EP0523609A2
Expired / Lapsed
EP
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Method for forming a film with plasma CVD process
Assignee: Panasonic Holdings Corp
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Filing: 1992-07-14
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Granted: —
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Expires: 2012-07-14
Abstract
Abstract In the plasma discharge to form a film on a magnetic tape of the like in a plasma CVD process, a hollow electrode 12 is arranged in a discharge tube 8 or arranged opposed to another electrode 34. A non-polymerizable gas is blown out from the inside of the hollow electrode 12 made from a sintered alloy, and impurities do not adhere to the magnetic tape. Then, small traces of discharge are not generated on the magnetic tape and impurities do not contaminate the magnetic tape, so that a uniform thin film of high quality is manufactured at a high rate in an industrial scale.
Inventors
- 👤 Mikio Murai
- 👤 Kiyoshi Takahashi
- 👤 Masaru Odagiri
- 👤 Hideyuki Ueda
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 20:14
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45517; C23C16/22; C23C16/24; C23C16/26; C23C16/45563; C23C16/45568; C23C16/50; C23C16/503; C23C16/505; C23C16/509; C23C16/54; C23C16/545; G; G11; G11B; G11B5/00; G11B5/84; G11B5/8408; Y; Y10; Y10S; Y10S427/00; Y10S427/103; Y10S427/106
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
126 words
A method for forming a film in a plasma CVD apparatus comprising a vacuum chamber, a first electrode provided in the vacuum chamber, which first porous electrode having narrow holes in the inner wall, and a second electrode provided in the vacuum chamber opposed the inner wall of the first electrode, which second electrode holding a substrate for the CVD deposition, which first and second electrodes defining a plasma discharge region; which method comprising the steps of: evacuating the vacuum chamber to a prescribed pressure for plasma discharge; introducing a non-polymerizable gas through said porous electrode; introducing a polymerizable gas through an inlet to the plasma discharge region; and applying an electrical voltage to the porous electrode to cause plasma discharge in the plasma discharge region.
Claim 2
Dependent Claim
16 words
A method according to Claim 1, wherein said porous electrode is made from a sintered alloy.
Claim 3
Dependent Claim
18 words
A method according to Claim 1, Wherein Said porous electrode is made from a metal having narrow holes.
Claim 4
Dependent Claim
29 words
A method according to Claim 1, wherein said polymerizable gas is a hydrocarbon to form a film of diamond-like carbon film and said non-polymerizable gas is an inert gas.
Claim 5
Dependent Claim
27 words
A method according to Claim 4, wherein said substrate is a magnetic recording medium and said thin film is a protection film of the magnetic recording medium.
Claim 6
Dependent Claim
25 words
A method according to Claim 1, wherein said polymerizable gas is a tetrachlorosilane to form an amorphous silicon film and said non-polymerizable gas is hydrogen.
Claim 7
Independent Claim
107 words
A method for forming a film in a plasma CVD apparatus comprising a vacuum chamber, an insulating discharge tube provided in the vacuum chamber, which discharge tube defining a plasma discharge region together with a substrate to which a film is deposited, and a porous electrode provided in the discharge tube; which method comprising the steps of: evacuating the vacuum chamber to a prescribed pressure for plasma discharge; introducing a non-polymerizable gas through said porous electrode; introducing a polymerizable gas in said discharge tube to the plasma discharge region; and applying an electrical voltage to the porous electrode to cause plasma discharge in the plasma discharge region.
Claim 8
Dependent Claim
25 words
A method for forming a film with a plasma CVD process according to Claim 7, wherein said porous electrode is made from a sintered alloy.
Claim 9
Dependent Claim
27 words
A method for forming a film with a plasma CVD process according to Claim 7, wherein said porous electrode is made from a metal having fine openings.
Claim 10
Dependent Claim
29 words
A method according to Claim 7, wherein said polymerizable gas is a hydrocarbon to form a film of diamond-like carbon film and said non-polymerizable gas is an inert gas.
Claim 11
Dependent Claim
27 words
A method according to Claim 10, wherein said substrate is a magnetic recording medium and said thin film is a protection film of the magnetic recording medium.
Claim 12
Dependent Claim
25 words
A method according to Claim 7, wherein said polymerizable gas is a tetrachlorosilane to form an amorphous silicon film and said non-polymerizable gas is hydrogen.
Claim 13
Independent Claim
148 words
A method for forming a film in a plasma CVD apparatus comprising a vacuum chamber, an insulating discharge tube provided in the vacuum chamber, which discharge tube defining a plasma discharge region together with a substrate to which a film is deposited, which discharge tube having a space between the outer wall and inner wall having narrow holes, and a porous electrode provided in the discharge tube; which method comprising the steps of: evacuating the vacuum chamber to a prescribed pressure for plasma discharge; introducing a non-polymerizable gas in said porous electrode; introducing the non-polymerizable gas through the space in said discharge tube at the same time as the introduction of the non-polymerizable gas through said discharge tube; introducing a polymerizable gas in said discharge tube to the plasma discharge region; applying an electrical voltage to the porous electrode to cause plasma discharge in the plasma discharge region.
Claim 14
Dependent Claim
25 words
A method for forming a film with a plasma CVD process according to Claim 13, wherein said porous electrode is made from a sintered alloy.
Claim 15
Dependent Claim
27 words
A method for forming a film with a plasma CVD process according to Claim 13, wherein said porous electrode is made from a metal having fine openings.
Claim 16
Dependent Claim
29 words
A method according to Claim 15, wherein said polymerizable gas is a hydrocarbon to form a film of diamond-like carbon film and said non-polymerizable gas is an inert gas.
Claim 17
Dependent Claim
27 words
A method according to Claim 16, wherein said substrate is a magnetic recording medium and said thin film is a protection film of the magnetic recording medium.
Claim 18
Dependent Claim
25 words
A method according to Claim 15, wherein said polymerizable gas is a tetrachlorosilane to form an amorphous silicon film and said non-polymerizable gas is hydrogen.
References Cited (Backward Citations)
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