively disposed below the objective.
Inventors
- 👤 Onuki Tetsuji
- 👤 Suzuki Masatoshi
- 👤 Matsushiro Hiroyuki
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 16:30
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G01Q30/00; G01Q30/02; G01Q30/025; G01Q60/02; G01Q60/04; G01Q60/24; G01Q60/38; G02; G02B; G02B21/00; B82Y20/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/868; Y10S977/869
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
67 words
A compound type microscope comprising: an optical microcsope having an objective and an observation optical system; a cantilever having a reflecting surface and detecting an atomic force; an irradiating optical system for applying a spotlight to said cantilever; a detector for detecting the displacement of the reflected light of said spotlight caused by the displacement of said cantilever; and a sample stage for placing a sample thereon.
Claim 2
Dependent Claim
22 words
A compound type microscope according to Claim 1, wherein said irradiating optical system and said objective are disposed coaxially with each other.
Claim 3
Dependent Claim
33 words
A compound type microscope according to Claim 2, wherein said objective has a through-hole in the central portion thereof, and said irradiating optical system applies a spotlight to said cantilever through said through-hole.
Claim 4
Dependent Claim
47 words
A compound type microscope according to Claim 3, wherein said irraidating optical system has a light source and a lens system, and at least a portion of said light source and said lens system is disposed in the through-hole formed in the central portion of said objective.
Claim 5
Dependent Claim
29 words
A compound type microscope according to Claim 2, wherein said irradiating optical system has a light source and a lens system, said lens system being constructed including said objective.
Claim 6
Dependent Claim
31 words
A compound type microscope according to Claim 1, wherein said irradiating optical system is disposed so as to apply a spotlight from the outside of said optical microscope to said cantilever.
Claim 7
Dependent Claim
19 words
A compound type microscope according to Claim 1, wherein said sample stage has a scanner for oscillating the sample.
Claim 8
Dependent Claim
51 words
A compound type microscope in which a scanning tunnel type microscope having an interchangeable probe and an optical microscope having an objective are disposed coaxially with each other, said compound type microscope having an atomic force microscope having a cantilever, said probe and said cantilever being selectively disposed below said objective.
Claim 9
Dependent Claim
50 words
A compound type microscope according to Claim 8, further comprising: a photographic unit for photographing at least a portion imaged by said optical microscope and making it into an observation image; and aligning means for moving said photographic unit in a direction perpendicular to the axial direction of said probe.
Claim 10
Dependent Claim
70 words
A compound type microscope according to Claim 9, wherein said optical microscope has: a lens barrel formed with an opening portion; a connecting portion for mounting said photographic unit in said opening portion with a clearance which makes said photographic unit movable in a direction perpendicular to the axial direction of said probe; and regulating means provided in said opening portion for regulating said clearance and fixing said photographic unit.
Claim 11
Dependent Claim
30 words
A compound type microscope according to Claim 10, wherein said regulating means fixes said photographic unit at any position relative to said lens barrel within the range of said clearance.
Claim 12
Dependent Claim
44 words
A compound type microscope according to Claim 11, wherein said regulating means is provided around said opening portion, and has a feed screw portion for moving on said photographic unit, and a spring portion for urging said photographic unit against said feed screw portion.
Claim 13
Dependent Claim
43 words
A compound type microscope according to Claim 11, wherein said regulating means is provided around said opening portion, and has a feed screw portion for moving on said photographic unit, and a magnet for connecting said photographic unit to said feed screw portion.
Claim 14
Dependent Claim
73 words
A compound type microscope in which a scanning tunnel type microscope having an interchangeable probe and an optical microscope having an objective are disposed coaxially with each other, said compound type microscope having: a photographic unit for photographing at least a portion imaged by said optical microscope and making it into an observation image; and aligning means for moving said photographic unit in a direction perpendicular to the axial direction of said probe.
Claim 15
Dependent Claim
70 words
A compound type microscope according to Claim 14, wherein said optical microscope has: a lens barrel formed with an opening portion; a connecting portion for mounting said photographic unit in said opening portion with a clearance which makes said photographic unit movable in a direction perpendicular to the axial direction of said probe; and regulating means provided in said opening portion for regulating said clearance and fixing said photographic unit.
Claim 16
Dependent Claim
30 words
A compound type microscope according to Claim 15, wherein said regulating means fixes said photographic unit at any position relative to said lens barrel within the range of said clearance.
Claim 17
Dependent Claim
44 words
A compound type microscope according to Claim 16, wherein said regulating means is provided around said opening portion, and has a feed screw portion for moving on said photographic unit, and a spring portion for urging said photographic unit against said feed screw portion.
Claim 18
Dependent Claim
43 words
A compound type microscope according to Claim 16, wherein said regulating means is provided around said opening portion, and has a feed screw portion for moving on said photographic unit, and a magnet for connecting said photographic unit to said feed screw portion.
References Cited (Backward Citations)
No citation records indexed.
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