EP0435653A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Micropump
Assignee: Seiko Epson Corp
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Filing: 1990-12-24
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Granted: —
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Expires: 2010-12-24
Abstract
Abstract A micropump comprising a substrate (1) having an inlet port (11) and an outlet port (12); pump plate means (2) mounted on the substrate (1), portions of the pump plate means (2) forming an inlet valve (4) and an outlet valve (5) which respectively control flow through the inlet port (11) and the outlet port (12); a diaphragm (6) which forms at least part of a wall of a pump chamber (121) in the pump plate means (2), the pump plate means (2) having conduit means (111-120,122) for the flow of fluid from the inlet port (11) and via the pump chamber (121) to the outlet port (12); and drive means (7) for effecting pumping movement of the diaphragm (6) characterised in that the outlet valve (5) covers an inlet (12a) of the outlet port (12) so that, when the outlet valve (5) is closed, it caps the outlet port (12).
Inventors
- 👤 Hajime Miyazaki
- 👤 Masaaki Handa
- 👤 Taisuke Uehara
- 👤 Tsukasa Muranaka
- 👤 Shinichi Kamisuki
- 👤 Yasuto Nose
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-06 11:51
CPC Classifications
F; F04; F04B; F04B53/00; F04B53/10; F04B53/109; F04B53/1092; F04B43/00; F04B43/02; F04B43/04; F04B43/043; F04B43/046; B; B01; B01L; B01L2400/00; B01L2400/04; B01L2400/0475; B01L2400/0481; F04B43/12; F04B43/14; H; H10; H10N; H10N30/00; H10N30/80; H10N30/802
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
151 words
A micropump comprising a substrate (1) having an inlet port (11) and an outlet port (12); pump plate means (2) mounted on the substrate (1), portions of the pump plate means (2) forming an inlet valve (4) and an outlet valve (5) which respectively control flow through the inlet port (11) and the outlet port (12); a diaphragm (6) which forms at least part of a wall of a pump chamber (121) in the pump plate means (2), the pump plate means (2) having conduit means (111-120,122) for the flow of fluid from the inlet port (11) and via the pump chamber (121) to the outlet port (12); and drive means (7) for effecting pumping movement of the diaphragm (6) characterised in that the outlet valve (5) covers an inlet (12a) of the outlet port (12) so that, when the outlet valve (5) is closed, it caps the outlet port (12).
Claim 2
Dependent Claim
23 words
A micropump as claimed in claim 1 characterised in that the diaphragm (6) is an integral part of the pump plate means (2).
Claim 3
Dependent Claim
23 words
A micropump as claimed in claim 1 or 2 in which the pump plate means is constituted by a single plate member (2).
Claim 4
Dependent Claim
24 words
A micropump as claimed in any preceding claim characterised in that the drive means comprises a piezo-electric element (7) secured to the diaphragm (6).
Claim 5
Dependent Claim
27 words
A micropump as claimed in any preceding claim characterised in that the pump plate means (2) are sandwiched between the substrate (1) and a top plate (3).
Claim 6
Dependent Claim
32 words
A micropump as claimed in claim 5 when dependent upon any of claims 1, 3 or 4 characterised in that the diaphragm (6) is an integral part of the top plate (3).
Claim 7
Dependent Claim
33 words
A micropump as claimed in any preceding claim characterised in that the outlet valve (5) is provided with a detection member (7B) for detecting the position or behaviour of the outlet valve (5).
Claim 8
Dependent Claim
39 words
A micropump as claimed in any preceding claim characterised in that the inlet valve (4) covers an inlet (11a) of the inlet port (11) so that, when the inlet valve (4) is closed, it caps the inlet port (11).
Claim 9
Dependent Claim
51 words
A micropump as claimed in any preceding claim characterised in that the substrate comprises both a base plate (1) and a support plate (21) mounted on the base plate (1), the support plate (21) supporting the pump plate means (2) and being provided with transversely extending inlet and outlet ports (11,12).
Claim 10
Dependent Claim
50 words
A micropump as claimed in claim 1 or 2 characterised in that the pump plate means comprises first and second plates (2a,2b), the first plate (2a) being provided with the inlet valve (4) and the pump chamber (121), and the second plate (2b) being provided with the outlet valve (5).
Claim 11
Dependent Claim
34 words
A micropump as claimed in any preceding claim characterised in that the diaphragm (6) is provided adjacent its centre with a support member (81) or a support portion (83) engageable with the substrate (1).
Claim 12
Dependent Claim
33 words
A micropump as claimed in any preceding claim characterised in that detection means (100) are provided for detecting strain in the drive means (7) and/or for detecting mechanical displacement of the diaphragm (6).
Claim 13
Dependent Claim
43 words
A micropump as claimed in any preceding claim in which at least one of the valves (4,5) is provided with or engages a member (43,53;2W) for assisting the sealing of the valve (4,5) to the substrate (1) and/or for preventing undesired adherence therebetween.
Claim 14
Dependent Claim
92 words
A micropump comprising a substrate, a thin membrane plate joined to said substrate and having an inlet valve and an outlet valve opening and closing an inlet port and an outlet port formed in the substrate, a diaphragm forming a pump chamber, and a flow route system through which fluid flows, a surface plate joined to a top face of said thin membrane plate, and a drive means for driving said diaphragm, wherein said outlet valve is made of a valve body of a cap-shape covering an inlet of said outlet port.
References Cited (Backward Citations)
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