Patent US426371A successfully refreshed from Google Patents.
EP0516480A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method for surface treatment with extra-low-speed ion beam
Assignee: Japan Science and Technology Agency
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Filing: 1992-05-29
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Granted: —
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Expires: 2012-05-29
Abstract
Abstract Forming a cluster of atoms or molecules of a substance in gaseous form at ambient temperature, and accelerating with an acceleration voltage ions generated from the thus formed cluster to irradiate the surface of a solid permits non-damage surface cleaning, ion injection into a very shallow surface layer portion, and chemical vapour deposition. <IMAGE>
Inventors
- 👤 Isao Yamada
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 19:42
CPC Classifications
H; H10; H10P; H10P30/00; H10P30/20; H10P30/21; C; C23; C23C; C23C14/00; C23C14/02; C23C14/021; C23C14/022; C23C14/22; C23C14/221; C23C14/48; H10P30/202; H10P30/204; H10P30/224; H10P30/225; H10P32/00; H10P32/10; H10P32/12; H10P32/1204; H10P70/00; H10P70/10; H10P70/12
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
43 words
A method for surface treatment of a solid by irradiating a surface of said solid with an ion beam accelerated by an acceleration voltage, characterised in that said ions are generated by ionising a cluster of atoms and/or molecules of a gaseous substance.
Claim 2
Dependent Claim
23 words
A method as claimed in claim 1 wherein said cluster of atoms and/or molecules is formed by adiabatic expansion of the gaseous substance.
Claim 3
Dependent Claim
46 words
A method as claimed in claim 1 or claim 2 wherein the gaseous substance is an inert gas, a carbon-containing, oxygen-containing, fluorine-containing, chlorine-containing, hydrogen-containing or sulphur-containing substance which is gaseous at ambient temperature, or a mixture of two or more of any of the preceding gases.
Claim 4
Independent Claim
22 words
A method as claimed in any of the preceding claims wherein said cluster of atoms or molecules is ionised by electron irradiation.
Claim 5
Independent Claim
17 words
A method as claimed in any of the preceding claims wherein the ion beam comprises cluster ions.
Claim 6
Dependent Claim
14 words
A method as claimed in claim 6 wherein said cluster ions are negatively charged.
Claim 7
Independent Claim
17 words
A method as claimed in any of the preceding claims wherein the surface treatment comprises non-damage cleaning.
Claim 8
Independent Claim
29 words
A method as claimed in any of claims 1 to 6 wherein the surface treatment comprises injection of ions into a shallow surface layer portion of the said surface.
Claim 9
Independent Claim
19 words
A method as claimed in any of claims 1 to 6 wherein the surface treatment comprises chemical vapour deposition.
References Cited (Backward Citations)
No citation records indexed.
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