EP0465326A2
Expired / Lapsed
EP
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Superconducting thin film of compound oxide and a process for preparing the same
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1991-06-28
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Granted: —
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Expires: 2011-06-28
Abstract
Abstract A superconducting thin film of compound oxide material deposited on a substrate, comprising a plurality of a-axis or b-axis oriented unit layers (2) and a plurality of c-axis oriented unit layers (1), each unit layer (1, 2) being made of the compound oxide material and being laminated alternately one over another on the substrate (3).
Inventors
- 👤 Takashi C/O Itami Works Matsuura
- 👤 Keizo C/O Itami Works Harada
- 👤 Hidenori C/O Itami Works Nakanishi
- 👤 Hideo C/O Itami Works Itozaki
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 03:50
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0408; H10N60/80; H10N60/85; H10N60/855; H10N60/857; H10N60/858; Y; Y10; Y10S; Y10S428/00; Y10S428/922; Y10S428/9265; Y10S428/93; Y10S505/00; Y10S505/70; Y10S505/701
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
55 words
A superconducting thin film of compound oxide material deposited on a substrate, comprising a plurality of a-axis or b-axis oriented unit layers (2) and a plurality of c-axis oriented unit layers (1) each unit layer (1, 2) being made of the compound oxide material and being laminated alternately one over another on said substrate (3).
Claim 2
Dependent Claim
26 words
The superconducting thin film set forth in Claim 1 wherein each of said unit layers ( 1, 2) has a thickness between 50 and 200 Å.
Claim 3
Dependent Claim
34 words
The superconducting thin film set forth in Claim 1 or 2 wherein said substrate is made of an oxide having a similar crystal structure or lattice constant to that of said compound oxide material.
Claim 4
Dependent Claim
31 words
The superconducting thin film set forth in Claim 3 wherein said substrate is made of an oxide selected from the group comprising MgO, SrTiO₃, LaAlO₃, LaGaO₃ and yttrium stabilized zirconia (YSZ).
Claim 5
Dependent Claim
27 words
The superconducting thin film set forth in any one of Claim 1 to 4 wherein said superconducting oxide material is Y-Ba-Cu-O system, Bi-Sr-Ca-Cu-O system or Tl-Ba-Ca-Cu-O system.
Claim 6
Dependent Claim
72 words
A process for preparing a superconducting thin film of compound oxide material on a substrate by physical vapour deposition, characterized by depositing alternately an a-axis or b-axis oriented unit layer (2) of said compound oxide material and a c-axis oriented unit layers(1) of said compound oxide material on a substrate (3) on said substrate so that said superconducting thin film is composed of a plurality of said unit layers laminated (1, 2).
Claim 7
Dependent Claim
23 words
The process set forth in Claim 6 wherein each of said unit layers (1, 2) has a thickness between 50 and 200 Å.
Claim 8
Dependent Claim
52 words
The process set forth in Claim 6 or 7 wherein the substrate is heated at a temperature between about 640 and about 700 °C when the c-axis unit layers are deposited and is heated at a temperature between about 600 and about 680 °C when the a-axis oriented unit layer is deposited.
Claim 9
Dependent Claim
35 words
The process set forth in any one of Claim 6 to 8 wherein said substrate is made of an oxide having a similar crystal structure or lattice constant to that of said compound oxide material.
Claim 10
Dependent Claim
29 words
The process set forth in Claim 9 wherein said substrate is made of an oxide selected from the group comprising MgO, SrTiO₃, LaAlO₃, LaGaO₃ and yttrium stabilized zirconia (YSZ).
Claim 11
Dependent Claim
25 words
The process set forth in any one of Claim 6 to 10 wherein said superconducting oxide material is Y-Ba-Cu-O system,, Bi-Sr-Ca-Cu-O system or TI-Ba-Ca-Cu-O system.
Claim 12
Dependent Claim
20 words
The process set forth in any one of Claim 6 to 11 wherein said physical vapour deposition is RF sputtering.
References Cited (Backward Citations)
No citation records indexed.
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