EP0421354A2
Expired / Lapsed
EP
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Scanning tunneling microscope
Assignee: Olympus Corp
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Filing: 1990-10-02
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Granted: —
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Expires: 2010-10-02
Abstract
Abstract A scanning tunneling microscope according to the present invention includes an observation optical system (2) for optically observing the surface of the object. The optical system (2) is fixed on an optical system fixing member (44). The optical system (2) is moved in a direction (Z-direction) vertical to the surface of the object (34) by means of a motor (46), whereby the focal point of the optical system is adjusted. An STM measurement probe (78) supported by an optically transparent member is disposed between the optical system (2) and the object (34). When the object (34) is optically observed, the probe (78) is displaced from the focal point by means of a micrometer (56). Thus, an optical observation image of the surface of the object (34), which is not affected by the shadow of the probe (78), can be obtained. When the STM measurement is carried out, a probe unit (68) enables the probe (78) to scan the surface of the object (34), and an STM image is obtained by a conventional method.
Inventors
- 👤 Hirofumi Miyamoto
- 👤 Tsugiko Takase
- 👤 Takao Okada
- 👤 Shuzo Mishima
- 👤 Hiroko Ohta
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 14:32
CPC Classifications
G; G01; G01Q; G01Q70/00; G01Q70/02; B; B82; B82Y; B82Y35/00; G01Q10/00; G01Q10/02; G01Q30/00; G01Q30/02; G01Q30/025; G01Q60/00; G01Q60/10; G01Q60/16; B82Y20/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/868; Y10S977/869
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
130 words
A scanning tunneling microscope for observing the surface of an object, characterized by comprising: an optical system (55), including an objective lens (86), for optically observing the surface of the object (34); first rough movement means (44, 46, 47) for supporting the objective lens (86) and moving the objective lens (86) along the optical axis of the optical system (55); a probe unit (68) having a probe (78) for detecting a tunnel current, an optically transparent member (76) for supporting the probe (78) along the optical axis, and a piezoelectric driving body (74) for causing the probe (78) to scan the surface of the object (34); and second rough movement means (54, 56, 56B) for supporting the probe unit (68) and moving the probe unit (68) along the optical axis.
Claim 2
Dependent Claim
130 words
A scanning tunneling microscope for observing the surface of an object, characterized by comprising: an optical system (55), including an objective lens (86), for optically observing the surface of the object (34); first rough movement means (44, 46, 47) for supporting the objective lens (86) and moving the objective lens (86) along the optical axis of the optical system (55); a probe unit (68) having a probe (78) for detecting a tunnel current, an optically transparent member (76) for supporting the probe (78) along the optical axis, and a piezoelectric driving body (74) for causing the probe (78) to scan the surface of the object (34); and second rough movement means (54, 56, 56B) for supporting the probe unit (68) and moving the probe unit (68) along the optical axis.
Claim 3
Dependent Claim
111 words
The microscope according to claim 1, characterized in that said first rough movement means (44, 46, 47) includes an optical system fixing member (44) being movable along the optical system and supporting the optical system, and a motor (46) for moving the optical system fixing member (44), and said second rough movement means (54, 56, 56B) includes a probe unit support member (54) for supporting the probe unit (68), said probe unit (68) support member being supported on the optical system fixing member (44) so as to be movable along the optical axis of the optical system (55), and a micrometer (56, 56B) for moving the probe unit support member (54).
Claim 4
Dependent Claim
19 words
The microscope according to claim 2, characterized in that said micrometer (56B) includes a motor for driving the micrometer.
Claim 5
Dependent Claim
48 words
The microscope according to claim 1, 2 or 3 characterized in that said piezoelectric driving body (74) is a cylindrical piezoelectric actuator including a tube-shaped piezoelectric element, a common electrode (94B) provided within the piezoelectric element, and a plurality of driving electrodes (94A) provided outside the piezoelectric element.
Claim 6
Dependent Claim
56 words
The microscope according to claim 4, characterized in that the transparent member (99) for supporting the probe (78) is removably attached to the end portion of the cylindrical piezoelectric actuator (74), and said microscope further comprises an isolated electrode (97) kept at a ground potential and provided between the driving electrodes (94A) and the probe (78).
Claim 7
Dependent Claim
75 words
A scanning tunneling microscope for observing the surface of an object, characterized by comprising: an insulative object stage (32) for mounting an object (34) thereon; an electrically conductive hold member (36) for pushing and holding the object (34) on the object stage (32); and an electrically conductive connection member (38) for fixing the hold member (36) at a predetermined location, said connection member (38) being electrically connected to means (30) for detecting a tunnel current.
Claim 8
Dependent Claim
75 words
A scanning tunneling microscope for observing the surface of an object, characterized by comprising: an insulative object stage (32) for mounting an object (34) thereon; an electrically conductive hold member (36) for pushing and holding the object (34) on the object stage (32); and an electrically conductive connection member (38) for fixing the hold member (36) at a predetermined location, said connection member (38) being electrically connected to means (30) for detecting a tunnel current.
Claim 9
Dependent Claim
68 words
The microscope according to claim 6, characterized by further comprising: an XY-stage (16, 20); and an electrically conductive object table (28) placed on the XY-stage (16, 20), said connection member (38) being attached to the object table (28) with an insulator (40) interposed therebetween, said object stage (32) being placed on the object table (28), and said object table (28) containing means (30) for detecting a tunnel current.
Claim 10
Dependent Claim
228 words
A scanning tunneling microscopy for observing the surface of an object using a scanning tunneling microscope comprising: an optical system (55), including an objective lens (86), for optically observing the surface of the object (34); first rough movement means (44, 46, 47) for supporting the objective lens (86) and moving the objecting lens (86) along the optical axis of the optical system (55); a probe unit (68) having a probe (78) for detecting a tunnel current, an optically transparent member (76) for supporting the probe (78) along the optical axis, and a piezoelectric driving body (74) for causing the probe to scan the surface of the object (34); and second rough movement means (54, 56, 56B) for supporting the probe unit (68) and moving the probe unit (68) along the optical axis, said microscopy characterized by comprising the steps of: situating a tip portion of the probe (78) at an optical microscopic focal point; approaching the probe (78) and the objective lens (86) together to the object (34), while monitoring a tunnel current detected by the probe (78); stopping the movement of the probe (78) and the objective lens (86), when the tunnel current is detected; retreating the probe (78) from the optical microscopic focal point along the optical axis by a predetermined distance; and identifying an observation area on the object (34) by said optical system (55).
Claim 11
Dependent Claim
228 words
A scanning tunneling microscopy for observing the surface of an object using a scanning tunneling microscope comprising: an optical system (55), including an objective lens (86), for optically observing the surface of the object (34); first rough movement means (44, 46, 47) for supporting the objective lens (86) and moving the objecting lens (86) along the optical axis of the optical system (55); a probe unit (68) having a probe (78) for detecting a tunnel current, an optically transparent member (76) for supporting the probe (78) along the optical axis, and a piezoelectric driving body (74) for causing the probe to scan the surface of the object (34); and second rough movement means (54, 56, 56B) for supporting the probe unit (68) and moving the probe unit (68) along the optical axis, said microscopy characterized by comprising the steps of: situating a tip portion of the probe (78) at an optical microscopic focal point; approaching the probe (78) and the objective lens (86) together to the object (34), while monitoring a tunnel current detected by the probe (78); stopping the movement of the probe (78) and the objective lens (86), when the tunnel current is detected; retreating the probe (78) from the optical microscopic focal point along the optical axis by a predetermined distance; and identifying an observation area on the object (34) by said optical system (55).
References Cited (Backward Citations)
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