← Back to Patent Explorer
EP0465196A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Compact high density interconnect structure

Assignee: General Electric Co
•
Filing: 1991-07-01
•
Granted: —
•
Expires: 2011-07-01
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract An improved high density interconnect structure (10) may include electronic components mounted on both sides of its substrate (12) or a substrate which is only as thick as the semiconductor chips (26) which reduces the overall structure thickness to the thickness of the semiconductor chips plus the combined thickness of the high density interconnect structure's (40) dielectric (42) and conductive (44) layers. In the two-sided structures, feedthroughs (18), which are preferably hermetic, provide connections between opposite sides of the substrate. Substrates of either of these types may be stacked to form a three-dimensional structure. Means for connecting between adjacent substrates are preferably incorporated within the boundaries of the stack rather than on the outside surface thereof.

Inventors

  • 👤 Walter Marion Marcinkiewicz
  • 👤 Charles William Eichelberger
  • 👤 Robert John Wojnarowski

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-05 03:15
CPC Classifications
H; H10; H10W; H10W90/00; H10W70/00; H10W70/60; H10W70/611; H10W70/614; H10W70/62; H10W70/63; H10W70/635; H10W90/401; H10W70/099; H10W70/67; H10W70/68; H10W70/682; H10W72/00; H10W72/20; H10W72/241; H10W72/851; H10W72/874; H10W72/90; H10W72/941; H10W72/9413; H10W90/10; H10W90/701; H10W90/731; H10W90/734

