EP0437275A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Microprobe, method for producing the same, and information input and/or output apparatus utilizing the same
Assignee: Canon Inc
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Filing: 1991-01-11
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Granted: —
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Expires: 2011-01-11
Abstract
Abstract A probe for reading an information from an object and/or inputting an information to an object is disclosed. The probe has a supporting member (5) and a rod-shaped projection (1,4) of which the end is positioned opposed to the object (2) for information reading therefrom and/or information input thereto. The rod-shaped projection protrudes from a partial area of the supporting member. The information reading from the object and/or information input to the object is effected at the longitudinal end of the probe. The probe provides precise and accurate output and/or input of information regardless of the surface state of the object.
Inventors
- 👤 Kurihara Suomi
- 👤 Kawada Haruki
- 👤 Takimoto Kiyoshi
- 👤 Kasanuki Yuji
- 👤 Kawase Toshimitsu
- 👤 Kawade Hisaaki
- 👤 Eguchi Ken
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 09:12
CPC Classifications
G; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1409; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; G11B11/00; G11B11/08; G01Q60/24; G01Q60/38; G01Q60/40; G01Q70/00; G01Q70/08; G01Q70/10; G01Q70/12; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/875; Y10S977/878
Claims Analysis
Total Claims: 60
Claim 1
Independent Claim
59 words
A probe for effecting, at a longitudinal end thereof, information reading from an object and/or information input to an object, comprising: a supporting member; and a rod-shaped projection of which the end is positioned opposed to said object for information reading therefrom and/or information input thereto; wherein said rod-shaped projection protrudes from a partial area of said supporting member.
Claim 2
Dependent Claim
33 words
A probe according to claim 1, wherein said rod-shaped projection has a variation rate of the cross sectional area not exceeding 10 % continuously over a longitudinal length of at least 5 nm.
Claim 3
Dependent Claim
21 words
A probe according to claim 1, wherein said rod-shaped projection at least includes a part composed of a single crystal whisker.
Claim 4
Independent Claim
79 words
A method for producing a probe for effecting, at a longitudinal end thereof, information reading from an object and/or information input to an object, comprising steps of: placing a member constituting a supporting member at a predetermined position; and forming a rod-shaped projection of which the end is positioned opposed to said object for information reading therefrom and/or information input thereto; wherein said rod-shaped projection is formed in a predetermined part of said member placed in said predetermined position.
Claim 5
Dependent Claim
40 words
A method according to claim 4, wherein said rod-shaped projection is formed in such a manner that the variation rate of the cross sectional area does not exceed 10 % continuously over a longitudinal length of at least 5 nm.
Claim 6
Dependent Claim
19 words
A method according to claim 4, wherein the formation of said rod-shaped projection is conducted by whisker crystal growth.
Claim 7
Dependent Claim
62 words
A method according to claim 6, further comprising a step of forming a pointed part as said predetermined part on said member prior to said placing step, wherein the formation of said rod-shaped projection is conducted by the whisker crystal growth in a state where the temperature of said pointed part is made different from that of other parts of said member.
Claim 8
Dependent Claim
48 words
A method according to claim 6, further comprising a step of covering said member with an aperture in said predetermined part, prior to said placing step, wherein the formation of said rod-shaped projection includes metal deposition in said aperture and whisker crystal growth in a predetermined gaseous atmosphere.
Claim 9
Dependent Claim
79 words
A method according to claim 8, wherein said covering step is conducted by coating a silicon monocrystalline substrate, serving as said member, with a resist material and forming an aperture in said resist material; said metal deposition is conducted by gold evaporation in said aperture; and said whisker crystal growth is conducted in a gaseous atmosphere containing SiCl₄; and further comprising a step of coating the whisker surface with a conductive film after the formation of said rod-shaped projection.
