EP0440376A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Process for forming pattern
Assignee: Panasonic Holdings Corp
•
Filing: 1991-01-24
•
Granted: —
•
Expires: 2011-01-24
Abstract
Abstract A pattern having good contrast and pattern shape with good adhesiveness to a substrate can be formed by forming on a substrate a film of pattern forming material comprising (a) a resin having alkali solubilizable functional groups and heat resistant groups, (b) a photoacid generator, and (c) a solvent, exposing the film selectively to deep UV light, heating the film and developing the film with an alkali developer.
Inventors
- 👤 Yoshiyuki Tani
- 👤 Masaru Sasago
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 01:18
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
92 words
A process for forming a pattern which comprises forming on a substrate a film of pattern forming material comprising (a) a resin having functional groups being able to be alkali-soluble under an acid atmosphere and a moiety having heat resistance, (b) a photosensitive compound being able to generate an acid by exposure to light, and (c) a solvent for dissolving both the components (a) and (b), exposing the film selectively to deep ultraviolet light, heating the exposed film, and developing the resulting film using an alkali developer to form the desired pattern.
Claim 2
Dependent Claim
35 words
A process according to Claim 1, wherein the moiety having heat resistance is an imido group, an amido group, a cyane group, a phenyl group, a hydroxyphenyl group, a chlorophenyl group, or a cyano group.
Claim 3
Dependent Claim
42 words
A process according to Claim 1, wherein the functional group is a methyl group, an isopropyl group, a tert-butyl group, a methoxymethyl group, an isopropoxymethyl group, a tetrahydropyranyl group, a tetrahydrofuryl group, a trimethylsilyl group, a tert-butoxycarbonyl group, or an isopropoxycarbonyl group.
Claim 4
Dependent Claim
14 words
A process according to Claim 1, wherein the functional group is a tert-butoxycarbonyl group.
Claim 5
Dependent Claim
35 words
A process according to Claim 1, wherein the resin (a) has the repeating units of the formula: wherein R¹, R² and R³ are independently a hydrogen atom, a halogen atom or a lower alkyl group.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.