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EP0511763A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Cantilever type probe, and scanning tunnel microscope and information processing apparatus employing the same

Assignee: Canon Inc
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Filing: 1992-04-21
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Granted: —
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Expires: 2012-04-21
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Abstract

Abstract The probe comprises a cantilever-shaped displacement element and a tip (108) which displacement element has a first electrode layer (105), a first piezoelectric material film (101) and a second piezoelectric material film (102) which films are laminated on respective sides of the first electrode layer, and a second electrode layer (106) and a third electrode layer (103) which layer are laminated on respective surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer are more protruded out than each end of the second and third electrode layers does. A scanning tunneling microscopy comprises the cantilever type probe (205), a driving means (203) for displacing the probe, a stage for specimen so as to approach and locate the specimen (206) to the tip, and a potential applying means (201) for applying a bias voltage between the tip and the specimen. An information processing apparatus further comprises a second potential applying means (18) for applying a pulse and bias voltage between the tip (13) and the recording medium (14); wherein an information is written on the recording medium and an information in the recording medium is read out by electric current flowing between the tip and the recording medium.

Inventors

  • 👤 Osamu C/O Canon Kabushiki Kaisha Takamatsu
  • 👤 Yutaka C/O Canon Kabushiki Kaisha Hirai
  • 👤 Masaru C/O Canon Kabushiki Kaisha Nakayama
  • 👤 Takayuki C/O Canon Kabushiki Kaisha Yagi
  • 👤 Yuji C/O Canon Kabushiki Kaisha Kasanuki
  • 👤 Yasuhiro c/o Canon Kabushiki Kaisha Shimada

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-06 08:59
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G01Q20/00; G01Q20/04; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; G11B9/1427; G11B9/1436; B82Y10/00; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/832; Y10S977/837; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/872; Y10S977/873; Y10S977/875

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 115 words
A cantilever type probe comprised of a cantilever-shaped displacement element and a tip which displacement element has a first electrode layer, first piezoelectric material film and a second piezoelectric material film which films are laminated on respective sides of the first electrode layer, and a second electrode layer and third electrode layer which layer are laminated on respective surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer are more protruded out than each end of the second and third electrode layers does.
Claim 2
Dependent Claim 38 words
The cantilever type probe according to claim 1, wherein a width of said first electrode layer is larger than each that of said second electrode layer and third electrode layer in the width direction of said displacement element.
Claim 3
Dependent Claim 50 words
The cantilever type probe according to claim 1, wherein a differences in the width in the width direction of said displacement element between said first electrode layer and either said second electrode layer or said third electrode layer are not less than twice the maximum positional deviation in electrode alignment.
Claim 4
Dependent Claim 27 words
The cantilever type probe according to claim 1, wherein both of said second and third electrode layers are separated in the width direction of said displacement element.
Claim 5
Dependent Claim 32 words
The cantilever probe according to claim 1, wherein a driving electric source for displacing said displacement element by a converse piezoelectric effect is connected with said first, second and third electrode layers.
Claim 6
Dependent Claim 29 words
The cantilever type probe according to claim 1, wherein a virtual area of said first electrode layer is larger than those of said second and third electrode layers, respectively.
Claim 7
Dependent Claim 23 words
The cantilever type probe according to claim 1, wherein said first, second and third electrode layers are placed in parallel with each other.
Claim 8
Dependent Claim 56 words
A scanning tunneling microscopy, comprising a cantilever type probe according to any one of claims 1 to 7, a driving means for displacing said probe, a stage for specimen so as to approach and locate the specimen to said tip, and a potential applying means for applying a bias voltage between the tip and the specimen.
Claim 9
Dependent Claim 83 words
An information processing apparatus, comprising a cantilever type probe according to any one of claims 1 to 7, a driving means for displacing said probe, a stage for a recording medium so as to approach and locate the recording medium to said tip of said probe, and a potential applying means for applying a pulse voltage between the tip and the recording medium; wherein an information is written on the recording medium by electric current flowing between the tip and the recording medium.
Claim 10
Dependent Claim 81 words
An information processing apparatus, comprising a cantilever type probe according to any one of claims 1 to 7, a driving means for displacing said probe, a stage for a recording medium so as to approach and locate the recording medium to said tip, and a potential applying means for applying a bias voltage between the tip and the recording medium; wherein an information in the recording medium is read out by electric current flowing between the tip and the recording medium.
Claim 11
Dependent Claim 111 words
An information processing apparatus, comprising a cantilever type probe according to any one of claims 1 to 7, a driving means for displacing said probe, a stage for a recording medium so as to approach and locate the recording medium to said tip of said probe, a first potential applying means for applying a pulse voltage between the tip and the recording medium, and a second potential applying means for applying a bias voltage between the tip and the recording medium; wherein an information is written on the recording medium and an information in the recording medium is read out by electric current flowing between the tip and the recording medium.
Claim 12
Dependent Claim 49 words
A tunnelling current probe having a central electrode (105) sandwiched between insulating material (101,102) and external electrodes (103,106) wherein the transverse width of the central electrode is greater than that of said other two electrodes so that said central electrode protrudes beyond the edges of said other two electrodes.

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