EP0506368A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Organic functional thin film, fabrication and use thereof
Assignee: Fujitsu Ltd
•
Filing: 1992-03-25
•
Granted: —
•
Expires: 2012-03-25
Abstract
Abstract An organic functional thin film is comprised of a polymer of a molecule having two or more identical or different groups selected from the group consisting of a carbonyloxycarbonyl group, a carboxylic acid group, a carboxylic acid halide group, a carboxyl group, a -COCl group, an -NCO group, a -CHO group and an epoxy group and a molecule having two or more identical or different groups selected from the group consisting of an amino group, groups containing at least one amino proton, an alkylamino group, a silylated alkylamino group, a carboxylic acid group and a hydroxyl group, formed by vapor-phase deposition, the polymer-forming molecules having at least partially one or more donor and/or acceptor groups. Similar organic thin films are also disclosed. These organic thin films are useful for various electronic applications.
Inventors
- 👤 Tetsuzo c/o FUJITSU LTD. Yoshimura
- 👤 Ei c/o FUJITSU LTD. Yano
- 👤 Satoshi c/o FUJITSU LTD. Tatsuura
- 👤 Wataru c/o FUJITSU LTD. Sotoyama
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-24 09:08
CPC Classifications
B; B82; B82Y; B82Y10/00; C; C08; C08G; C08G59/00; C08G59/18; C08G59/20; C08G59/22; C08G59/28; C08G59/40; C08G59/50; C08G59/504; C08G69/00; C08G73/00; C08G77/00; C08G77/60; G; G02; G02F; G02F1/00; G02F1/35; G02F1/355; G02F1/361; G02F1/3615; G02F1/3616; G02F1/3617; H; H10; H10K; H10K10/00; H10K10/701; H10K71/00; H10K71/10; H10K85/00; H10K85/10; H10K85/111; H10K85/761; H10K10/40; H10K10/46
Claims Analysis
Total Claims: 113
Claim 1
Independent Claim
111 words
An organic functional thin film comprised of a polymer of a molecule having two or more identical or different groups selected from the group consisting of a carbonyloxycarbonyl group, a carboxylic acid group, a carboxylic acid halide group, a carboxyl group, a -COCl group, an -NCO group and an epoxy group and a molecule having two or more identical or different groups selected from the group consisting of an amino group, groups containing at least one amino proton, an alkylamino group, a silylated alkylamino group, a carboxylic acid group and a hydroxyl group, formed by vapor-phase deposition, the polymer-forming molecules having at least partially one or more donor and/or acceptor groups.
Claim 2
Dependent Claim
25 words
A thin film as set forth in claim 1, wherein at least one of the donor groups is a group other than an amino group.
Claim 3
Dependent Claim
42 words
A thin film as set forth in claim 1, wherein at least one portion of the groups contained in a molecule is separated from a conjugate π electron system that composes the backbone of the molecule by two or more single bonds.
Claim 4
Dependent Claim
34 words
A thin film as set forth in claim 1, which is formed by combining an epoxy monomer having two or more epoxy rings with a non-linear optical molecule having two or more amino protons.
Claim 5
Dependent Claim
19 words
A thin film as set forth in claim 4, wherein the non-linear organic molecule also possesses an acceptor group.
Claim 6
Dependent Claim
65 words
A thin film as set forth in claim 1, which is formed by combining a dianhydride of a tetravalent carboxylic acid having at least 6 carbon atoms or a halide of a divalent carboxylic acid having at least 4 carbon atoms with a molecule having at least 2 amino groups and/or alkylamino groups having 1 to 10 carbon atoms and a donor and/or acceptor group.
Claim 7
Dependent Claim
18 words
A thin film as set forth in claim 1, further having a hydrophilic group and/or hydrophobic group added.
Claim 8
Dependent Claim
105 words
An organic functional thin film comprised of a polymer of a molecule having one or more groups selected from the group consisting of a carbonyloxycarbonyl group, a carboxylic acid group, a carboxylic acid halide group, a carboxyl group, a -COCl group, an -NCO group and an epoxy group and a molecule having one or more groups selected from the group consisting of an amino group, groups containing at least one amino proton, an alkylamino group, a silylated alkylamino group, a carboxylic acid group and a hydroxyl group, formed by vapor-phase deposition, the polymer-forming molecules having at least partially one or more donor and/or acceptor groups.
