High resolution reduction catadioptric relay lens

Claim 2

The system of claim 1, wherein said input and said output lens groups correct for aberrations to form a substantially distortion free image of a wide field at high numerical aperture.

Claim 3

The system of claim 2, wherein said high numerical aperture is less than about 0.7 and wherein said distortion free images are greater than about 0.25 microns in size.

Claim 4

The system of claim 1, 2 or 3, wherein each of said input and output lens groups contains a lens combination to correct for field curvature of said concave reflective surface and wherein each of said input and output lens groups contains a lens combination to correct for spherical aberrations of said concave reflective surface.

Claim 6

The system of claim 5, wherein said bandwidth is about 1 nanometer.

Claim 9

The system of claim 8, wherein said first and said second optical elements are prisms, and said plane surface thereof are faces of said prisms, the combination of said first and second optical elements forming a beam splitting structure (22).

Claim 11

A 5X reduction catadioptric relay lens having submicron resolution in the ultra violet bandwidth comprising: a first surface (101) of radius of curvature of about 416.2mm; a second surface (102) of radius of curvature of about -352.6mm; the spacing and index of refraction between said second and said first surfaces being about 15.6 and 1.5 respectively; a third surface (103) of radius of curvature of about 216.4 mm; the spacing and index of refraction between said third and said second surface being about 0.1 mm and 1 respectively; a fourth surface (104) of radius of curvature of about -9143 mm; the spacing and index of refraction between said fourth and said third surfaces being about 10 mm and 1.5 respectively; a fifth surface (105) of radius of curvature of about -165.1 mm; the spacing and index of refraction between said fifth and said fourth surfaces between about 100 mm and 1 respectively; a sixth surface (106) of radius of curvature of about -141.8 mm; the spacing and index of refraction between said sixth and said fifth surface being about 6mm and 1.5 respectively; a seventh surface (107) of radius of curvature of about -544.5 mm; the spacing and index of refraction between said seventh and said sixth surface being about 6.4mm and 1 respectively; an eighth surface (108) of radius of curvature of about 276.6 mm; the spacing and index of refraction between said eighth and said seventh surface being about 9mm and 1.5 respectively; a ninth surface (109) of radius of curvature of about -106.2 mm; the spacing and index of refraction between said ninth and said eight surface being about 159 mm and 1 respectively; a tenth surface (110) of radius of curvature of about -221 mm; the spacing and index of refraction between said tenth and said ninth surface being about 5 and 1.5 respectively; an eleventh surface (111) of radius of curvature of about 7177.5 mm; the spacing and index of refraction between