EP0449409A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Probe unit, information processing device using same and methods of use and manufacture
Assignee: Canon Inc
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Filing: 1991-02-07
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Granted: —
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Expires: 2011-02-07
Abstract
Abstract A fine-pointed microprotrusion (8) for use as the tip of a scanning tunnel microscope probe or recording stylus is produced by deposition of metal (5) through a mask (4,7) the aperture of which mask (4,7) is reduced during deposition so that a conical or otherwise tapered microprotrusion (8) of height between 2 µm and 10 µm and a fine pointed apex of atomic scale shall result. In the preferred performance of this method the metal is deposited upon an electrode coated substrate (2,1) of semiconductor material in which is defined an integral amplifier or other IC element (fig. 7C). The microprotrusion is preferably of noble metal or is coated with noble metal. Styli (102,103) produced as above may be utilised as a pair in a recording/reproducing device (fig.3), one stylus (103) to detect position and the other stylus (102) to record/reproduce/erase. Position detection using an embodied co-ordinate axis system (fig. 10) is described.
Inventors
- 👤 Kunihiro Sakai
- 👤 Toshimitsu Kawase
- 👤 Akihiko Yamano
- 👤 Ryo Kuroda
- 👤 Hiroyasu Nose
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-25 23:00
CPC Classifications
G; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1409; G11B9/1418; G11B9/1463; G11B9/1472; G11B9/1481; B; B82; B82Y; B82Y10/00; G01; G01Q; G01Q80/00
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
30 words
A probe unit comprising a substrate and a probe electrode including a micro-protrusion having a height of 2 µm or more to 10 µm or less formed on said substrate.
Claim 2
Dependent Claim
19 words
A probe unit according to claim 1, wherein said micro-protrusion is formed through a metal layer on the substrate.
Claim 3
Dependent Claim
23 words
A probe unit according to claim 1, wherein the height of said micro-protrusion is within the range of 2 µm to 8 µm.
Claim 4
Dependent Claim
17 words
A probe unit according to claim 1, wherein said micro-protrusion has the structure of cone or pyramid.
Claim 5
Dependent Claim
22 words
A probe unit according to claim 1, wherein said micro-protrusion comprises a noble metal or a metal covered with a noble metal.
Claim 6
Dependent Claim
42 words
An information processing device comprising: a probe unit according to any one of the preceding claims; means for mounting a recording medium opposite to said probe unit; and a means for applying a voltage between said probe electrode and said recording medium.
Claim 7
Dependent Claim
21 words
An information processing device according to claim 6, wherein the probe electrode is equipped with an amplifier integral with said substrate.
Claim 8
Dependent Claim
15 words
An information processing device according to claim 6, having at least one more probe electrode.
Claim 9
Dependent Claim
59 words
An information processing device according to claim 6, including therein: a recording medium having a positional coordinate axis as a reference; a means for detecting position on said positional coordinate axis; and means for causing recording or reproduction and erasing of recorded information to be performed at a position of said recording medium corresponding to a coordinate position detected.
Claim 10
Dependent Claim
24 words
An information processing device according to claim 9, wherein the positional coordinate axis as said reference is a coordinate axis based on atomic arrangement.
Claim 11
Dependent Claim
41 words
An information processing device according to claim 9, wherein an original point as the reference is provided on at least one of the positional coordinate axis to become respectively a standard reference and a position of the recording medium corresponding thereto.
Claim 12
Dependent Claim
24 words
An information processing device according to claim 9, wherein there is provided a plurality of positional coordinate axes each to become a standard reference.
Claim 13
Dependent Claim
30 words
An information processing device according to claim 8 and 9, wherein one probe electrode is provided for positional coordinate detection, and another probe electrode is provided for recording or regeneration.
Claim 14
Dependent Claim
17 words
An information processing device according to claim 6, wherein said recording medium has an electrical memory effect.
Claim 15
Dependent Claim
50 words
An information processing device according to claim 6, wherein said recording medium has a standard scale which becomes a standard within a plane, and said device has a means for detecting the relative displacement in the interplanar direction of the recording medium between said standard scale and the probe electrode.
Claim 16
Dependent Claim
20 words
An information processing device according to claim 18, wherein said standard scale is a scale based on the atomic arrangement.
Claim 17
Dependent Claim
19 words
An information processing device according to claim 18, wherein said standard scale has an original point as the standard.
Claim 18
Dependent Claim
16 words
An information processing device according to claim 18, having a plurality of said standard scales set.
Claim 19
Dependent Claim
56 words
An information processing method, which comprises bringing a probe unit according to claims 1 to 5 to within a proximity of a sample or recording medium and applying a bias voltage between the probe electrode of the probe unit and the sample or recording medium to read out information recorded in the sample or recording medium.
Claim 20
Dependent Claim
54 words
An information processing method, which comprises bringing a probe unit according to claims 1 to 5 to within proximity of a recording medium and applying a pulse voltage between the probe electrode of the probe unit and the recording medium either to record information in, or to erase information recorded in, the recording medium.
Claim 21
Dependent Claim
14 words
Use of the probe unit according to claims 1 to 5 for information processing.
Claim 22
Independent Claim
68 words
A method of producing a fine-pointed microprotrusion for use as the tip of a scanning tunnel microscope probe or recording stylus, which method comprises depositing a metal on a substrate through a mask aperture, and reducing the size of the mask aperture during deposition until there is formed a microprotrusion having a height of between 2 µm and 10 µm and a fine-pointed apex of atomic scale dimensions.
Claim 23
Dependent Claim
56 words
A method as claimed in claim 22 wherein said substrate is of semiconductor material and said microprotrusion is formed by deposition of said metal upon an electrode or electrode material layer at the surface of said substrate, which electrode or electrode material layer is in electrical contact with an integrated circuit element defined in said substrate.
References Cited (Backward Citations)
No citation records indexed.
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