EP0434932A2
Expired / Lapsed
EP
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System for generating plasma
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1990-11-02
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Granted: —
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Expires: 2010-11-02
Abstract
Abstract Translated from German Die Erfindung betrifft eine Einrichtung für die Erzeugung eines Plasmas mittels zirkular polarisierter Hochfrequenzwellen. Diese Hochfrequenzwellen werden mittels Spannungen erzeugt, die eine Phasendrehung von 90° aufweisen. The invention relates to a device for generating a plasma by means of circularly polarized high-frequency waves. These high-frequency waves are generated by means of voltages that have a phase shift of 90 °.
Inventors
- 👤 Roland Dr. Gesche
- 👤 Karl-Heinz Dr. Kretschmer
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 03:49
CPC Classifications
H; H05; H05H; H05H1/00; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H01J37/32137; H01J37/32155; H01J37/32165
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