Claim 9
Dependent Claim
29 words
A thin film as set forth in claim 8, wherein at least one of the groups added as a donor group is a group other than an amino group.
Claim 10
Dependent Claim
42 words
A thin film as set forth in claim 8, wherein at least one portion of the groups contained in a molecule is separated from a conjugate π electron system that composes the backbone of the molecule by two or more single bonds.
Claim 11
Dependent Claim
35 words
A thin film as set forth in claim 8, which is formed by combining a monomer having two or more epoxy rings with a monomer having two or more amino protons and an acceptor group.
Claim 12
Dependent Claim
65 words
A thin film as set forth in claim 8, which is formed by combining a dianhydride of a tetravalent carboxylic acid having at least 6 carbon atoms or a halide of a divalent carboxylic acid having at least 4 carbon atoms with a molecule having at least 2 amino groups and/or alkylamino groups having 1 to 10 carbon atoms and a donor and/or acceptor group.
Claim 13
Dependent Claim
18 words
A thin film as set forth in claim 7, further having a hydrophilic group and/or hydrophobic group added.
Claim 14
Dependent Claim
33 words
A process for preparing an organic functional thin film as set forth in claims 1-13, comprising introducing or evaporating the molecules in vacuum followed by combining and/or polymerization to form a thin film.
Claim 15
Dependent Claim
24 words
A process according to claim 14, wherein a molecule able to act as a curing agent is introduced in vacuum to deposit the film.
Claim 16
Dependent Claim
22 words
A process according to claim 14, wherein the film is deposited by alternately projecting various types of the molecules onto a substrate.
Claim 17
Dependent Claim
45 words
A process according to claim 14, wherein during the film deposition, the substrate temperature is set to a temperature such that the molecule re-evaporation rate is higher than the molecule projection rate in the case of performing film deposition with each of the molecules individually.
Claim 18
Dependent Claim
21 words
A process according to claim 14, wherein the substrate temperature during the film deposition is set at or below room temperature.
Claim 19
Dependent Claim
15 words
A process according to claim 14, wherein the deposition is performed while irradiating with light.
Claim 20
Dependent Claim
17 words
A process according to claim 14, wherein the deposition is performed while irradiating with an electron beam.
Claim 21
Dependent Claim
19 words
A process according to claim 14, wherein the molecules are polymerized by heating or irradiation with light following deposition.
Claim 22
Dependent Claim
22 words
A process according to claim 14, wherein the deposition is performed while applying a voltage to pattern electrodes formed on a substrate.
Claim 23
Dependent Claim
36 words
A process according to claim 14, wherein the deposition is performed while applying a voltage between an electrode provided on or in the vicinity of a substrate and an electrode provided in opposition to the substrate.
Claim 24
Dependent Claim
21 words
A process according to claim 23, wherein the electrode provided in opposition to the substrate has a porous or mesh structure.
Claim 25
Dependent Claim
31 words
A process according to claim 23, wherein the electrode provided on or in the vicinity of the substrate and/or the electrode provided in opposition to the substrate are formed into patterns.
Claim 26
Dependent Claim
17 words
A process according to claim 14, wherein the deposition is performed in the presence of generated plasma.
Claim 27
Dependent Claim
139 words
A process for preparing an organic functional thin film, comprising projecting a plurality of types of molecules having two or more addition groups, in which the addition groups of the molecules of the same type have a weak reaction bonding strength while the addition groups of the molecules of different types have a reaction bonding strength greater than the reaction bonding strength between the addition groups of the molecules of the same type onto a substrate in vacuum in a specified sequence, wherein the substrate temperature during the projection to a temperature such that the molecule re-evaporation rate is higher than the molecule projection rate in the case of performing the film deposition with each of the molecules individually and a film is deposited on the substrate during the formation of reaction bonds with the molecules of different types.
Claim 28
Dependent Claim
102 words
A process according to claim 27, wherein a molecule having two or more identical or different groups selected from the group consisting of a carbonyloxycarbonyl group, a carboxylic acid group, a carboxylic acid halide group, a carboxyl group, a -COCl group, an -NCO group and an epoxy group and a molecule having two or more identical or different groups selected from the group consisting of an amino group, groups containing at least one amino proton, an alkylamino group, a silylated alkylamino group, a carboxylic acid group and a hydroxyl group are used, and two or more types of the molecules are used.
