EP0443760A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Precursor polymer for ceramic coatings
Assignee: Dow Silicones Corp
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Filing: 1991-02-12
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Granted: —
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Expires: 2011-02-12
Abstract
Abstract This invention relates to a method of hydrolyzing hydridosilanes of the formula HSi(OR)₃ to form a soluble resinous hydrolysate comprising a polymer having units of the formula HSi(OH) x (OR) y O z/2 , wherein each R is independently an organic group which, when bonded to the silicon through an oxygen atom, forms a hydrolyzable substituent, x = 0-2, y = 0-2, z = 1-3, x + y + z = 3 and the average value of y over all of the units of the polymer is greater than 0. The invention also relates to the soluble hydrolysates formed thereby as well as the method of using said hydrolysates to provide coatings on various substrates, including electronic devices, to form protective layers or inter-level dielectric layers in multilayered devices.
Inventors
- 👤 Ronald Howard Baney
- 👤 Grish Chandra
- 👤 Loren Andrew Haluska
- 👤 Keith Winton Michael
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 04:55
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/50; C04B41/5025; C04B41/5035; C04B41/80; C04B41/81; C04B41/85; C04B41/87; C08; C08G; C08G77/00; C08G77/04; C08G77/12; C09; C09D; C09D183/00; C09D183/04; C04B2111/00; C04B2111/00474; C04B2111/00844
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
79 words
A method of hydrolyzing a hydridosilane of the formula HSi(OR)₃ to form a soluble resinous hydrolysate wherein each R is independently an organic group which, when bonded to silicon through the oxygen atom, forms a hydrolyzable substituent, the method comprising: combining components comprising said hydridosilane, an oxygen containing polar organic solvent, water and an acid to form a mixture; and facilitating hydrolysis of said hydridosilane in the mixture for a time sufficient to hydrolyze or partially hydrolyze said hydridosilane.
Claim 2
Dependent Claim
55 words
The method of claim 1 wherein the water is present in an amount less than about a 5:1 molar ratio of water:hydridosilane; said acid is selected from the group consisting of hydrogen halides, carboxylic, nitric and sulfuric; and wherein said hydrolyzable substituent is independently selected from the group consisting of alkoxy, alkenoxy, aryloxy and acyloxy.
Claim 3
Dependent Claim
27 words
The method of claim 2 wherein said solvent is an alcohol or mixture of alcohols and a modifying ceramic oxide precursor is additionally added to said mixture.
Claim 4
Dependent Claim
22 words
The method of claim 2 wherein a platinum or rhodium catalyst is added to a solution of said hydrolysate or partial hydrolysate.
Claim 5
Dependent Claim
20 words
The method of claim 1 wherein the oxygen containing polar organic solvent is also mixed with an additional miscible solvent.
Claim 6
Dependent Claim
74 words
A soluble resinous hydrolysate comprising a polymer having units of the formula HSi(OH) x (OR) y O z/2 , wherein each R is independently an organic group which, when bonded to silicon through the oxygen atom, forms a hydrolyzable substituent, x = 0-2, y = 0-2, z = 1-3, x + y + z = 3 and the average value of y over all of the units of the polymer is greater than 0.
Claim 7
Dependent Claim
9 words
The hydrolysate of claim 6 dissolved in a solvent.
Claim 8
Dependent Claim
14 words
The hydrolysate of claim 6 wherein a platinum or rhodium catalyst is additionally present.
Claim 9
Dependent Claim
126 words
A soluble resinous cohydrolysate comprising a polymer having units of the formula HSi(OH) x (OR) y O z/2 and modifying ceramic oxide units, wherein each R is independently an organic group which, when bonded to silicon through the oxygen atom, forms a hydrolyzable substituent, x = 0-2, y = 0-2, z = 1-3, x + y + z = 3, the average value of y over all of the units of the polymer is greater than 0 and the modifying ceramic oxide unit is the condensed hydrolysate of a modifying ceramic oxide precursor comprising an element selected from the group consisting of titanium, zirconium, aluminum, tantalum, vanadium, niobium, boron and phosphorous with at least one hydrolyzable substituent selected from the group consisting of alkoxy or acyloxy.
Claim 10
Dependent Claim
61 words
A method of forming a ceramic or ceramic like coating on a substrate comprising: coating said substrate with a solution comprising a solvent and a hydrolysate of claim 6; evaporating said solvent to thereby deposit a preceramic coating on said substrate; and ceramifying said preceramic coating by heating the coated substrate to a temperature of between about 40 to about 1000°C.
Claim 11
Dependent Claim
12 words
The method of claim 10 wherein said substrate is an electronic device.
References Cited (Backward Citations)
No citation records indexed.
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