Process and apparatus for coating at least one object

Abstract

Abstract To produce dielectric layers, a conducting target is reactively sputtered. The glow discharge maintained for this purpose is fed with direct current and alternating current superimposed on the direct current. A control circuit stabilises the working point of the process in the transition mode which is unstable per se. A high coating rate accompanied by a high reactivity of the deposited layer is achieved.

Inventors

• 👤 Eduard Dr. Dipl.-Ing. Kuegler

Bibliographic Details