EP0424857A2
Expired / Lapsed
EP
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Process for producing ohmic electrode for p-type cubic system boron nitride
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1990-10-22
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Granted: —
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Expires: 2010-10-22
Abstract
Abstract A process for producing an ohmic electrode for p-type cBN is disclosed, which process comprises the steps of: providing a thin alloy film composed of Au and Be, the weight ratio of Be being from 0.1 to 15% by weight, on p-type cBN; providing a thin film of a metal selected from Ni, Cr, Mo, and Pt on the thin alloy film; and subjecting the p-type cBN having the films thus provided to a heat-treatment in an inert gas or in vacuo at a temperature of from 350 DEG C to 600 DEG C.
Inventors
- 👤 Katsuhito C/O Itami Works Sumitomo Yoshida
- 👤 Kazuwo C/O Itami Works Sumitomo Tsuji
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 01:16
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0116; H10D62/00; H10D62/80; H10D62/85; H10D64/60; H10D64/62; Y; Y10; Y10S; Y10S148/00; Y10S148/113; Y10S438/00; Y10S438/932
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
87 words
A process for producing an ohmic electrode for p-type cBN, which comprises the steps of: providing a thin alloy film composed of Au and Be, the weight ratio of Be being from 0.1 to 15% by weight, on p-type cBN; providing a thin film of a metal selected from Ni, Cr, Mo, and Pt on said thin alloy film; and subjecting said p-type cBN having said films thus provided to a heat-treatment in an inert gas or in vacuo at a temperature of from 350°C to 600°C.
Claim 2
Dependent Claim
87 words
A process for producing an ohmic electrode for p-type cBN, which comprises the steps of: providing a thin alloy film composed of Au and Be, the weight ratio of Be being from 0.1 to 15% by weight, on p-type cBN; providing a thin film of a metal selected from Ni, Cr, Mo, and Pt on said thin alloy film; and subjecting said p-type cBN having said films thus provided to a heat-treatment in an inert gas or in vacuo at a temperature of from 350°C to 600°C.
Claim 3
Dependent Claim
28 words
A process as claimed in claim 1, wherein the provision of said thin alloy film and said thin metal film is carried out by a vacuum vapor deposition.
Claim 4
Dependent Claim
20 words
A process as claimed in claim 1, wherein said heat-treatment is conducted at a temperature of from 400 to 550°C.
Claim 5
Dependent Claim
20 words
A process as claimed in claim 3, wherein said heat-treatment is conducted at a temperature of from 450 to 500°C.
Claim 6
Dependent Claim
30 words
A process as claimed in claim 1, wherein the thickness of said thin film of a metal selected from Ni, Cr, Mo, and Pt is from 200 to 2,000 Å.
Claim 7
Dependent Claim
30 words
A process as claimed in claim 5, wherein the thickness of said thin film of a metal selected from Ni, Cr, Mo, and Pt is from 200 to 1,000 Å.
Claim 8
Dependent Claim
30 words
A process as claimed in claim 6, wherein the thickness of said thin film of a metal selected from Ni, Cr, Mo, and Pt is from 300 to 800 Å.
Claim 9
Dependent Claim
27 words
A process as claimed in claim 1, wherein the thickness of said thin alloy film composed of Au and Be is from 1,000 Å to 1 µm.
Claim 10
Dependent Claim
26 words
A process as claimed in claim 8, wherein the thickness of said thin alloy film composed of Au and Be is from 1,000 to 5,000 Å.
Claim 11
Dependent Claim
26 words
A process as claimed in claim 9, wherein the thickness of said thin alloy film composed of Au and Be is from 1,000 to 3,000 Å.
Claim 12
Dependent Claim
30 words
A process as claimed in claim 1, wherein the weight ratio of Be in said thin alloy film composed of Au and Be is from 0.5 to 10% by weight.
Claim 13
Dependent Claim
30 words
A process as claimed in claim 11, wherein the weight ratio of Be in said thin alloy film composed of Au and Be is from 0.5 to 5% by weight.
Claim 14
Dependent Claim
20 words
A process as claimed in claim 1, wherein said thin film of a metal is selected from Ni and Cr.
Claim 15
Dependent Claim
16 words
A process as claimed in claim 13, wherein said thin film of a metal is Ni.
References Cited (Backward Citations)
No citation records indexed.
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