Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
109 words
In a microwave powered material/plasma processing system including a reaction chamber for holding a process workpiece and means for placing a requisite electrical bias on the workpiece, the improvement which comprises: a solid state microwave generator for providing power to said system mounted to directly introduce microwave power into said chamber via a direct radiating antenna, means for measuring the frequency, amplitude and power of the microwave radiation in the chamber, and means for altering said frequency, amplitude and power at a low power input to a solid state amplifier comprising a part of said generator to maximize the process efficiency and optimize processing conditions at the workpiece surface.
Claim 2
Dependent Claim
35 words
A microwave powered processing system as set forth in claim 1 wherein said solid state microwave generator comprises a separate low power oscillator and a separate high power amplifier capable of operating at microwave frequencies
Claim 3
Dependent Claim
43 words
A microwave powered plasma processing system as set forth in claim 2 wherein said solid state microwave generator comprises a single solid state oscillator driving a plurality of high power solid state microwave amplifiers which, in turn, power a single antenna in parallel.
Claim 4
Dependent Claim
46 words
A microwave powered processing system as set forth in any one of the preceding claims, wherein said antenna is physically attached to the solid state microwave generator substrate and is electrically connected to the generator output and protrudes through an aperture provided in the process chamber.
Claim 5
Dependent Claim
69 words
A microwave powered plasma processing system as set forth in any one of the preceding claims, wherein a plurality of microwave generators are distributed around said chamber to introduce microwave radiative energy into the chamber and means for controlling said generators to produce microwave power at the workpiece surface, which is a function of the square of the number of individual generators times the power of the individual generator.
Claim 6
Dependent Claim
53 words
A microwave powered plasma processing system as set forth in any one of the preceding claims, wherein said means for measuring comprises detector means adjacent to said radiating antenna for measuring the amplitude of a return signal and means for controlling the frequency characteristics of the solid state microwave oscillator in accordance therewith.
Claim 7
Dependent Claim
54 words
A microwave powered plasma processing systems as set forth in any one of the preceding claims, including a plurality of such solid state microwave generators operating at different frequencies connected to said process chamber and means for selectively energizing a particular generator to selectively energize a particlular workpiece or material in a particular chamber.
Claim 8
Dependent Claim
55 words
A microwave powered processing system as set forth in any one of the preceding claims, wherein said solid state oscillator includes control means to produce a desired output microwave frequency and means for selectively causing the oscillator to produce an particular output frequency uniquely adopted to the processing of a particular workpiece within the chamber.
Claim 9
Dependent Claim
60 words
A microwave powered plasma processing system as set forth in any one of the preceding claims, including means for monitoring the power produced by said solid state microwave generator and means responsive thereto for controlling the power output of the solid state oscillator by controlling the power term ("A") of the oscillator as defined by: P = A sin(t) .
Claim 10
Dependent Claim
55 words
A microwave powered plasma processing system as set forth in any one of the preceding claims, including means for monitoring the frequency of the output of the solid state microwave generator and means responsive thereto for controlling the frequency of the output of the solid state microwave oscillator which drives the solid state microwave amplifer.