EP0476664A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method of forming small through-holes in thin metal plate
Assignee: Dainippon Screen Manufacturing Co Ltd
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Filing: 1991-09-19
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Granted: —
•
Expires: 2011-09-19
Abstract
Abstract A method of forming small through-holes in a thin metal layer including the steps of forming resist films having openings formed in accordance with a predetermined pattern; etching one or both sides of the thin metal plate and stopping etching before through-holes are formed; removing the overhang of the resist film by spraying high pressure fluid onto the etched side of the thin metal plate; covering the surface by an etch-resisting layer; forming through-holes by etching the side not covered; and stripping the etch-resisting layer and the resist film.
Inventors
- 👤 Keiji Dainippon Screen Mfg. Co. Ltd. Toei
- 👤 Yasuyoshi Dainippon Screen Mfg. Co. Ltd Miyaji
- 👤 Masanobu Dainippon Screen Mfg. Co. Ltd Sato
- 👤 Akihiro Dainippon Screen Mfg. Co. Ltd Inagaki
- 👤 Seiji Dainippon Screen Mfg. Co. Ltd Tonogai
- 👤 Koichi Dainippon Screen Mfg. Co. Ltd Omoto
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-06 09:19
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/74; C; C23; C23F; C23F1/00; C23F1/02; C23F1/04; C23F1/10; C23F1/14; C23F1/16; C23F1/28; H01; H01J; H01J9/00; H01J9/02; H01J9/14; H01J9/142; H10P72/7438
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
247 words
A method of forming small through-holes in a thin metal plate having first and second surfaces, comprising the steps of: forming a corrosion-resistant film having a plurality of openings formed in accordance with a set of predetermined patterns corresponding to each other for exposing said first and second surfaces; conducting a first etching to said first surface or said first surface and said second surface of said thin metal plate exposed by said openings of said corrosion-resistant film as far as a recess formed by the etching does not reach said second surface, the size of said recess on said first surface or said first and second surfaces being liable to be larger than the size of the opening formed in said corrosion-resistant film on said first surface or said first and second surfaces in said first etching step; removing at least that part of said corrosion-resistant film which protrudes on said recess by spraying predetermined fluid substance onto said first surface or said first and second surfaces on which said recess is formed, at a blowing pressure larger than a predetermined pressure; covering thereafter said first surface and said corrosion-resistant film on said first surface by an etch-resisting layer; conducting a second etching to said second surface exposed by the opening of said corrosion-resistant film until said second surface comes into communication with said recess formed in said first etching; and stripping said etch-resisting layer and said corrosion-resistant film formed on said first and second surfaces.
Claim 2
Dependent Claim
26 words
A method as recited in claim 1, further comprising conducting rinsing of the surface of said thin metal plate with water after said first etching step.
Claim 3
Dependent Claim
16 words
A method as recited in claim 2, wherein said removing step is performed after said rinsing.
Claim 4
Dependent Claim
32 words
A method as recited in claim 3, further comprising collecting said fluid substance used in said removing step and supplying said collected fluid substance once again for use in said removing step.
Claim 5
Dependent Claim
33 words
A method as recited in claim 3, further comprising conducting rinsing of said first surface of said thin metal plate or said first and second surfaces thereof with water after said removing step.
Claim 6
Dependent Claim
33 words
A method as recited in claim 1, further comprising conducting rinsing of said first surface of said thin metal plate or said first and second surfaces thereof with water after said removing step.
Claim 7
Dependent Claim
16 words
A method as recited in claim 2, wherein said removing step is effected by said rinsing.
Claim 8
Dependent Claim
28 words
A method as recited in claim 1, wherein said corrosion-resistant films formed on said first and second surfaces have a plurality of apertures arranged in a predetermined pattern.
Claim 9
Dependent Claim
30 words
A method as recited in claim 1, wherein said corrosion-resistant films formed on said first and second surfaces have a plurality of aperture grills arranged in parallel to each other.
Claim 10
Dependent Claim
50 words
A method as recited in claim 1, wherein said removing step includes a step of spraying said fluid substance from a nozzle onto said first surface and changing the relative position between said nozzle and said thin metal plate so that said fluid substance impinges upon substantially the entire surface.
Claim 11
Dependent Claim
20 words
A method as recited in claim 10, wherein the distance between said nozzle and said first surface is kept constant.
Claim 12
Dependent Claim
30 words
A method as recited in claim 11, wherein the posture of said nozzle is kept so that said fluid substance impinges upon said first surface at an approximately constant angle.
Claim 13
Dependent Claim
15 words
A method as recited in claim 12, wherein said angle is approximately a right angle.
Claim 14
Dependent Claim
22 words
A method as recited in claim 10, wherein said second surface is supported by a predetermined supporting means in said removing step.
Claim 15
Dependent Claim
20 words
A method as recited in claim 14, wherein said supporting means includes a roller rotatable around a predetermined rotating axis.
Claim 16
Dependent Claim
15 words
A method as recited in claim 10, wherein said blowing pressure is more than 10kgf/cm².
Claim 17
Dependent Claim
15 words
A method as recited in claim 16, wherein said blowing pressure is less than 150kgf/cm².
Claim 18
Dependent Claim
15 words
A method as recited in claim 17, wherein said blowing pressure is more than 15kgf/cm².
Claim 19
Dependent Claim
43 words
A method as recited in claim 10, wherein said nozzle moves relatively to said first surface so as to scan said first surface in a predetermined main scanning direction and in a subscanning direction intersecting said main scanning direction, in said spraying step.
Claim 20
Dependent Claim
20 words
A method as recited in claim 19, wherein the distance between said nozzle and said first surface is kept constant.
Claim 21
Dependent Claim
21 words
A method as recited in claim 20, wherein the speed of said nozzle relative to said first surface is kept constant.
Claim 22
Dependent Claim
19 words
A method as recited in claim 10, wherein said fluid substance is blown from a plurality of said nozzles.
Claim 23
Dependent Claim
39 words
A method as recited in claim 22, wherein one or a plurality of spray tubes having the nozzles are provided extending orthogonally to the widthwise direction of said first surface, said plurality of spray tubes being juxtaposed each other.
Claim 24
Dependent Claim
30 words
A method as recited in claim 23, wherein said plurality of nozzles move relatively to said first surface so as to scan said first surface in a predetermined scanning direction.
Claim 25
Dependent Claim
21 words
A method as recited in claim 24, wherein each of distances between said nozzles and said first surface are kept constant.
Claim 26
Dependent Claim
21 words
A method as recited in claim 25, wherein the speed of said nozzles relative to said first surface is kept constant.
Claim 27
Dependent Claim
22 words
A method as recited in claim 25, wherein the distances between said nozzles and said first surface are equal to each other.
Claim 28
Dependent Claim
29 words
A method as recited in claim 1, wherein said fluid substance is selected from the group consisting of liquid, powdery grain, and a combination of liquid and powdery grain.
Claim 29
Dependent Claim
24 words
A method as recited in claim 28, wherein said liquid is selected from the group consisting of water, acid, alkaline water, and organic solution.
Claim 30
Dependent Claim
26 words
A method as recited in claim 29, wherein said powdery grain is selected from the group consisting of ice grain, sand, titanium oxide, and quartz powder.
References Cited (Backward Citations)
No citation records indexed.
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