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EP0452006A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

A composite film and method of manufacturing the same

Assignee: Individual
•
Filing: 1991-03-28
•
Granted: —
•
Expires: 2011-03-28
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Abstract

Abstract A method of forming on a substrate (11) a composite film (3) comprising two or more elements, wherein matter (6,8) containing film forming elements is carried into a gaseous plasma (5), where said matter is converted into a vapour state (12) and is conveyed towards the substrate (11), to form thereon a composite film (3), having a desired combination and distribution of said elements.

Inventors

  • 👤 Atsushi Ogura

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 02:15
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/452; C23C16/50; C23C16/513

Claims Analysis

Total Claims: 33
Claim 1
Independent Claim 48 words
A method of forming on a substrate a composite film comprising two or more elements, wherein matter containing film forming elements is carried into a gaseous plasma, where said matter is converted into a vapour state, and is conveyed towards the substrate, to form the composite film thereon.
Claim 2
Dependent Claim 29 words
A method as claimed in claim 1, wherein the matter carried into the gaseous plasma is converted into an at least partially ionized vapour state in the gaseous plasma.
Claim 3
Dependent Claim 35 words
A method as claimed in either claim 1 or claim 2, wherein the matter comprises fine solid or liquid, preferably solid, particles, which are suspended in a gaseous substance for being conveyed into the plasma.
Claim 4
Dependent Claim 19 words
A method as claimed in claim 3, wherein said gaseous substance also provides at least one film forming element.
Claim 5
Independent Claim 33 words
A method as claimed in any of the previous claims, wherein the gaseous plasma is formed from an inert gas, such as helium or argon, preferably in admixture with ammonia, oxygen, or hydrogen.
Claim 6
Independent Claim 31 words
A method as claimed in any of the preceding claims, wherein the gaseous plasma is inductively generated by passing an oscillating, preferably radio frequency, electric field through the plasma forming gas.
Claim 7
Dependent Claim 29 words
A method as claimed in claim 6, wherein the radio frequency electric field is applied to the plasma forming gas by a coil arranged around a plasma containing vessel.
Claim 8
Independent Claim 28 words
A method as claimed in any of the preceding claims, wherein the film forming elements are deposited on the substrate in proportion to their presence in the matter.
Claim 9
Dependent Claim 22 words
A method as claimed in claim 8, wherein ions or radicals present in the matter are preserved in the film after formation.
Claim 10
Independent Claim 36 words
A method as claimed in any of the preceding claims, wherein the substances forming the matter are selected so that the film is formed as a solid solution, comprising a uniform distribution of film forming elements.
Claim 11
Independent Claim 36 words
A method as claimed in any of the preceding claims, wherein the substrate is maintained at a lower temperature than the gaseous plasma and the gaseous plasma and substrate are maintained under conditions of reduced pressure.
Claim 12
Independent Claim 34 words
A method as claimed in any of the preceding claims, wherein the matter includes elements selected from iron, nickel, aluminium, chronium, oxygen, nitrogen, arsenic, antimony, bismuth, selenium, tellurium, silicon, germanium, carbon, boron, and hydrogen.
Claim 13
Dependent Claim 22 words
A method as claimed in claim 12, wherein said elements are present in the form of oxides, nitrates, carbides or ammonium compounds.
Claim 14
Independent Claim 27 words
A method as claimed in any of claims 4-13, wherein the gaseous substance includes a hydrocarbon, preferably methane, and the composite film formed thereby includes a carbide.
Claim 15
Independent Claim 72 words
A method as claimed in any of the preceding claims, wherein the matter comprises fine solid particles produced by reacting an aqueous solution of a salt or salts, including at least two or more ions in addition to those from water, with an aqueous alkali solution, to precipitate the corresponding oxygen containing compounds which, thereafter, are dried, separated from the remaining salt solution and comminuted to provide a powder of said particles.
Claim 16
Dependent Claim 20 words
A method as claimed in claim 15, wherein the aqueous salt solution is a metal halide, preferably a metal chloride.
Claim 17
Independent Claim 29 words
A method as claimed in any of the preceding claims, wherein the matter including the film forming elements is heated by laser light, prior to entering the electric field.
Claim 18
Dependent Claim 27 words