Claim 29
Dependent Claim
42 words
A process according to claim 27, wherein a molecule having two or more halogen groups and a molecule having two or more groups selected from hydrogen, alkali metals and copper are used, and two or more types of the molecules are used.
Claim 30
Dependent Claim
21 words
A process according to claim 27, wherein at least one portion of the molecules has a donor group and/or acceptor group.
Claim 31
Dependent Claim
26 words
A process according to claim 31, wherein at least one of the groups added as a donor group is a group other than an amino group.
Claim 32
Dependent Claim
39 words
A process according to claim 27, wherein at least one portion of the groups contained in a molecule is separated from a conjugate π electron system that composes the backbone of the molecule by two or more single bonds.
Claim 33
Dependent Claim
15 words
A process according to claim 27, wherein the deposition is performed while irradiating with light.
Claim 34
Dependent Claim
17 words
A process according to claim 27, wherein the deposition is performed while irradiating with an electron beam.
Claim 35
Dependent Claim
19 words
A process according to claim 27, wherein the molecules are polymerized by heating or irradiation with light following deposition.
Claim 36
Dependent Claim
22 words
A process according to claim 27, wherein the deposition is performed while applying a voltage to pattern electrodes formed on a substrate.
Claim 37
Dependent Claim
36 words
A process according to claim 27, wherein the deposition is performed while applying a voltage between an electrode provided on or in the vicinity of a substrate and an electrode provided in opposition to the substrate.
Claim 38
Dependent Claim
21 words
A process according to claim 37, wherein the electrode provided in opposition to the substrate has a porous or mesh structure.
Claim 39
Dependent Claim
31 words
A process according to claim 37, wherein the electrode provided on or in the vicinity of the substrate and/or the electrode provided in opposition to the substrate are formed into patterns.
Claim 40
Dependent Claim
17 words
A process according to claim 27, wherein the deposition is performed in the presence of generated plasma.
Claim 41
Dependent Claim
45 words
An organic functional thin film comprised of a polymer of a plurality of types of molecules linked together in the manner of bonding with double or triple bonds, and possessing a portion in which the conjugate length between consecutive π electrons is 10Å or more.
Claim 42
Dependent Claim
34 words
A thin film according to claim 41, wherein the polymer is a polymer comprised of the alternate bonding of molecules having a plurality of -CHO groups and molecules having a plurality of -NH₂ groups.
Claim 43
Dependent Claim
14 words
A thin film according to claim 41, wherein the polymer is a microcrystalline substance.
Claim 44
Dependent Claim
46 words
An organic functional thin film comprised of a polymer of a plurality of types of molecules linked together in the manner of bonding with double or triple bonds, wherein a portion of the conjugated system between molecular units participating in bonding is divided by single bonds.
Claim 45
Dependent Claim
34 words
A thin film according to claim 44, wherein the single bonds are formed by bonding of groups contained in at least one portion of the plurality of types of unit molecules with other molecules.
Claim 46
Dependent Claim
24 words
A thin film according to claim 44, wherein the single bonds are introduced by copolymerization of molecules containing two or more consecutive single bonds.
Claim 47
Dependent Claim
40 words
An organic functional thin film comprised of a polymer of a plurality of types of molecules in the manner of bonding with double or triple bonds, wherein at least one portion of the molecular units possesses donor and/or acceptor characteristics.
Claim 48
Dependent Claim
25 words
An organic functional thin film according to claim 44, wherein the donor characteristics are provided by donor groups such as -NH₂, -N(CH₃)₂, -OCH₃ or -OH.
Claim 49
Dependent Claim
24 words
An organic functional thin film according to claim 47, wherein the acceptor characteristics are provided by acceptor groups such as -NO₂ -CN or -CF₃.
Claim 50
Dependent Claim
21 words
A thin film according to claim 47, wherein at least one of the donor groups is a group other than -NH₂.
Claim 51
Dependent Claim
34 words
A thin film according to claim 47, wherein the polymer is a polymer comprised of the alternate bonding of molecules having a plurality of -CHO groups and molecules having a plurality of -NH₂ groups.
Claim 52
Dependent Claim
14 words
A thin film according to claim 47, wherein the polymer is a microcrystalline substance.
Claim 53
Dependent Claim
31 words
A thin film according to claim 47, wherein the polymer is a polymer wherein a portion of the conjugated system between molecular units participating in bonding is divided by single bonds.
