Capacitive moisture sensor

Abstract

Abstract A moisture-sensitive metal-oxide layer (2) is present on one side of a plate-type substrate (3), preferably composed of glass. Electrodes (4a, 4b) are situated on the side of the substrate opposite the oxide layer and each is connected to a terminal wire (6). The metal-oxide layer (2) and the metal coatings of the electrodes (4a, 4b) are applied to the substrate (3) by a thermal transfer method. The capacitive moisture sensor can be produced very simply without photolithographic operations, it has a very fast response time and it does not have any metal electrode parts on the moisture-sensitive layer (2) side. The sensor is therefore suitable for measuring microclimates. It can also be advantageously used in explosive environments. <IMAGE>

Inventors

• 👤 Martin Ineichen

Bibliographic Details