EP0435765A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method of fabricating a superconductive microwave component
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1990-12-24
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Granted: —
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Expires: 2010-12-24
Abstract
Abstract A microwave component includes a single dielectric layer, and one pair of conductor layers formed on opposite surfaces of the dielectric layer, respectively, one of the pair of conductor layers forming a ground conductor, and the other of the pair of conductor layers being shaped in a predetermined pattern. The pair of conductor layers are respectively formed of oxide superconductor material layers which are deposited on the opposite surfaces of the dielectric layer, respectively, and which have little defect.
Inventors
- 👤 Kenjiro C/O Cabinet Ballot-Schmit Higaki
- 👤 Saburo C/O Cabinet Ballot-Schmit Tanaka
- 👤 Hideo C/O Cabinet Ballot-Schmit Itozaki
- 👤 Shuji C/O Cabinet Balot-Schmit Yazu
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 04:01
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/20; H10N60/203; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0408
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
89 words
A microwave component including a dielectric layer, and at least one pair of conductor layers formed on opposite surfaces of said dielectric layer, respectively, one of said at least one pair of conductor layers forming a ground conductor, and the other of said at least one pair of conductor layers being shaped in a predetermined pattern, said at least one pair of conductor layers being respectively formed of oxide superconductor material layers which are deposited on said opposite surfaces of said dielectric layer, respectively, and which have little defect.
Claim 2
Dependent Claim
79 words
A microwave component claimed in Claim 1 wherein said dielectric layer is formed of a single dielectric substrate, and wherein said one of said at least one pair of conductor layers is formed to cover a whole surface of one of said opposite surfaces of said dielectric layer, and said other of said at least one pair of conductor layers is formed on the other of said opposite surfaces of said dielectric layer, and shaped in a determined pattern.
Claim 3
Dependent Claim
36 words
A microwave component claimed in Claim 1 wherein said other of said at least one pair of conductor layers is shaped in the form of a meandering pattern so that a microwave delay line is constituted.
Claim 4
Dependent Claim
60 words
A microwave component claimed in Claim 1 wherein said one of said at least one pair of conductor layers is formed to cover a whole surface of one of said opposite surfaces of said dielectric layer, and said other of said at least one pair of conductor layers is embedded within said dielectric layer, and shaped in a determined pattern.
Claim 5
Dependent Claim
48 words
A microwave component claimed in Claim 4 wherein said other of said at least one pair of conductor layers is shaped in the form of a straight line pattern having two broken points in the way of the straight line pattern so that a microwave resonator is constituted.
Claim 6
Dependent Claim
27 words
A microwave component claimed in Claim 1 wherein said dielectric layer is formed of a material from a group consisting of Al₂O₃, LaAlO₃, NdGaO₃, MgO and SiO₂.
Claim 7
Dependent Claim
36 words
A microwave component claimed in Claim 4 wherein said at least one pair of conductor layers are formed of the same compound oxide superconductor material and have a good superconduction characteristics substantially equally to each other.
Claim 8
Dependent Claim
35 words
A microwave component claimed in Claim 4 wherein said at least one pair of conductor layers are formed of different compound oxide superconductor materials and have a good superconductivity quality substantially comparable to each other.
Claim 9
Dependent Claim
149 words
A substrate for superconduction microwave component that includes one pair of oxide superconductor thin films respectively formed on opposite surfaces of a substrate forming said above mentioned dielectric layer, can be fabricated by using a deposition apparatus which includes a substrate holder for holding said substrate in such a manner that deposition surfaces of said substrate is positioned perpendicularly to a horizontal plane, a target holder for holding a target in such a manner that said target is positioned perpendicularly to said deposition surfaces of said substrate held by said substrate holder, and heating means located at a side position of said deposition surfaces of said substrate held by said substrate holder so as not to interrupt between said deposition surfaces of said substrate and said target held by said target holder, so that oxide superconductor thin films are simultaneously deposited on opposite deposition surfaces of said substrate, respectively.
Claim 10
Dependent Claim
26 words
A method claimed in Claim 9 wherein said at least one pair of conductor layers are deposited maintaining a substrate temperature at not greater than 800°C.
References Cited (Backward Citations)
No citation records indexed.
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