said eleventh and said tenth surface being about 96 mm and 1 respectively; a twelfth surface (112) of radius of curvature of about -235.3 mm; the spacing and index of refraction between said twelfth surfaces being about 15 mm and 1,5 respectively; a thirteenth surface (113) of radius of curvature of about -253.3mm; the spacing and index of refraction between said thirteenth and said twelfth surface being about 3 and 1 respectively; a fourteenth surface (114) of radius of curvature of about -367.3 mm; the spacing and index of refraction between said fourteenth and said thirteenth surface being about 15 and 1.5 respectively; a fifteenth (115) a seventeenth (117) and nineteenth (119) substantially planar surface bounding a regions having index of refraction of about 1.5; the spacing and index of refraction between said fifteenth and said fourteenth surface being about 18 and 1 respectively; a sixteenth (116) beam splitting surface within said region; an eighteenth reflecting surface (118) of radius of curvature of about 322 mm; the spacing and index of refraction between said eighteenth and seventeenth surface being about 24 mm and 1 respectively; a twentieth surface (120) of radius of curvature of about -267.8 mm; a twenty-first surface (121) of radius of curvature -313.7mm; the spacing and index of refraction between said twenty-first and said twentieth surface being about 15 and 1.5 respectively; a twenty second surface (122) of radius of curvature of about 80 mm; the spacing and index of refraction between said twenty second and said twenty first surfaces being about 1 and 1 respectively; a twenty third surface (123) having radius of about 328.7 mm; the spacing and index of refraction between said twenty third surface and said twenty second surface being about 16.5 and 1.5 respectively; a twenty fourth surface (124) of radius of curvature of about 110.7 mm; the spacing and index of refraction between said twenty fourth and said twenty third surfaces being about 5,9 mm and 1 respectively; a twenty fifth surface (125) of radius of curvature of about 56.9 mm; the spacing and index of refraction between said twenty fifth surface and said twenty fourth surface being about 18 mm and 1.5 respectively; a twenty sixth surface (126) of radius of curvature of about 65.4 mm; the spacing and index of refraction between said twenty-sixth and twenty fifth surface being about 4.8 and 1 respectively; a twenty seventh surface (127) of radius of curvature of about -425.5; the spacing and index of refraction between said twenty seventh and said twenty sixth surface being about 18 and 1.5 respectively; a twenty eighth surface (128) of radius of curvature of about 212.4 mm; the spacing and index of refraction between said twenty eighth and said twenty seventh surface being about 1.5 and 1 respectively; a twenty ninth surface (129) of radius of curvature of about -757 mm; and the spacing and index of refraction between said twenty-ninth and said twenty eighth surface being about 3 and 1.5 respectively.

