EP0473362A2
Expired / Lapsed
EP
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Improved distributed Bragg reflectors and devices incorporating same
Assignee: AT&T Inc
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Filing: 1991-08-22
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Granted: —
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Expires: 2011-08-22
Abstract
Abstract Distributed Bragg Reflectors (24,25) of high efficacy based on alternating layers (26,27) of large difference in refractive index are fabricated by epitaxial growth followed by etchant removal and back-filling to produce a structure in which alternation is between layers of retained epitaxially grown material and layers of back-filled material. Such reflectors may serve simply as mirrors or may be incorporated in a variety of devices including lasers, LEDs, detectors, optical switches in which the DBRs serve e.g. for cavitation.
Inventors
- 👤 Greg E. Blonder
- 👤 Edwin Arthur Chandross
- 👤 Seng-Tiong Ho
- 👤 Samuel L. Mccall
- 👤 Richart E. Slusher
- 👤 Kenneth W. West
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-24 15:56
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; H; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; H01S5/18341; H01S5/18344; H01S5/18361; H01S5/20; H01S5/2054; H01S5/2081; H10; H10H; H10H20/00; H10H20/01; H10H20/011; H10H20/013; H10H20/80; H10H20/81; H10H20/814; H10H20/8142; H10H20/862; Y; Y10; Y10S; Y10S148/00; Y10S148/05; Y10S148/095
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
103 words
Process for fabrication of a device comprising a Distributed Bragg Reflector comprising a plurality of layers of high and low refractive index material with regard to electromagnetic energy of a wavelength intended for use in device operation, in which one such refractive index material is grown epitaxially CHARACTERIZED in that the other such refractive index material is produced by back-filling of etch-removed epitaxially grown disposable material, thereby resulting in a Distributed Bragg Reflector including at least one retained layer of high or low refractive index in contact with at least one back-fiIled layer of refractive index which differs significantly from the said-retained layer.
Claim 2
Dependent Claim
25 words
Process of Claim 1 in which etch-removed epitaxially grown disposable material is of composition differing from that of the said at least one retained layer.
Claim 3
Dependent Claim
19 words
Process of Claim 2 in which etch removal is by use of etchant which selectively removes said disposable material.
Claim 4
Dependent Claim
21 words
Process of Claim 3 in which said reflector consists essentially of alternating layers of said high and low refractive index material.
Claim 5
Dependent Claim
47 words
Process of Claims 3 or 4 in which each layer of epitaxially grown disposable material consists essentially of a plurality of uniformly thin sub-layers of differing compositions, one such sub-layer composition being substantially more soluble in etchant as used for selective removal in accordance with Claim 3.
Claim 6
Dependent Claim
24 words
Process of Claim 1 in which back-filling is by precursor materials yielding back-filling consisting essentially of thermoset polymeric material upon curing subsequent to back-filling.
Claim 7
Dependent Claim
19 words
Process of Claim 1 in which etch-removal is followed by at least one step in which etchant is removed.
Claim 8
Dependent Claim
16 words
Process of Claim 7 in which etchant removal entails introduction of material which dissolves such etchant.
Claim 9
Dependent Claim
24 words
Process of Claim 8 in which the etchant is a water solution and in which etchant removal comprises further dilution of the said etchant.
Claim 10
Dependent Claim
24 words
Process of Claim 9 in which such further dilution is succeeded by introduction of an organic solvent material compatible with the said back-filling material.
Claim 11
Dependent Claim
13 words
Process of Claim 7 in which etchant removal is succeeded by supercritical drying.
Claim 12
Dependent Claim
32 words
Process of Claim 11 in which supercritical drying consists essentially of introduction of carbon dioxide at pressure and temperature above its criticalpoint and in which supercritical drying follows directly after etchant removal.
Claim 13
Dependent Claim
14 words
Process of Claim 1 in which Δn is numerically at least equal to 1.
Claim 14
Dependent Claim
22 words
Process of Claim 13 in which Δn is numerically at least equal to 1.8, in which retained refractive index material comprises AlGaAs.
Claim 15
Dependent Claim
13 words
Product as produced by the process of any of Claims 1 through 14.
References Cited (Backward Citations)
No citation records indexed.
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