EP0431951A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
An atmospheric plasma reaction method and a device therefor
Assignee: Japan Science and Technology Agency
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Filing: 1990-12-07
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Granted: —
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Expires: 2010-12-07
Abstract
Abstract This invention provides an atmospheric plasma reaction method characterized by introducing a mixed gas of rare gas and reactive gas into a reaction vessel having a dielectric-coated electrode (6) wherein the surface of two or more electrodes located parallel therewith are provided with solid dielectrics (5), exciting said mixed gas of gases with plasma at atmospheric pressure, then transporting the active species to the downstream of the plasma and treating the surface of a substrate (7). This invention also provides an atmospheric plasma reaction device.
Inventors
- 👤 Yasuhiro Horiike
- 👤 Satiko Okazaki
- 👤 Masuhiro Kogoma
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 07:18
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32018
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
73 words
An atmospheric plasma reaction method characterized by introducing a mixed gas of rare gas and reactive gas into a reaction vessel having a dielectric-coated electrode wherein the surface of two or more electrodes located parallel with each other are provided with a solid dielectrics, exciting said mixed gas of gases with plasma at atmospheric pressure, then transporting the active species to the downstream of the plasma and treating the surface of a substrate.
Claim 2
Dependent Claim
24 words
An atmospheric plasma reaction method as described in Claim 1 wherein the surface of the substrate is treated with reactive gas having halogen atoms.
Claim 3
Dependent Claim
81 words
An atmospheric plasma reaction device comprising a gas introducing means for introducing a mixed gas of rare gas and reactive gas into a reactive vessel, an atmospheric plasma generation unit wherein a dielectric-coated electrode where a solid dielectric is produced on the surfaces of two or more electrodes located parallel with each other is provided vertical to the substrate, and a surface-treatment unit for treating the surface of the substrate downstream of the plasma-generating region of the atmospheric plasma generation unit.
Claim 4
Dependent Claim
24 words
An atmospheric plasma reaction device as described in Claim 3 wherein an isolation vessel is provided to reduce the pressure to 1/10 atmospheric pressure.
References Cited (Backward Citations)
No citation records indexed.
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