EP0456029A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Vibrating type pressure measuring device
Assignee: Yokogawa Electric Corp
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Filing: 1991-04-23
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Granted: —
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Expires: 2011-04-23
Abstract
Abstract A vibrating type pressure measuring device having good shock wave proof measuring pressure characteristics, and showing high frequency answer, and having good temperature characteristics and is easy to be miniaturised, in which measurement pressure is received with a measuring diaphragm (127) consisting of silicon provided in an internal Vacant space of a housing, and magnetic field is applied by a DC curent magnetic field applying means (141-144) to a vibrator beam (124) arranged in the inside of the measuring diaphragm (127) with a gap kept in vacuum, and fixed to the measuring diaphragm (127) at both ends, and detects the frequency of the natural vibration changed and generated on this vibrator beam (124) in correspondence to the measuring pressure, and together with that the measuring diaphragm (127) is made be prevented to become capable to resonance as a result of that the vibrator beam (124) carries out vibration. Further, in addition, the device is made in such a manner that the vibrator beam (124) can be prevented from adhering to the wall surface of the measuring diaphragm in the circumference of the vibrator beam as a result of the vibration.
Inventors
- 👤 Kyoichi Ikeda
- 👤 Tetsuya Watanabe
- 👤 Takahiro Kudo
- 👤 Akio Fujita
- 👤 Hideo Tsukamoto
- 👤 Nobuaki Kohno
- 👤 Hideki Kuwayama
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 12:23
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/097; G01L; G01L9/00; G01L9/0001; G01L9/0008; G01L9/0019; G01P15/0802
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
271 words
In a vibrating type pressure measuring device for measuring pressure by utilizing that the naural frequency of the vibrator beam changes in correspondence to the change of axial force of the vibrator beam, the improvement characterised by having a sensor part comprising, a housing having internal vacant space, a supporting body provided in said internal vacant space, a substrate consisting of silicon supported at one surface by said supporting body, a chip part consisting of silicon for constituting the measuring chamber of one side with the above-described substrate for forming a diaphragm by a concave part, and with said concave part, a vibrator beam consisting of silicon provided in the above-described diaphragm for keeping a gap kept in vacuum, having an H shape with the tip part fixed to said diaphragm, a DC magnetic field applying means for constituting another measuring chamber with the above-described sensor part, and for applying DC magnetic field to the above-described vibrator beam, comprising, a ring-like spacer fixed at one surface to the above-described housing and provided in the circumference of the above-described supporting body, the substrate, and the chip part, a permanent magnet arranged in opposition to the above-described vibrator beam, a yoke for holding said permanent magnet ( together with that for applying magnetic field for perpendicularly intersecting the axial direction of the above-described vibrator beam), and provided for approaching at one surface to the above-described diaphragm to constitute a narrow required gap with the above-described diaphragm, and a yoke holder for preserving said yoke and fixed to the above-described spacer; and a charging liquid for being charged in the above-described another measuring chamber.
Claim 2
Dependent Claim
35 words
A vibrating type pressure measuring device characterised by being equipped with a rough surface or uneven surface provided on the wall surface of the above-described diaphragm or on the surface of the above-described vibrator beam.
Claim 3
Dependent Claim
127 words
A vibrating type pressure measuring device as claimed in Claim 1, characterised by being equipped with the first layer consisting of oxide film or nitride film provided by covering the surface of the above-described vibrator beam, the second layer consisting of polysilicon having rough surface provided by covering the surface of said first layer, the third layer consisting of oxide film or nitride film provided by covering the internal surface of the above-described chamber, the fourth layer consisting of polysilicon provided by covering the surface of said third layer, the fifth layer consisting of silicon oxide film or silicon nitride film provided by covering the external surface of the above-described shell, and the sixth layer consisting of polysilicon provided by covering the surface of said fifth layer.
Claim 4
Dependent Claim
108 words
A vibrating type pressure measuring device as claimed in Claim 1 characterised by being equipped with the first layer consisting of oxide film or nitride film provided by covering the surface of the above-described vibrator beam, the second layer consisting of polysilicon having rough surface provided by covering the surface of said first layer, the third layer consisting of oxide film or nitride film provided by covering the internal surface of the above-described chamber, the fourth layer consisting of polysilicon provided by covering the surface of said third layer, and the seventh layer consisting of silicon single crystal provided by covering the external surface of the above-described shell.
Claim 5
Dependent Claim
122 words
A vibrating type pressure measuring device as claimed in Claim 1, characterised by being equipped with the first layer consisting of oxide film or nitride film provided by covering the surface of the above-described vibrator beam, the second layer consisting of polysilicon provided by covering the surface of said first layer, the third layer consisting of oxide film or nitride film provided on the internal surface of the above-described chamber, and the fourth layer consisting of polysilicon provided by covering the surface of said third layer, and by adjusting the film thickness of the above-described first layer and the second layer, the tension formed by the above-described vibrator beam, the first layer, and the second layer is adjusted to a predetermined tension.
Claim 6
Dependent Claim
119 words
A vibrating type pressure measuring devie characterised by being equipped with the first layer consisting of oxide film or nitride film provided by covering the surface of the above-described vibrator beam, the second layer consisting of polysilicon provided by covering the surface of said first layer, the third layer consisting of oxide film or nitride film provided by covering the internal surface of the above-described chamber, and the fourth layer consisting of polysilicon provided by covering said third layer, and by adjusting the film thickness of the above-described first layer and the above-described second layer, the temperature coefficient formed by the above-described vibrator beam, the first layer, and the second layer has been adjusted to a predetermined temperature coefficient.
References Cited (Backward Citations)
US4841775A
Cited
US4813271A
Cited
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