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EP0524930B1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Fluorinated poly(arylene ethers)

Assignee: Honeywell International Inc
•
Filing: 1990-12-07
•
Granted: 1997-03-12
•
Expires: 2010-12-07
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Abstract

Abstract Fluorinated poly(arylene ethers) having a repeat unit such as (A) are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips.

Inventors

  • 👤 Frank W. Mercer
  • 👤 Richard C. Sovish

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-04 05:59
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/69; C; C08; C08G; C08G65/00; C08G65/34; C08G65/38; C08G65/40; C08G65/4006; C08G75/00; C08G75/20; C08G75/23; C08L; C08L71/00; C08L81/00; C08L81/06; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H10W74/00; H10W74/40; H10W74/47; C08G2650/00; C08G2650/02; C08G2650/20; C08G2650/28; C08G2650/46; C08G2650/48; C08L2203/00; C08L2203/20; C08L2312/00; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/034; H05K3/00; H05K3/46; H05K3/4644; H05K3/4673; H05K3/4676

Claims Analysis

Total Claims: 15
Claim 1
Independent Claim 181 words
A fluorinated poly(arylene ether) comprising a repeat unit of the structure wherein -W- is wherein each -A is independently -F, -Cl, -Br, -CF 3 , -CH 3 , -CH 2 CH=CH 2 , or -C 6 H 5 ; p is 0, 1, or 2; -Z- is a direct bond, -C(CH 3 ) 2 , -C(CF 3 ) 2 -, -O-, -S-, -SO 2 -, -CO, -P(C 6 H 5 )-,-C(CH 3 )(C 6 H 5 ), -C(C 6 H 5 ) 2 -, -(CF 2 ) 1-6 -, or wherein -Y- is -O- or a direct bond; and m is 0,1, or 2; each -X is independently -H, -Cl, -Br, -CF 3 , -CH 3 , -CH 2 CH=CH 2 , or -C 6 H 5 ; q is 0, 1, or 2; and n is 1 or 2; provided that if -Z- is -C(CH 3 ) 2 - and m is 1, then p is not 0, and that if Z is, -S-, or -SO 2 - and m is 1, then p and q are not both 0.
Claim 2
Dependent Claim 11 words
A fluorinated poly(arylene ether) according to claim 1, wherein -W- is
Claim 3
Dependent Claim 12 words
A fluorinated poly(arylene ether) according to claim 1, wherein -W- is or
Claim 4
Dependent Claim 9 words
A fluorinated poly(arylene ether) according to claim 1, wherein
Claim 5
Dependent Claim 16 words
A fluorinated poly(arylene ether) according to claim 1, comprising a repeat unit of the structure or
Claim 6
Dependent Claim 22 words
A fluorinated poly(arylene ether) according to claim 1, which is a copolymer comprising at least two different fluorinated poly(arylene ether) repeat units.
Claim 7
Dependent Claim 28 words
A fluorinated poly(arylene ether) according to claim 1 or 2, which has been crosslinked by heating in air at a temperature between about 300 and about 400 °C.
Claim 8
Dependent Claim 24 words
A fluorinated poly(arylene ether) according to claim 1 or 2, which has been crosslinked by heating an intimate mixture thereof with a peroxydic compound.
Claim 9
Dependent Claim 26 words
A fluorinated poly(arylene ether) according to claim 8, wherein the peroxydic compound is selected from the group consisting of cumene hydroperoxide, dicumyl peroxide, and benzoyl peroxide.
Claim 10
Independent Claim 199 words
A method of making a fluorinated poly(arylene ether) comprising a repeat unit of the structure which method comprises polymerizing a diphenol monomer H-W-H, wherein -W- is wherein each -A is independently -F, -Cl, -Br, -CF 3 , -CH 3 , -CH 2 CH=CH 2 , or -C 6 H 5 ; p is 0, 1, or 2; -Z- is a direct bond, -C(CH 3 ) 2 -, -C(CF 3 ) 2 -, -O-, -S-, -SO 2 -, -CO-, -P(C 6 H 5 )-,-C(CH 3 )(C 6 H 5 ), -C(C 6 H 5 ) 2 -, -(CF 2 ) 1-6 -, or wherein -Y- is -O- or a direct bond; and m is 0, 1, or 2; provided that if -Z- is -C(CH 3 ) 2 - and m is 1, then p is not 0, and that if Z is, -S-, or -SO 2 - and m is 1, then p and q are not both 0; with a fluorinated monomer wherein each -X is independently -H, -Cl, -Br, -CF 3 , -CH 3 , -CH 2 CH=CH 2 , or -C 6 H 5 ; q is 0, 1, or 2; and n is 1 or 2.
Claim 11
Dependent Claim 28 words
A method according to claim 10, wherein the diphenol monomer is selected from the group consisting of 4,4'-(hexafluoroisopropylidene)diphenol, 4,4'-isopropylidene-di(2,6-dimethylphenol), 4,4'-(1-phenylethylidene)bisphenol, 9,9'-bis(4-hydroxyphenyl)fluorene, 2,7-dihydroxynaphthalene, 1,5-dihydroxynaphthalene, resorcinol, 4,6-dichlororesorcinol, and combinations thereof.
Claim 12
Dependent Claim 28 words
A method according to claim 10, wherein the fluorinated monomer is selected from the group consisting of hexafluorobenzene, decafluorobiphenyl, pentafluorobenzene, octafluorotoluene, 1,4-dibromotetrafluorobenzene, chloropentafluorobenzene, allylpentafluorobenzene, 2,2',3,3',5,5',6,6'-octafluorobiphenyl, and combinations thereof.
Claim 13
Independent Claim 203 words
A method of crosslinking a fluorinated poly(arylene ether) comprising a repeat unit of the structure wherein -W- is wherein each -A is independently -F, -Cl, -Br, -CF 3 , -CH 3 , -CH 2 CH=CH 2 , or -C 6 H 5 ; p is 0, 1, or 2; -Z- is a direct bond, -C(CH 3 ) 2 -, -C(CF 3 ) 2 -, -O-, -S-, -SO 2 -, -CO, -P(C 6 H 5 )-, -C(CH 3 )(C 6 H 5 ), -C(C 6 H 5 ) 2 -, (CF 2 ) 1-6 -, or wherein -Y- is -O- or a direct bond; and m is 0, 1, or 2; each -X is independently -H, -Cl, -Br, -CF 3 , -CH 3 , -CH 2 CH-CH 2 , or -C 6 H 5 ; q is 0, 1, or 2; and n is 1 or 2; provided that if Z is -C(CH 3 ) 2 - and m is 1, then p is not 0, and that if Z is -S-, or -SO 2 -, and m is 1, then p and q are not both 0. which method comprises heating an intimate mixture of the fluorinated poly(arylene ether) and a peroxydic compound.
Claim 14
Dependent Claim 39 words
A method according to claim 13, wherein the peroxydic compound is present in the intimate mixture in an amount of between 5 and 20 % by weight based on the combined amounts of fluorinated poly(arylene ether) and peroxydic compound.
Claim 15
Dependent Claim 21 words
A method according to claim 13, wherein the intimate mixture is heated to a temperature between 350 °C and 425 °C.

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