Claim 10
Independent Claim
110 words
An apparatus for information reading from an object and/or information input into an object, comprising: a signal processing unit for signal processing for information reading from said object and/or information input to said object; and a probe positioned opposed to said object; wherein said signal processing unit is adapted to effect information reading from said object and/or information input to said object through the longitudinal end of said probe; said probe includes a supporting member, and a rod-shaped projection of which the end is positioned opposed to said object for information reading therefrom and/or information input thereto; and said rod-shaped projection protrudes from a partial area of said supporting member.
Claim 11
Dependent Claim
33 words
An apparatus according to claim 10, wherein said rod-shaped projection has a variation rate of the cross sectional area not exceeding 10 % continuously over a longitudinal length of at least 5 nm.
Claim 12
Dependent Claim
29 words
An apparatus according to claim 10, wherein said signal processing unit is adapted to measure the surface information of the object based on the information read through said probe.
Claim 13
Dependent Claim
33 words
An apparatus according to claim 10, wherein said signal processing unit is adapted to effect information recording to and/or information reproduction from an information recording medium, serving as said object, through said probe.
Claim 14
Dependent Claim
36 words
An apparatus according to claim 13, wherein said signal processing unit is adapted to effect information recording by applying a voltage between said probe and said information recording medium thereby inducing an electric memory effect therein.
Claim 15
Dependent Claim
27 words
An apparatus according to claim 14, wherein said probe is adapted to effect the recording while moving along a recessed groove formed on said information recording medium.
Claim 16
Dependent Claim
35 words
An apparatus according to claim 13, wherein said signal processing unit is adapted to effect information reproduction by applying a voltage between said probe and said information recording medium and detecting the current flowing therebetween.
Claim 17
Dependent Claim
25 words
An apparatus according to claim 16, wherein said probe is adapted to read data recorded in a recessed groove formed on said information recording medium.
Claim 18
Dependent Claim
20 words
An apparatus according to claim 10, wherein said rod-shaped projection at least includes a part composed of a monocrystalline whisker.
Claim 19
Dependent Claim
15 words
An apparatus according to claim 18, wherein said monocrystalline whisker is composed of a metal.
Claim 20
Dependent Claim
23 words
An apparatus according to claim 18, wherein said monocrystalline whisker is composed of a non-conductive material, and is coated with a conductive material.
Claim 21
Dependent Claim
64 words
A probe for effecting information reading from an object and/or information input to an object by applying a voltage between said probe and said object, comprising: a supporting member; and a rod-shaped projection of which the end is positioned opposed to said object for information reading therefrom and/or information input thereto; wherein said rod-shaped projection protrudes from a partial area of said supporting member.
Claim 22
Dependent Claim
33 words
A probe according to claim 21, wherein said rod-shaped projection has a variation rate of the cross sectional area not exceeding 10 % continuously over a longitudinal length of at least 5 nm.
Claim 23
Dependent Claim
20 words
A probe according to claim 21, wherein said rod-shaped projection at least includes a part composed of a monocrystalline whisker.
Claim 24
Independent Claim
84 words
A method for producing a probe for effecting information reading from an object and/or information input to an object by applying a voltage between said probe and said object, comprising steps of: placing a member constituting a supporting member at a predetermined position; and forming a rod-shaped projection of which the end is positioned opposed to said object for information reading therefrom and/or information input thereto; wherein said rod-shaped projection is formed in a predetermined part of said member placed in said predetermined position.
Claim 25
Dependent Claim
40 words
A method according to claim 24, wherein said rod-shaped projection is formed in such a manner that the variation rate of the cross sectional area does not exceed 10 % continuously over a longitudinal length of at least 5 nm.
Claim 26
Dependent Claim
19 words
A method according to claim 24, wherein the formation of said rod-shaped projection is conducted by whisker crystal growth.
Claim 27
Dependent Claim
62 words
A method according to claim 26, further comprising a step of forming a pointed part as said predetermined part on said member prior to said placing step, wherein the formation of said rod-shaped projection is conducted by the whisker crystal growth in a state where the temperature of said pointed part is made different from that of other parts of said member.