Claim 12

A 5X reduction catadioptric relay lens having submicron resolution in the ultraviolet bandwidth comprising: a first surface (201) of radius of curvature of about 1792.5 mm; a second surface (202) of radius of curvature of about -866.1 mm; a spacing and index of refraction between said second and said first surface being about 19 mm and 1.5 respectively; a third surface (203) of radius of curvature of about 322.8 mm; a spacing and index of refraction between said third and said second surface being about 0.005 and 1 respectively; a fourth surface (204) of radius of curvature of about 612.9 mm; a spacing and index of refraction between said fourth and said third surface being about 25 and 1.5 respectively; a fifth surface (205) of radius of curvature of about -365.5 mm; a spacing and index refraction between said fifth and said fourth surface being about 95 mm and 1 respectively; a sixth surface (206) of radius of curvature of about 272 mm; a spacing and index of refraction between said sixth and said fifth surface being about 21 mm and 1.5 respectively; a seventh surface (207) of radius of curvature of about 180.2 mm; a spacing and index of refraction between said seventh and sixth surface being about 26.1 mm and 1 respectively; an eight surface (208) of radius of curvature of about 162.6 mm; a spacing and index of refraction between said eight and said seventh surface being about 21 mm and 1.5 respectively; a ninth surface (209) of radius of curvature of about 222.3 mm; a spacing and index of refraction between said ninth and said eighth surface being about 26.8 mm and 1 respectively; a tenth surface (210) of radius of curvature of about -382.4 mm; a spacing and index of refraction between said tenth and said ninth surfaces being about 35 mm and 1.5 respectively; an eleventh surface (211) of radius of curvature of about 628.9 mm; a spacing and index of refraction between said eleventh and tenth surface being about 0.003 and 1 respectively; a twelfth surface (212) of radius of curvature of about 176.5 mm; a spacing and index of refraction between said twelfth and said eleventh surfaces being about 19 mm and 1.5 respectively; a thirteenth surface (213) of radius of curvature of about 1180.5 mm; a spacing and index of refraction between said thirteenth and said twelfth surface being about 97.4 and 1 respectively; a fourteenth surface (214) of radius of curvature of about -1466 mm; a spacing and index of refraction between said fourteenth and said thirteenth surface being about 19 mm and 1.5 respectively; a fifteenth surface (215) of radius of curvature of about 165.2 mm; a spacing and index of refraction between said fifteenth and said fourteenth surface being about 0.5 mm and 1 respectively; a sixteenth surface (216) of radius of curvature of about 144.2 mm; a spacing and index of refraction between said sixteenth and said fifteenth surfaces being about 19.9 mm and 1.5 respectively; a seventeenth (217), a nineteenth (219) and a twenty third (223) substantially planar surface bounding a region having an index of refraction of about 1.5; a spacing and index of refraction between said seventeenth and said sixteenth surface being about 87.6 mm and 1 respectively; an eighteenth beam-splitting surface (218) within said region; a twentieth substantially planar surface (220); a spacing between said nineteenth and twentieth surface being zero; a twenty first surface (221) of radius of curvature of about 727.5; a spacing and index of refraction between said twenty first and said twentieth surface being about 20.0 and 1.5 respectively; a twenty-second reflecting surface (222) of radius curvature of about 354.6 mm; a spacing and index of refraction of between said twenty second and said twenty first surface of about 7.5 mm and 1 respectively; a twenty fourth surface (224) of radius of curvature of about 60.1 mm; a spacing and index of refraction between said twenty fourth and said twenty third surface being about 1mm and 1 respectively; a twenty-fifth surface (225) of radius of curvature of about 112.5 mm; a spacing and index of refraction between said twenty fifth and said twenty fourth surface being about 9.6 mm and 1.5 respectively; a twenty-sixth surface (226) of radius of curvature of about 59.8 mm; a spacing and index of refraction between said twenty sixth and said twenty fifth surface being about 0.1 mm and 1 respectively; a twenty seventh surface (227) of radius of curvature of about 47.7 mm; a spacing and index of refraction between said twenty seventh and said twenty sixth surface being about 4.1 mm and 1.5 respectively; a twenty eighth surface (228) of radius of curvature of about 102.5 mm; a spacing and index of refraction between said twenty eighth and said twenty seventh surface being about 5.6 mm and 1 respectively; a twenty ninth surface (229) of radius of curvature of about -602.4 mm; a spacing and index of refraction between said twenty ninth and said twenty eighth surface being about 7.5 mm and 1.5 respectively; a thirtieth surface (230) of radius of curvature of about -388.7 mm; a spacing and index of refraction between said thirtieth and said twenty ninth surface being about 1 mm and 1 respectively; a thirty first surface (231) of radius of curvature of about -578.1 mm; and a spacing and index of refraction between said thirty first and thirtieth surface being 19.6 and 1.5 respectively.

Claim 13

A 4X reduction catadioptric relay lens having submicron resolution in the ultraviolet bandwidth comprising: a first surface (301) of radius of curvature of about 370.3 mm; a second surface (302) of radius of curvature of about -196.6 mm; a spacing and index of refraction between said second and said first surface being about 30 mm and 1.5 respectively; a third surface (303) of radius of curvature of about -196.0 mm; a spacing and index of refraction between said third and said second surface being about 2 and 1 respectively; a forth surface (304) of radius of curvature of about 218.9 mm; a fifth surface (305) of radius of curvature of about -111.9 mm; a spacing and index refraction between said fifth and said fourth surface being about 104 mm and 1 respectively; a sixth surface (306) of radius of curvature of about -101 mm; a spacing and index of refraction between said sixth and said fifth surface being about 21 mm and 1.5 respectively; a seventh surface (307) of radius of curvature of about -97.6 mm; a spacing and index of refraction between said seventh and sixth surface being about 7.5 mm and 1 respectively; an eight surface (308) of radius of curvature of about 189.2 mm; a spacing and index of refraction between said eight and said seventh surface being about 21 mm and 1.5 respectively; a ninth surface (309) of radius of curvature of about 650 mm; a spacing and index of refraction between said ninth and said eighth surface being about 2 mm and 1 respectively; a tenth surface (310) of radius of curvature of about 160 mm; a spacing and index of refraction between said tenth and said ninth surfaces being about 34 mm and 1.5 respectively; an eleventh surface (311) of radius of curvature of about 3078 mm; a spacing and index of refraction between said eleventh and tenth surface being about 104 and 1 respectively; a twelfth surface (312) of radius of curvature of about -455 mm; a spacing and index of refraction between said twelfth and said eleventh surfaces being about 28 mm and 1.5 respectively; a thirteenth surface (313) of radius of curvature of about -238.4 mm; a spacing and index of refraction between said thirteenth and said twelfth surface being about 12 and 1 respectively; a fourteenth surface (314) of radius of curvature of about -407.1 mm; a spacing and index of refraction between said fourteenth and said thirteenth surface being about 19 mm and 1.5 respectively; a fifteenth surface (315) of radius of curvature of about 204.3 mm; a spacing and index of refraction between said fifteenth and said fourteenth surface being about 2 mm and 1 respectively; a sixteenth surface (316) of radius of curvature of about 170.3 mm; a spacing and index of refraction between said sixteenth and said fifteenth surfaces being about 18 mm and 1.5 respectively; a seventeenth (317), a nineteenth (319) and a twenty third (323) substantially planar surface bounding a region having an index of refraction of about 1.5; a spacing and index of refraction between said seventeenth and said sixteenth surface being about 53 mm and 1 respectively; an eighteenth beam-splitting surface (318) within said region; a twentieth substantially planar surface (320); a spacing between said nineteenth and twentieth surface being zero; a twenty first surface (321) of radius of curvature of about 825.1; a spacing and index of refraction between said twenty first and said twentieth surface being about 20 and 1.5 respectively; a twenty-second reflecting surface ((322) of radius curvature of about 383.2 mm; a spacing and index of refraction of between said twenty second and said twenty first surface of about 7.5 mm and 1 respectively; a twenty fourth surface (324) of radius of curvature of about 56.5 mm; a spacing and index of refraction between said twenty fourth and said twenty third surface being about 1mm and 1 respectively; a twenty-fifth surface (325) of radius of curvature of about 387.2 mm; a spacing and index of refraction between said twenty fifth and said twenty fourth surface being about 12 mm and 1.5 respectively; a twenty-sixth surface (326) of radius of curvature of about -229.1 mm; a spacing and index of refraction between said twenty sixth and said twenty fifth surface being about 0.25 mm and 1 respectively; a twenty seventh surface (327) of radius of curvature of about 44.8 mm; a spacing and index of refraction between said twenty seventh and said twenty sixth surface being about 5 mm and 1.5 respectively; a twenty eighth surface (328) of radius of curvature of about 46.1 mm; a spacing and index of refraction between said twenty eighth and said twenty seventh surface being about 6.2 mm and 1 respectively; a twenty ninth surface (329) of radius of curvature of about 52.2 mm; a spacing and index of refraction between said twenty ninth and said twenty eighth surface being about 7.5 mm and 1.5 respectively; a thirtieth surface of (330) radius of curvature of about 64.2 mm; a spacing and index of refraction between said thirtieth and said twenty ninth surface being about 2 mm and 1 respectively; a thirty first surface (331) of radius of curvature of about 527 mm; and a spacing and index of refraction between said thirty first and thirtieth surface being 19.6 and 1.5 respectively.

Claim 14

A 4X reduction catadioptric relay lens having submicron resolution in the ultra violet bandwidth comprising: a first surface (401) of radius of curvature of about 90.5mm; a second surface (402) of radius of curvature of about 142.9mm; the spacing and index of refraction between said second and said first surfaces being about 15 and 1.5 respectively; a third surface (403) of radius of curvature of about 182.2 mm; the spacing and index of refraction between said third and said second surface being about 1.5 mm and 1 respectively; a fourth surface (404) of radius of curvature of about -299.1 mm; the spacing and index of refraction between said fourth and said third surfaces being about 26 mm and 1.5 respectively; a fifth surface (405) of radius of curvature of about -86.4 mm; the spacing and index of refraction between said fifth and said fourth surfaces between about 9.7 mm and 1 respectively; a sixth surface (406) of radius of curvature of about -85.5 mm; the spacing and index of refraction between said sixth and said fifth surface being about 20.8mm and 1.5 respectively; a seventh surface (407) of radius of curvature of about -241.1 mm; the spacing and index of refraction between said seventh and said sixth surface being about 21.5 mm and 1 respectively' an eighth surface (408) of radius of curvature of about -279.9 mm; the spacing and index of refraction between said eighth and said seventh surface being about 9.5mm and 1.5 respectively; a ninth surface (409) of radius of curvature of about -65.8 mm; the spacing and index of refraction between said ninth and said eight surface being about 11.3 mm and 1 respectively; a tenth surface (410) of radius of curvature of about -122.0 mm; the spacing and index of refraction between said tenth and said ninth surface being about 9.5 and 1.5 respectively; an eleventh surface (411) of radius of curvature of about -467.3 mm; the spacing and index of refraction between said eleventh and said tenth surface being about 15 mm and 1 respectively; a twelfth surface (412) of radius of curvature of about -421.7 mm; the spacing and index of refraction between said twelfth surfaces being about 15 mm and 1.5 respectively; a thirteenth surface (413) of radius of curvature of about 92.35mm; the spacing and index of refraction between said thirteenth and said twelfth surface being about 3 and 1 respectively; a fourteenth surface (414) of radius of curvature of about 64 mm; the spacing and index of refraction between said fourteenth and said thirteenth surface being about 15 and 1.5 respectively; a fifteenth (415), a seventeenth (417) and twentieth (420) substantially planar surface bounding a region having index of refraction of about 1.5; the spacing and index of refraction between said fifteenth and said fourteenth surface being about 15 and 1 respectively; a sixteenth beam splitting surface (416) within said region; an eighteenth reflecting surface (418) of radius of curvature of about 199.4 mm; the spacing and index of refraction between said eighteenth and seventeenth surface being about 5 mm and 1 respectively; a nineteenth reflecting surface (419) of radius of curvature of about -161.8844 mm; the spacing and index of refraction between said nineteenth and said eighteenth surface being about 10 and 1.5 respectively; a twenty-first surface (421) of radius of curvature 57.6041mm; the spacing and index of refraction between said twenty-first and said twentieth surface being about 0.9 and 1 respectively; a twenty second surface (422) of radius of curvature of about 920 mm; the spacing and index of refraction between said twenty second and said twenty first surfaces being about 9.5 and 1.5 respectively; a twenty third surface (423) having radius of about 98.133 mm; the spacing and index of refraction between said twenty third surface and said twenty second surface being about 0.4 and 1 respectively; a twenty fourth surface (424) of radius of curvature of about 316.5883 mm; the spacing and index of refraction between said twenty fourth and said twenty third surfaces being about 11.3 mm and 1.5 respectively; a twenty fifth surface (425) of radius of curvature of about 92.5216 mm; the spacing and index of refraction between said twenty fifth surface and said twenty fourth surface being about 2 mm and 1 respectively; a twenty sixth surface (426) of radius of curvature of about -502.4 mm; the spacing and index of refraction between said twenty-sixth and twenty fifth surface being about 5.9 and 1.5 respectively; a twenty seventh surface (427) of radius of curvature of about -275; the spacing and index of refraction between said twenty seventh and said twenty sixth surface being about 0.5 and 1 respectively; a twenty eighth surface (428) of radius of curvature of about 768.7 mm; and the spacing and index of refraction between said twenty eighth and said twenty seventh surface being about 22 and 1.5 respectively.

Claim 15

A 4X reduction catadioptric relay lens having submicron resolution in the ultra violet bandwidth comprising: a first surface (501) of radius of curvature of about 123.4mm; a second surface (502) of radius of curvature of about 408mm; the spacing and index of refraction between said second and said first surfaces being about 15 and 1.5 respectively; a third surface (503) of radius of curvature of about 247.9 mm; the spacing and index of refraction between said third and said second surface being about 0.5 mm and 1 respectively; a fourth surface (504) of radius of curvature of about -301.6 mm; the spacing and index of refraction between said fourth and said third surfaces being about 26 mm and 1.5 respectively; a fifth surface (505) of radius of curvature of about -77.2 mm; the spacing and index of refraction between said fifth and said fourth surfaces between about 10 mm and 1 respectively; a sixth surface (506) of radius of curvature of about -73 mm; the spacing and index of refraction between said sixth and said fifth surface being about 21mm and 1.5 respectively; a seventh surface (507) of radius of curvature of about 114.7 mm; the spacing and index of refraction between said seventh and said sixth surface being about 6.8mm and 1 respectively; an eighth surface (508) of radius of curvature of about 89.4 mm; the spacing and index of refraction between said eighth and said seventh surface being about 9.5mm and 1.5 respectively; a ninth surface (509) of radius of curvature of about -60.3 mm; the spacing and index of refraction between said ninth and said eight surface being about 11.5 mm and 1 respectively; a tenth surface (510) of radius of curvature of about -86.8 mm; the spacing and index of refraction between said tenth and said ninth surface being about 9.5 and 1.5 respectively; an eleventh surface (511) of radius of curvature of about 234.3 mm; the spacing and index of refraction between said eleventh and said tenth surface being about 41.3 mm and 1 respectively; a twelfth surface (512) of radius of curvature of about 194.6 mm; the spacing and index of refraction between said twelfth surfaces being about 15 mm and 1,5 respectively; a thirteenth surface (513) of radius of curvature of about 79.5mm; the spacing and index of refraction between said thirteenth and said twelfth surface being about 3 and 1 respectively; a fourteenth surface (514) of radius of curvature of about 61.3 mm; the spacing and index of refraction between said fourteenth and said thirteenth surface being about 15 and 1.5 respectively; a fifteenth (515), a seventeenth (517) and twentieth (520) substantially planar surface bounding a region having index of refraction of about 1.5; the spacing and index of refraction between said fifteenth and said fourteenth surface being about 15 and 1 respectively; a sixteenth beam splitting surface (516) within said region; an eighteenth surface (518) of radius of curvature of about -179.4 mm; the spacing and index of refraction between said eighteenth and seventeenth surface being about 5 mm and 1 respectively; a nineteenth reflecting surface (519) of radius of curvature of about -158.6 mm; the spacing and index of refraction between said nineteenth and said eighteenth surface being about 10 and 1.5 respectively; a twenty-first surface (521) of radius of curvature 52.4mm; the spacing and index of refraction between said twenty-first and said twentieth surface being about 0.9 and 1 respectively; a twenty second surface (522) of radius of curvature of about 921.1 mm; the spacing and index of refraction between said twenty second and said twenty first surfaces being about 9.5 and 1.5 respectively; a twenty third surface (523) having radius of about 85.2 mm; the spacing and index of refraction between said twenty third surface and said twenty second surface being about 0.4 and 1 respectively; a twenty fourth surface (524) of radius of curvature of about 357.9 mm; the spacing and index of refraction between said twenty fourth and said twenty third surfaces being about 8.4 mm and 1.5 respectively; a twenty fifth surface (525) of radius of curvature of about 87.1 mm; the spacing and index of refraction between said twenty fifth surface and said twenty fourth surface being about 2.0 mm and 1 respectively; a twenty sixth surface (526) of radius of curvature of about -3505 mm; the spacing and index of refraction between said twenty-sixth and twenty fifth surface being about 2.9 and 1.5 respectively; a twenty seventh surface (527) of radius of curvature of about -483.0; the spacing and index of refraction between said twenty seventh and said twenty sixth surface being about 0.5 and 1 respectively; a twenty eighth surface (528) of radius of curvature of about 429.7 mm; the spacing and index of refraction between said twenty eighth and said twenty seventh surface being about 24.2 and 15 respectively; and

Claim 16

The relay lens of any one of the claims 11 - 15, wherein said beam-splitting surface (116, 218, 318, 416, 516) has a plurality of thin film coatings thereon to provide a beam reflected from and transmitted through said beam-splitting surface which is substantially free of aberration, distortion and apodization due to the reflection there from and transmission there through.