Claim 54
Dependent Claim
35 words
A thin film according to claim 53, wherein the single bonds are formed by bonding of groups contained in at least one portion of the above-mentioned plurality of types of unit molecules with other molecules.
Claim 55
Dependent Claim
24 words
A thin film according to claim 53, wherein the single bonds are introduced by copolymerization of molecules containing two or more consecutive single bonds.
Claim 56
Dependent Claim
39 words
A process for preparing the organic functional thin film according to claims 41-55, wherein the molecules are either introduced in a vacuum or evaporated in a vacuum and bonded and/or polymerized on a substrate to form a thin film.
Claim 57
Dependent Claim
25 words
A process according to claim 56, wherein the film formation is performed by sequentially projecting the molecules to be polymerized onto a substrate using MLD.
Claim 58
Dependent Claim
23 words
A process according to claim 56, wherein the substrate is treated in advance with a silane-based surface active material having terminal amino protons.
Claim 59
Dependent Claim
19 words
A process according to claim 56, wherein a film of the molecules having amino protons is formed in advance.
Claim 60
Dependent Claim
11 words
A process according to claim 59 wherein the molecule is 1,10-diaminodecane.
Claim 61
Dependent Claim
11 words
A non-linear optical material using a film according to claims 41-55.
Claim 62
Dependent Claim
10 words
An optical waveguide using a film according to claims 41-55.
Claim 63
Dependent Claim
11 words
A p- or n-semiconductor using a film according to claims 41-55.
Claim 64
Dependent Claim
10 words
A pn junction using a film according to claims 41-55.
Claim 65
Dependent Claim
9 words
A TFT using a film according to claims 41-55.
Claim 66
Dependent Claim
11 words
A light emitting device using a film according to claims 41-55.
Claim 67
Dependent Claim
38 words
An organic functional thin film comprised of a polymer of two or more different molecules selected from molecules having two or more different groups, formed by vapor-phase deposition, the polymer containing Si and/or Ge in the molecular chain.
Claim 68
Dependent Claim
31 words
A thin film according to claim 67, wherein the polymer is formed by linking a molecule having a plurality of hydrogen atoms and a molecule having a plurality of halogen atoms.
Claim 69
Dependent Claim
31 words
A thin film according to claim 67, wherein the polymer is formed by linking a molecule having a plurality of -CHO groups and a molecule having a plurality of -NH₂ groups.
Claim 70
Dependent Claim
22 words
A thin film according to claim 67, wherein at least a portion of the molecules has a donor group and/or acceptor group.
Claim 71
Dependent Claim
22 words
A thin film according to claim 67, wherein at least a portion of the molecules has a donor-type atom and/or acceptor-type atom.
Claim 72
Dependent Claim
40 words
A thin film according to claim 67, wherein at least a portion of the polymer chain contains units of a molecule having a dianhydride group of a carboxylic acid, a halide group of a carboxylic acid or a -NCO group.
Claim 73
Dependent Claim
42 words
A thin film according to claim 67, wherein at least a portion of the polymer chain contains units of a molecule having a group of one amino proton, an alkylamino group having 1 to 10 carbon atoms or a silylated amino group.
Claim 74
Dependent Claim
42 words
A thin film according to claim 67, wherein at least a portion of the polymer chain contains units of a molecule in which the electronic continuity between the groups participating in the reaction is divided by two or more successive single bonds.
Claim 75
Dependent Claim
14 words
A thin film according to claim 67, wherein the polymer chain contains O atoms.
Claim 76
Dependent Claim
11 words
A non-linear optical material using a film according to claims 67-75.
Claim 77
Dependent Claim
10 words
An optical waveguide using a film according to claims 67-75.
Claim 78
Dependent Claim
11 words
A p- or n-semiconductor using a film according to claims 67-75.
Claim 79
Dependent Claim
10 words
A pn junction using a film according to claims 67-75.
Claim 80
Dependent Claim
10 words
A light-emitting device using a film according to claims 67-75.
Claim 81
Dependent Claim
10 words
A light-receiving device using a film according to claims 67-75.
Claim 82
Dependent Claim
32 words
An epoxy polymer thin film comprised of a polymer of a molecule having one or more aliphatic amino group and a molecule having two or more epoxy groups, formed by vapor-phase deposition.
Claim 83
Dependent Claim
10 words
An insulating film using a film according to claim 82.