Claim 28
Dependent Claim
48 words
A method according to claim 26, further comprising a step of covering said member with an aperture in said predetermined part, prior to said placing step, wherein the formation of said rod-shaped projection includes metal deposition in said aperture and whisker crystal growth in a predetermined gaseous atmosphere.
Claim 29
Dependent Claim
79 words
A method according to claim 28, wherein said covering step is conducted by coating a silicon monocrystalline substrate, serving as said member, with a resist material and forming an aperture in said resist material; said metal deposition is conducted by gold evaporation in said aperture; and said whisker crystal growth is conducted in a gaseous atmosphere containing Sicl₄; and further comprising a step of coating the whisker surface with a conductive film after the formation of said rod-shaped projection.
Claim 30
Independent Claim
113 words
An apparatus for information reading from an object and/or information input into an object, comprising: a signal processing unit for signal processing for information reading from said object and/or information input to said object; and a probe positioned opposed to said object; wherein said signal processing unit is adapted to effect information reading from said object and/or information input to said object by applying a voltage between said probe and said object; said probe includes a supporting member, and a rod-shaped projection of which the end is positioned opposed to said object for information reading therefrom and/or information input thereto; and said rod-shaped projection protrudes from a partial area of said supporting member.
Claim 31
Dependent Claim
33 words
An apparatus according to claim 30, wherein said rod-shaped projection has a variation rate of the cross sectional area not exceeding 10 % continuously over a longitudinal length of at least 5 nm.
Claim 32
Dependent Claim
28 words
An apparatus according to claim 30, wherein said signal processing unit is adapted to measure surface information of the object based on the information read through said probe.
Claim 33
Dependent Claim
33 words
An apparatus according to claim 30, wherein said signal processing unit is adapted to effect information recording to and/or information reproduction from an information recording medium, serving as said object, through said probe.
Claim 34
Dependent Claim
36 words
An apparatus according to claim 33, wherein said signal processing unit is adapted to effect information recording by applying a voltage between said probe and said information recording medium thereby inducing an electric memory effect therein.
Claim 35
Dependent Claim
27 words
An apparatus according to claim 34, wherein said probe is adapted to effect the recording while moving along a recessed groove formed on said information recording medium.
Claim 36
Dependent Claim
35 words
An apparatus according to claim 33, wherein said signal processing unit is adapted to effect information reproduction by applying a voltage between said probe and said information recording medium and detecting the current flowing therebetween.
Claim 37
Dependent Claim
25 words
An apparatus according to claim 36, wherein said probe is adapted to read data recorded in a recessed groove formed on said information recording meidum.
Claim 38
Dependent Claim
20 words
An apparatus according to claim 30, wherein said rod-shaped projection at least includes a part composed of a monocrystalline whisker.
Claim 39
Dependent Claim
15 words
An apparatus according to claim 38, wherein said monocrystalline whisker is composed of a metal.
Claim 40
Dependent Claim
23 words
An apparatus according to claim 38, wherein said monocrystalline whisker is composed of a non-conductive material, and is coated with a conductive material.
Claim 41
Dependent Claim
54 words
A probe positioned close to an object for information reading therefrom and/or information input thereto, comprising: a supporting member; and a rod-shaped projection of which the end is positioned opposed to said object for information reading therefrom and/or information input thereto; wherein said rod-shaped projection protrudes from a partial area of said supporting member.
Claim 42
Dependent Claim
33 words
A probe according to claim 41, wherein said rod-shaped projection has a variation rate of the cross sectional area not exceeding 10 % continuously over a longitudinal length of at least 5 nm.
Claim 43
Dependent Claim
20 words
A probe according to claim 41, wherein said rod-shaped projection at least includes a part composed of a monocrystalline whisker.
Claim 44
Independent Claim
76 words
A method for producing a probe to be positioned close to an object for information reading therefrom and/or information input thereto, comprising steps of: placing a member constituting a supporting member at a predetermined position; and forming a rod-shaped projection of which the end is positioned opposed to said object for information reading therefrom and/or information input thereto; wherein said rod-shaped projection is formed in a predetermined part of said member placed in said predetermined position.