A composite film comprising two or more elements carried on a substrate, characterised in that the elements are substantially regularly distributed in the film in predetermined proportions.
Claim 19
Dependent Claim 17 words
A composite film as claimed in claim 18, wherein the film includes at least one non-metallic element.
Claim 20
Dependent Claim 39 words
A composite film as claimed in either of claims 18 or claim 19, wherein the elements forming the film are selected from iron, nickel, aluminium, chromium, oxygen, nitrogen, arsenic, antimony, bismuth, selenium, tellurium, silicon, germanium, carbon, boron and hydrogen.
Claim 21
Dependent Claim 38 words
A composite film as claimed in any of claims 18-20, wherein the film is a solid solution, which includes individual heteroatomic molecules or ions, is in the form of an extended array, or has a rigid crystalline structure.
Claim 22
Dependent Claim 17 words
A composite film as claimed in any of claims 18-21, wherein the film comprises a ceramic material.
Claim 23
Dependent Claim 29 words
A composite film comprising two or more elements carried on a substrate, characterised in that said film is formed by the method claimed in any one of claims 1-17.
Claim 24
Dependent Claim 96 words
A composite film as claimed in claim 18, characterised in that the film comprises a solid solution formed by a process in which an aqueous solution of a salt or salts, including at least two or more irons in addition to those from water, is reacted with an alkali to form a crystalline substance including said elements, said substance is purified, dryed, comminuted into a particulate form, converted into an activated vapour state in a high temperature plasma and conveyed to a substrate by the plasma, where the vapourized substance condenses to form the composite film.
Claim 25
Dependent Claim 24 words
A composite film as claimed in claim 24, wherein said film is formed from spherical particles having a particle size of 1µm or less.
Claim 26
Dependent Claim 177 words
A method of forming a composite film as claimed in claim 1, characterised in that high frequency current is passed through a coil wound around a tubular glass vessel, high temperature plasma in a high density active state is produced in the vessel through inductive coupling and ionization of a gaseous substance, such as helium or argon passed into the vessel, an aqueous solution of a salt or salts, including at least two or more ions in addition to those from water, is reacted with an alkali to form a crystalline material including said elements, said substance is purified, dryed, comminuted into a powder and mixed with argon gas, this mixture is further mixed with helium gas and/or argon gas and/or ammonia gas and/or oxygen gas and/or hydrogen gas, to provide a gaseous suspension of powder, which is passed into the plasma where the powder particles are converted into an activated vapour state, and in that said activated vapour is conveyed under reduced pressure to a substrate, where the activated vapour condenses to provide the composite film.
Claim 27
Dependent Claim 40 words
A method as claimed in claim 26, wherein the plasma forms a flame directed in an upwardly direction and the activated vapourized substance is blown into the plasma from a nozzle located near the lower portion of the plasma flame.
Claim 28
Dependent Claim 115 words
A method as claimed in claim 26, wherein the powder is placed in a container and vibrated by a vibrator mounted on the container, argon gas is passed into the container and the powder is lifted and floated upwardly towards a filter, those particles of the suspended powder having a particle size of 3µm or less are passed through the filter and out of the container, where said suspension of powder is directed into a mixing vessel, together with a gaseous substance, such as argon, argon and ammonia, or argon and oxygen, the quantity of powder and gases being controlled and adjusted so as to provide the desired component ratio in the product composite film.
Claim 29
Dependent Claim 25 words
A method as claimed in claim 26, wherein the dried crystalline substance is comminuted into a powdered form by a high temperature plasma atomizing process.
Claim 30
Dependent Claim 55 words
A method as claimed in claim 3 or 26, wherein the particles are in the form of a mist produced by passing high frequency vibrations through an aqueous solution of salt or salts, including at least two or more ions in addition to those from water, and preferably said particles are suspended in argon gas.
Claim 31
Dependent Claim 25 words
A method as claimed in claim 15, wherein the powder is dissolved in water and droplets of the resulting solution are suspended in argon gas.
Claim 32
Dependent Claim 20 words
A method as claimed in claim 26, wherein the gaseous substance is heated before it is mixed with the powder.
Claim 33
Dependent Claim 20 words
A method as claimed in claim 26, wherein the substrate is formed from a ceramic, glass, metal or composite material.

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