Claims Analysis

Total Claims: 26
Claim 1
Independent Claim 204 words
In an electronic system of the type including a substrate having first and second major substrate surfaces, a plurality of electronic components each having contact pads on a contact surface thereof, said electronic components disposed with their contact surfaces in substantially the plane of said first major substrate surface, a high density interconnect structure including a layer of dielectric material bonded to said contact surfaces of said components and said first major substrate surface and a pattern of conductors disposed on or in said dielectric material, said pattern of conductors including conductors electrically connected to said contact pads of said electronic components, the improvement comprising: a plurality of second electronic components each having second contact pads disposed on a contact surface thereof, said second electronic components being disposed with said contact surfaces in substantially the plane of said second major substrate surface; and a second high density interconnect structure including a second layer of dielectric material bonded to said second electronic components and said second major surface of said substrate and a second pattern of conductors disposed on or in said dielectric material, said second pattern of conductors including conductors electrically connected to said second contact pads for electrically interconnecting said second electronic components.
Claim 2
Dependent Claim 46 words
The improvement recited in claim 1 further comprising: a plurality of feedthrough conductors extending through said substrate, each of said feedthrough conductors having first and second ends; said pattern of conductors including conductors electrically connected to said first ends of selected ones of said feedthrough conductors.
Claim 3
Dependent Claim 24 words
The improvement recited in claim 2 wherein: said second pattern of conductors includes conductors ohmically connected to second selected ones of said feedthrough conductors.
Claim 4
Dependent Claim 45 words
The improvement recited in claim 2 wherein: said first major surface includes a cavity in which one of said electronic components is disposed; and one of said feedthrough conductors is disposed under said cavity in electrical contact with the back surface of that electronic component.
Claim 5
Dependent Claim 29 words
The improvement recited in claim 1 wherein: said system contains more surface area of chips on that one substrate than the surface area of one side of said substrate
Claim 6
Dependent Claim 16 words
The improvement recited in claim 2 wherein: said feedthrough conductors comprise metal-filled holes in said substrate.
Claim 7
Dependent Claim 29 words
The improvement recited in claim 6 wherein: said substrate is ceramic; and said holes contain a conductive metal composition which would not survive the firing temperature of said ceramic.
Claim 8
Dependent Claim 146 words
In an electronic system of the type including a substrate having first and second major surfaces, a plurality of electronic components disposed on said first major surface thereof, a high density interconnect structure including a layer of dielectric material bonded to said components and said first major surface of said substrate and a pattern of conductors disposed on or in said dielectric material, said pattern of conductors including conductors electrically connected to said contact pads of said electronic components, the improvement comprising: a plurality of feedthrough conductors extending through said substrate, each of said feedthrough conductors having first and second ends, one of said feedthrough conductors being disposed under one of said electronic components and in electrical contact with the back surface of that electronic component; and said pattern of conductors including conductors electrically connected to said first ends of selected ones of said feedthrough conductors.
Claim 9
Dependent Claim 203 words
An electronic system comprising: a plurality of segments, each of said segments comprising: a substrate having a perimeter and first and second sides having first and second major surfaces, respectively, and a plurality of feedthrough conductors extending through said substrate, each of said feedthrough conductors having first and second ends associated respectively with said first and second sides of said substrate, an electronic component having contact pads on a contact surface thereof, said electronic component being disposed with its contact surface in substantially the plane of said first major substrate surface, and a high density interconnect structure bonded to said electronic component and said first major surface of said substrate, said high density interconnect structure including dielectric material and a pattern of conductors disposed on or in said dielectric material, said pattern of conductors including conductors electrically connected to said contact pads of said electronic component and conductors electrically connected to said feedthrough conductors; and said segments being arranged in a stack, said stack including means for electrically connecting conductors of different, adjacent ones of said serpents to each other at adjacent surfaces of said adjacent segments, said means for electrically connecting being disposed within the perimeters of both of said adjacent substrates.
Claim 10
Dependent Claim 49 words
The system recited in claim 9 wherein: said first ends of said feedthrough conductors are disposed substantially flush with said first major surface of said substrate and said pattern of conductors connects to said feedthrough conductors in substantially the same manner in which it connects to said contact pads.
Claim 11
Dependent Claim 29 words
The system recited in claim 9 wherein: at adjacent surfaces of adjacent segments, the ends of said feedthrough conductors are disposed substantially flush with their associated major substrate surfaces.
Claim 12
Dependent Claim 69 words
The system recited in claim 9 wherein: said stack comprises a base segment having a given substrate size and a stack segment having a smaller substrate; said base segment has a seal ring on said first major surface thereof; and said system further comprises a sidewall sealed to said seal ring for enclosing said stack substrate in an enclosure comprising said substrate of said base segment and said sidewall.
Claim 13
Dependent Claim 52 words
The system recited in claim 12 wherein: said base segment includes a second seal ring disposed on the second major surface of said base substrate; a second sidewall sealed to said second seal ring for enclosing a second stack substrate in an enclosure comprised of said base substrate and said second sidewall.
Claim 14
Dependent Claim 24 words
The system recited in claim 9 wherein: a first one of said substrates has a second electronic component disposed on its second major surface.
Claim 15
Dependent Claim 30 words
The system recited in claim 14 wherein: said first substrate has a second high density interconnect structure bonded to said second major surface thereof and to said second electronic component.
Claim 16
Dependent Claim 15 words
The system recited in claim 9 wherein: said means for directly connecting comprises fuss buttons.
Claim 17
Dependent Claim 14 words
The system recited in claim 9 wherein: said means for directly connecting comprises solder.
Claim 18
Dependent Claim 19 words
The system recited in claim 9 wherein: said means for directly connecting comprises a polymer loaded with conductive material.
Claim 19
Dependent Claim 35 words
The system recited in claim 9 wherein: a portion of said system is enclosed in a hermetic enclosure; and said substrate of a first one of said segments comprises a portion of said hermetic enclosure.
Claim 20
Dependent Claim 47 words
The system recited in claim 19 wherein: the substrate of said first segment is larger than some others of said substrates; said substrate of said first segment is sealed to the remainder of an enclosure in which those other substrates are disposed to complete said hermetic enclosure.
Claim 21
Dependent Claim 24 words
The system recited in claim 19 wherein: said enclosure comprises bottom, top and side walls; and said bottom comprises a substrate of said stack.
Claim 22
Dependent Claim 23 words
The system recited in claim 21 wherein: said side wall comprises a member bonded to the edges of said substrates in said stack.
Claim 23
Dependent Claim 134 words
An electronic system comprising: a substrate having a perimeter and first and second major surfaces and an aperture therein; a plurality of electronic components each having a contact surface and a back surface and contact pads on said contact surface, each of said electronic components being disposed in an aperture in said substrate with its contact surface in substantially the plane of said first major substrate surface; and a high density interconnect structure bonded to said contact surfaces of said electronic components and said first major surface of said substrate, said high density interconnect structure including dielectric material and a pattern of conductors disposed on or in said dielectric material, said pattern of conductors including conductors electrically connected to said contact pads of said electronic components for interconnecting said electronic components into said system.
Claim 24
Dependent Claim 26 words
The system recited in claim 23 wherein: some of said electronic components have their back surfaces disposed in substantially the plane of said second substrate surface.
Claim 25
Dependent Claim 36 words
The system recited in claim 23 wherein: said substrate includes a plurality of feedthrough conductors extending between said first and second major surfaces; and said pattern of conductors including conductors electrically connected to said feedthrough conductors.
Claim 26
Dependent Claim 212 words
An electronic system comprising: a plurality of serpents, each of said segments comprising: a substrate having a perimeter and first and second major surfaces and an aperture therein, and a plurality of feedthrough conductors extending through said substrate, each of said feedthrough conductors having first and second ends, a plurality of electronic components each having a contact surface and a back surface and contact pads on said contact surface, each of said electronic components being disposed in an aperture in said substrate with its contact surface in substantially the plane of said first major substrate surface, and a high density interconnect structure bonded to said contact surfaces of said electronic components and said first major surface of said substrate, said high density interconnect structure including dielectric material and a pattern of conductors disposed on or in said dielectric material, said pattern of conductors including conductors electrically connected to said contact pads of said electronic components for interconnecting said electronic components into said system; and said segments being arranged in a stack, said stack including means for electrically connecting conductors of different, adjacent ones of said segments to each other at adjacent surfaces of said adjacent segments, said means for electrically connecting being disposed within the perimeters of both of said adjacent substrates.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Maintenance schedule is calculated for granted US utility patents.

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag