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EP0447835A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Heat removal apparatus for liquid cooled semiconductor modules

Assignee: International Business Machines Corp
•
Filing: 1991-02-23
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Granted: —
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Expires: 2011-02-23
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Abstract

Abstract A cold plate and an integrated circuit cooling module embodying a cross-hatch coolant flow distribution scheme. Cross hatch flow distribution is achieved by way of two sets of channels which run perpendicular to each other. The first set of channels is formed on a base plate (400). The second, perpendicular set is includes a set of inlet channels and a set of interleaved outlet channels formed on a distribution plate (600). In the preferred embodiment, the base and distribution plates are separated by an interposer plate (500) that has nozzles (502) which cause a liquid coolant to impinge, under pressure, on the floor of the base plate.

Inventors

  • 👤 George Tipton Galyon
  • 👤 George Michael Jordhamo
  • 👤 Kevin Patrick Moran
  • 👤 Michael Lynn Zumbrunnen

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-04 19:40
CPC Classifications
H; H10; H10W; H10W40/00; H10W40/70; H10W40/77; H10W40/776; F; F28; F28F; F28F3/00; F28F3/12; F28F2210/00; F28F2210/02; F28F2210/10

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 107 words
A heat removal apparatus comprising: a first plate (600) having a first plurality of inlet channels (602) and a second plurality of outlet channels (604) formed therein and disposed so as to be interleaved with said inlet channels; a second plate (400) having a third plurality of cooling channels (402) formed therein, said second plate being disposed in communication with said first plate to cause said cooling channels to be angular to and nonplaner with both said inlet channels and said outlet channels; wherein said first and second plates cooperate to form a flow path from said inlet channels through said cooling channels to said outlet channels.
Claim 2
Dependent Claim 30 words
The heat removal apparatus of Claim 1 wherein said third plurality of cooling channels are disposed so as to be perpendicular with both said inlet channels and said outlet channels.
Claim 3
Dependent Claim 25 words
The heat removal apparatus of Claim 1 or 2 wherein said first plate further comprises a plurality of nozzles (502) formed in said inlet channels.
Claim 4
Dependent Claim 34 words
The heat removal apparatus of Claim 1, further comprising: a third plate (500) having a plurality of nozzles (502) formed therein, said third plate being disposed between said first plate and said second plate.
Claim 5
Dependent Claim 45 words
The heat removal apparatus of claim 4, wherein said second plate comprises a plurality of bosses extending therefrom and wherein said third plate has a plurality of openings formed therein disposed to receive said bosses when said third plate is mounted to said second plate.
Claim 6
Dependent Claim 37 words
The heat removal apparatus of claims 4 or 5, wherein each of said first, second and third plates have a manifold openings formed therein which cooperate to form an inlet manifold chamber and an outlet manifold chamber.
Claim 7
Dependent Claim 22 words
The heat removal apparatus of any one of the preceding claims 4 to 6 wherein said nozzles extend into said cooling channels.
Claim 8
Dependent Claim 37 words
The heat removal apparatus of any one of the preceding claims 4 to 7 wherein said nozzles are arranged into a plurality of parallel lines and wherein said parallel lines are disposed perpendicularly to said cooling channels.
Claim 9
Dependent Claim 31 words
The heat removal apparatus of any one of the preceding claims 4 to 7, wherein said third plate further comprises a plurality of elongated openings formed therein, interleaved with said lines.
Claim 10
Dependent Claim 34 words
The heat removal apparatus of any one of the preceding claims, further comprising an inlet manifold chamber (702) coupled to said inlet channels and an outlet manifold chamber (704) coupled to said outlet channels.
Claim 11
Dependent Claim 20 words
The heat removal apparatus of Claim 10, further comprising a plurality of inlet fittings connected to said inlet manifold chamber.
Claim 12
Dependent Claim 26 words
The heat removal apparatus of Claim 10 or 11 wherein said inlet channels are of a depth that decreases with distance from said inlet manifold chamber.
Claim 13
Dependent Claim 27 words
The heat removal apparatus of Claim 10, further comprising an inlet fitting connected to said inlet manifold chamber an outlet fitting connected to said outlet manifold chamber.
Claim 14
Dependent Claim 37 words
The heat removal apparatus of Claim 13, wherein said inlet fitting is of substantially the same perimeter as said inlet manifold chamber and said outlet fitting is of substantially the same perimeter as said outlet manifold chamber.
Claim 15
Dependent Claim 89 words
A heat removal apparatus, comprising: a body (800) having a top portion, a central portion and a bottom portion, said top portion (802) comprising a plurality of coolant inlet channels (808) and a plurality of coolant outlet channels interleaved with said coolant inlet channels; said bottom portion comprising a plurality of cooling plugs (903), and a plurality of first compliant members connected said cooling plugs to said body; said central portion (906) comprising a plurality of nozzles (901) connected to said inlet channels, and extending into said cooling plugs.
Claim 16
Dependent Claim 22 words
The heat removal apparatus of Claim 15, further comprising a second compliant member disposed between said top portion and said bottom portion.
Claim 17
Dependent Claim 40 words
The heat removal apparatus of Claim 15 or 16, wherein said cooling plugs each have a spherical cavity (902) formed therein and wherein said spherical cavity is disposed so as to receive coolant from at least one of said nozzles.

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