EP0419939A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Apparatus for vaporizing and supplying organometal compounds
Assignee: Shin-Etsu Chemical Co Ltd
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Filing: 1990-09-11
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Granted: —
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Expires: 2010-09-11
Abstract
Abstract An apparatus for vaporizing and supplying an organometal compound comprising a gas flow path for starting gas which connects a container filled with the organometal compound to a crystal growth chamber heated under reduced pressure through a main valve, a massflow controller for the starting gas and a valve for supplying the starting gas; and a flow path for a carrier gas which connects a carrier gas source to the discharge outlet of the valve for supplying the starting gas through a massflow controller for carrier gas and a heat exchanger. The container, the flow path for the starting gas and the flow path for the carrier gas are arranged in a constant tenperature oven. Employing the apparatus, the starting gas for an epitaxial film can constantly supply to a substrate.
Inventors
- 👤 Hiroshi C/O Stec Inc. Mihira
- 👤 Tetsuo C/O Stec Inc. Shimizu
- 👤 Kazuhiro C/O Shin-Etsu Chemical Co. Ltd Hirahara
- 👤 Toshinobu c/o Shin-Etsu Chemical Co.Ltd Ishihara
- 👤 Seiki C/O Shin-Etsu Chemical Co. Ltd. Takaya
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 08:20
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45561; C23C16/448; C23C16/4481; C30; C30B; C30B25/00; C30B25/02; C30B25/14
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
119 words
An apparatus for vaporizing and supplying an organometal compound comprising a gas flow path for starting gas of an organometal compound which connects a container filled with the organometal compound to a crystal growth chamber heated under reduced pressure through a main valve, a massflow controller for the starting gas and a valve for supplying the starting gas; and a flow path for a carrier gas which connects a carrier gas source to the discharge outlet of the valve for supplying the starting gas through a massflow controller for carrier gas and a heat exchanger; the container, the flow path for the starting gas and the flow path for the carrier gas are arranged in a constant temperature oven.
Claim 2
Independent Claim
119 words
An apparatus for vaporizing and supplying an organometal compound comprising a gas flow path for starting gas of an organometal compound which connects a container filled with the organometal compound to a crystal growth chamber heated under reduced pressure through a main valve, a massflow controller for the starting gas and a valve for supplying the starting gas; and a flow path for a carrier gas which connects a carrier gas source to the discharge outlet of the valve for supplying the starting gas through a massflow controller for carrier gas and a heat exchanger; the container, the flow path for the starting gas and the flow path for the carrier gas are arranged in a constant temperature oven.
Claim 3
Dependent Claim
63 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 1 wherein the the valve for supplying the starting gas and a carrier gas supply valve in the flow path for the carrier gas are integrated into a block valve and the block valve is directly connected to the discharge outlet of the massflow controller for the organometal compound.
Claim 4
Dependent Claim
25 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 1 wherein the heat exchanger is provided with a heating means.
Claim 5
Independent Claim
137 words
An apparatus for vaporizing and supplying an organometal compound comprising a plurality of flow paths for starting gas of an organometal compound which are branched from a container filled with the organometal compound through a main valve, each of which connects the container to a crystal growth chamber heated under reduced pressure through a massflow controller for the starting gas and a valve for supplying the starting gas; and a plurality flow paths for a carrier gas each of which connects a carrier gas source to the discharge outlet of the valve for supplying the starting gas through a massflow controller for carrier gas, a heat exchanger and a valve for carrier gas; the container, the flow paths for the starting gas and the flow paths for the carrier gas are arranged in a constant temperature oven.
Claim 6
Independent Claim
137 words
An apparatus for vaporizing and supplying an organometal compound comprising a plurality of flow paths for starting gas of an organometal compound which are branched from a container filled with the organometal compound through a main valve, each of which connects the container to a crystal growth chamber heated under reduced pressure through a massflow controller for the starting gas and a valve for supplying the starting gas; and a plurality flow paths for a carrier gas each of which connects a carrier gas source to the discharge outlet of the valve for supplying the starting gas through a massflow controller for carrier gas, a heat exchanger and a valve for carrier gas; the container, the flow paths for the starting gas and the flow paths for the carrier gas are arranged in a constant temperature oven.
Claim 7
Dependent Claim
55 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 4 wherein the valve for supplying the starting gas and the valve for the carrier gas are integrated into a block valve and the block valve is directly connected to the discharge outlet of the massflow controller for the organometal compound.
Claim 8
Dependent Claim
24 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 4 wherein the container is provided with a heating means.
Claim 9
Dependent Claim
32 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 4 wherein the container is provided with a temperature sensor for detecting the internal temperature of the container.
Claim 10
Dependent Claim
60 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 4 wherein at least one heat exchanger is placed between the carrier gas source and the massflow controller in the flow paths for carrier gas, between the massflow controller and a distributor in the flow paths for carrier gas and/or between the distributor and the valve.
Claim 11
Dependent Claim
55 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 8 wherein the valve for supplying the starting gas and the valve for the carrier gas are integrated into a block valve and the block valve is directly connected to the discharge outlet of the massflow controller for the organometal compound.
Claim 12
Dependent Claim
24 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 8 wherein the container is provided with a heating means.
Claim 13
Dependent Claim
32 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 8 wherein the container is provided with a temperature sensor for detecting the internal temperature of the container.
Claim 14
Independent Claim
152 words
An apparatus for vaporizing and supplying an organometal compound comprising a plurality of flow paths for starting gas of an organometal compound each of which connects one of a plurality of containers filled with the organometal compound to a crystal growth chamber heated under reduced pressure through a main valve, a massflow controller for the starting gas and a valve for supplying the starting gas; and a plurality flow paths for a carrier gas each of which connects a carrier gas source to the discharge outlet of the valve for supplying the starting gas through a massflow controller for carrier gas, a heat exchanger and a valve for carrier gas; each of the plurality of the containers is filled with a different organometal compound, and the whole of the containers, the flow paths for the starting gas and the flow paths for the carrier gas are arranged in a constant temperature oven.
Claim 15
Independent Claim
152 words
An apparatus for vaporizing and supplying an organometal compound comprising a plurality of flow paths for starting gas of an organometal compound each of which connects one of a plurality of containers filled with the organometal compound to a crystal growth chamber heated under reduced pressure through a main valve, a massflow controller for the starting gas and a valve for supplying the starting gas; and a plurality flow paths for a carrier gas each of which connects a carrier gas source to the discharge outlet of the valve for supplying the starting gas through a massflow controller for carrier gas, a heat exchanger and a valve for carrier gas; each of the plurality of the containers is filled with a different organometal compound, and the whole of the containers, the flow paths for the starting gas and the flow paths for the carrier gas are arranged in a constant temperature oven.
Claim 16
Dependent Claim
55 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 12 wherein the valve for supplying the starting gas and the valve for the carrier gas are integrated into a block valve and the block valve is directly connected to the discharge outlet of the massflow controller for the organometal compound.
Claim 17
Dependent Claim
24 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 12 wherein the container is provided with a heating means.
Claim 18
Dependent Claim
32 words
The apparatus for vaporizing and supplying an organometal compound as set forth in claim 12 wherein the container is provided with a temperature sensor for detecting the internal temperature of the container.
References Cited (Backward Citations)
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