Claim 84
Dependent Claim
10 words
A protective film using a film according to claim 82.
Claim 85
Dependent Claim
13 words
A core of an optical waveguide using a film according to claim 82.
Claim 86
Dependent Claim
13 words
A cladding of an optical waveguide using a film according to claim 82.
Claim 87
Dependent Claim
10 words
A molecule-orientating film using a film according to claim 82.
Claim 88
Dependent Claim
10 words
A lubricating film using a film according to claim 82.
Claim 89
Dependent Claim
13 words
A substance for an electronic circuit using a film according to claim 82.
Claim 90
Dependent Claim
10 words
A negative resist using a film according to claim 82.
Claim 91
Dependent Claim
10 words
A positive resist using a film according to claim 82.
Claim 92
Dependent Claim
10 words
A reflection-preventing film using a film according to claim 82.
Claim 93
Dependent Claim
11 words
A non-linear optical material using a film according to claim 82.
Claim 94
Dependent Claim
26 words
An EL element in which a luminescent molecule unit is arranged between an n-type polymer chain and a p-type polymer chain in an n- and p-polymer.
Claim 95
Dependent Claim
21 words
An electrochromic polymer in which electron-donating and electron-accepting molecule units are alternately arranged one by one in a plurality of layers.
Claim 96
Dependent Claim
28 words
An electrochromic polymer in which combinations of an electron-donating molecule unit and an electron-accepting molecule unit are arranged through an electron-blocking molecule unit in a plurality of layers.
Claim 97
Dependent Claim
23 words
An electrochromic or photochromic polymer as set forth in claim 96, wherein a barrier molecule unit is contained as the electron-blocking molecule unit.
Claim 98
Dependent Claim
25 words
A photo-refractive polymer comprising units of a molecule having second-order non-linear optical characteristics and of a hole and/or electron-carrying molecule added to a polymer chain.
Claim 99
Dependent Claim
19 words
A photo-refractive polymer as set forth in claim 98, wherein hole and/or electron-carrying units are dispersed in the polymer.
Claim 100
Dependent Claim
20 words
A photo-refractive polymer as set forth in claim 98, wherein hole and/or electron-carrying units are added to the polymer chain.
Claim 101
Dependent Claim
20 words
A photo-refractive polymer as set forth in claim 98, wherein hole and/or electron-carrying units are introduced into the polymer chain.
Claim 102
Dependent Claim
26 words
A photo-refractive polymer comprising units of a molecule having second-order non-linear optical characteristics added to a polymer chain containing units of a hole and/or electron-carrying molecule.
Claim 103
Dependent Claim
19 words
A photo-refractive polymer as set forth in claim 102, wherein hole and/or electron-carrying units are dispersed in the polymer.
Claim 104
Dependent Claim
20 words
A photo-refractive polymer as set forth in claim 102, wherein hole and/or electron-carrying units are added to the polymer chain.
Claim 105
Dependent Claim
20 words
A photo-refractive polymer as set forth in claim 102, wherein hole and/or electron-carrying units are introduced into the polymer chain.
Claim 106
Dependent Claim
19 words
A photo-refractive polymer comprising units of a molecule having second-order non-linear optical characteristics added to a conjugate polymer chain.
Claim 107
Dependent Claim
19 words
A photo-refractive polymer as set forth in claim 106, wherein hole and/or electron-carrying units are dispersed in the polymer.
Claim 108
Dependent Claim
20 words
A photo-refractive polymer as set forth in claim 106, wherein hole and/or electron-carrying units are added to the polymer chain.
Claim 109
Dependent Claim
20 words
A photo-refractive polymer as set forth in claim 106, wherein hole and/or electron-carrying units are introduced into the polymer chain.
Claim 110
Dependent Claim
13 words
A photo-refractive polymer comprising a conjugate polymer chain having second-order non-linear optical characteristics.
Claim 111
Dependent Claim
19 words
A photo-refractive polymer as set forth in claim 110, wherein hole and/or electron-carrying units are dispersed in the polymer.
Claim 112
Dependent Claim
20 words
A photo-refractive polymer as set forth in claim 110, wherein hole and/or electron-carrying units are added to the polymer chain.
Claim 113
Dependent Claim
20 words
A photo-refractive polymer as set forth in claim 110, wherein hole and/or electron-carrying units are introduced into the polymer chain.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.