Claim 45
Dependent Claim
40 words
A method according to claim 44, wherein said rod-shaped projection is formed in such a manner that the variation rate of the cross sectional area does not exceed 10 % continuously over a longitudinal length of at least 5 nm.
Claim 46
Dependent Claim
19 words
A method according to claim 44, wherein the formation of said rod-shaped projection is conducted by whisker crystal growth.
Claim 47
Dependent Claim
62 words
A method according to claim 46, further comprising a step of forming a pointed part as said predetermined part on said member prior to said placing step, wherein the formation of said rod-shaped projection is conducted by the whisker crystal growth in a state where the temperature of said pointed area is made different from that of other parts of said member.
Claim 48
Dependent Claim
48 words
A method according to claim 46, further comprising a step of covering said member with an aperture in said predetermined part, prior to said placing step, wherein the formation of said rod-shaped projection includes metal deposition in said aperture and whisker crystal growth in a predetermined gaseous atmosphere.
Claim 49
Dependent Claim
79 words
A method according to claim 48, wherein said covering step is conducted by coating a silicon monocrystalline substrate, serving as said member, with a resist material and forming an aperture in said resist material; said metal deposition is conducted by gold evaporation in said aperture; and said whisker crystal growth is conducted in a gaseous atmosphere containing SiCl₄; and further comprising a step of coating the whisker surface with a conductive film after the formation of said rod-shaped projection.
Claim 50
Independent Claim
115 words
An apparatus for information reading from an object and/or information input into an object, comprising: a signal processing unit for signal processing for information reading from said object and/or information input to said object; and a probe positioned opposed to said object; wherein said signal processing unit is adapted to effect information reading from said object and/or information input to said object through said probe in a state thereof positioned close to said object; said probe includes a supporting member, and a rod-shaped projection of which the end is positioned opposed to said object for information reading therefrom and/or information input thereto; and said rod-shaped projection protrudes from a partial area of said supporting member.
Claim 51
Dependent Claim
33 words
An apparatus according to claim 50, wherein said rod-shaped projection has a variation rate of the cross sectional area not exceeding 10 % continuously over a longitudinal length of at least 5 nm.
Claim 52
Dependent Claim
28 words
An apparatus according to claim 50, wherein said signal processing unit is adapted to measure surface information of the object based on the information read through said probe.
Claim 53
Dependent Claim
33 words
An apparatus according to claim 50, wherein said signal processing unit is adapted to effect information reading to and/or information reproduction from an information recording medium, serving as said object, through said probe.
Claim 54
Dependent Claim
36 words
An apparatus according to claim 53, wherein said signal processing unit is adapted to effect information recording by applying a voltage between said probe and said information recording medium thereby incuding an electric memory effect therein.
Claim 55
Dependent Claim
27 words
An apparatus according to claim 54, wherein said probe is adapted to effect the recording while moving along a recessed groove formed on said information recording medium.
Claim 56
Dependent Claim
35 words
An apparatus according to claim 53, wherein said signal processing unit is adapted to effect information reproduction by applying a voltage between said probe and said information recording medium and detecting the current flowing therebetween.
Claim 57
Dependent Claim
25 words
An apparatus according to claim 56, wherein said probe is adapted to read data recorded in a recessed groove formed on said information recording medium.
Claim 58
Dependent Claim
20 words
An apparatus according to claim 50, wherein said rod-shaped projection at least includes a part composed of a monocrystalline whisker.
Claim 59
Dependent Claim
15 words
An apparatus according to claim 58, wherein said monocrystalline whisker is composed of a metal.
Claim 60
Dependent Claim
23 words
An apparatus according to claim 58, wherein said monocrystalline whisker is composed of a non-conductive material, and is coated with a conductive material.
References Cited (Backward Citations)
No citation records indexed.
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