EP0419836A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
3-D integrated circuit assembly employing discrete chips
Assignee: Raytheon Co
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Filing: 1990-08-20
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Granted: —
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Expires: 2010-08-20
Abstract
Abstract A 3-D IC chip assembly is formed from stacked substrates in which each individual substrate has a plurality of different IC chips retained in respective recesses. Conductive feedthroughs (32) extend through the substrate from the side where the chips (30) are located to the opposite side, with the chips electrically connected to the feedthroughs. An electrical routing network (76,78) on the opposite side of the substrate from the chips provides desired interconnections between the chips by connecting to the feedthroughs. The routing can be formed by standard photolithographic techniques.
Inventors
- 👤 Michael J. Little
- 👤 Jan Grinberg
- 👤 Hugh L. Garvin
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 16:32
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/611; H10W70/099; H10W90/00; H10W90/401; H10W70/67; H10W70/68; H10W70/682; H10W72/00; H10W72/851; H10W72/874
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
88 words
An integrated circuit (IC) assembly, comprising: a substrate having first and second opposed surfaces, and a plurality of recesses extending into the substrate from the first surface, a plurality of IC chips retained in respective recesses in the substrate, a plurality of conductive feedthroughs extending through the substrate between said first and second surfaces, and connector means electrically connecting said IC chips to said feedthroughs along the first surface side of the substrate, said feedthroughs providing electrical paths between said chips and the opposite side of the substrate.
Claim 2
Dependent Claim
88 words
An integrated circuit (IC) assembly, comprising: a substrate having first and second opposed surfaces, and a plurality of recesses extending into the substrate from the first surface, a plurality of IC chips retained in respective recesses in the substrate, a plurality of conductive feedthroughs extending through the substrate between said first and second surfaces, and connector means electrically connecting said IC chips to said feedthroughs along the first surface side of the substrate, said feedthroughs providing electrical paths between said chips and the opposite side of the substrate.
Claim 3
Dependent Claim
21 words
The IC assembly of claim 1, further comprising a network of conductive connections interconnecting said feedthroughs adjacent said second substrate surface.
Claim 4
Dependent Claim
18 words
The IC assembly of claim 2, said network comprising a series of alternating conductive and non-conductive network layers.
Claim 5
Dependent Claim
22 words
The IC assembly of claim 3, wherein said conductive network layers are photolithographically patterned to establish desired interconnections between said IC chips.
Claim 6
Dependent Claim
50 words
The IC assembly of claim 2, further comprising respective thin film capacitors in at least some of said recesses electrically connecting on one side to the IC chips in said recesses, and conductive feedthroughs extending through the substrate and electrically connecting the other sides of said capacitors to said network.
Claim 7
Dependent Claim
23 words
The IC assembly of claim 1, wherein said substrate is formed from a material that is generally thermally matched with said IC chips.
Claim 8
Dependent Claim
32 words
The IC assembly of claim 6, wherein said IC chips are formed from silicon, and said substrate is formed from a material selected from the group consisting of silicon and aluminum nitride.
Claim 9
Dependent Claim
85 words
An integrated circuit (IC) carrier, comprising: a substrate having first and second opposed surfaces, and a plurality of recesses adapted to receive respective IC chips extending into the substrate from the first surface, and a plurality of electrically conductive feedthroughs extending through the substrate between said first and second surfaces, said feedthroughs being disposed to receive connectors from ICs in said recesses from the first surface side of said substrate, and to transmit electrical signals from said ICs to the opposite side of said substrate.
Claim 10
Dependent Claim
85 words
An integrated circuit (IC) carrier, comprising: a substrate having first and second opposed surfaces, and a plurality of recesses adapted to receive respective IC chips extending into the substrate from the first surface, and a plurality of electrically conductive feedthroughs extending through the substrate between said first and second surfaces, said feedthroughs being disposed to receive connectors from ICs in said recesses from the first surface side of said substrate, and to transmit electrical signals from said ICs to the opposite side of said substrate.
Claim 11
Dependent Claim
21 words
The IC carrier of claim 8, further comprising a network of conductive connections interconnecting said feedthroughs adjacent said second substrate surface.
Claim 12
Dependent Claim
18 words
The IC assembly of claim 9, said network comprising a series of alternating conductive and non-conductive network layers.
Claim 13
Dependent Claim
22 words
The IC assembly of claim 10, wherein said conductive network layers are photolithographically patterned to establish desired interconnections between said IC chips.
Claim 14
Dependent Claim
89 words
An integrated circuit (IC) assembly, comprising: a substrate having first and second opposed surfaces, an IC network disposed generally along the first substrate surface, a plurality of electrically conductive feedthroughs extending through the substrate between said first and second surfaces, connector means electrically connecting selected locations in said IC network to said feedthroughs from the first surface side thereof, said feedthroughs providing electrical paths between said IC network and the opposite side of the substrate, and a network of conductive connectors between said feedthroughs adjacent said second substrate surface.
Claim 15
Dependent Claim
89 words
An integrated circuit (IC) assembly, comprising: a substrate having first and second opposed surfaces, an IC network disposed generally along the first substrate surface, a plurality of electrically conductive feedthroughs extending through the substrate between said first and second surfaces, connector means electrically connecting selected locations in said IC network to said feedthroughs from the first surface side thereof, said feedthroughs providing electrical paths between said IC network and the opposite side of the substrate, and a network of conductive connectors between said feedthroughs adjacent said second substrate surface.
Claim 16
Dependent Claim
21 words
The IC assembly of claim 12, said network of conductive connectors comprising a series of alternating conductive and non-conductive network layers.
Claim 17
Dependent Claim
22 words
The IC assembly of claim 13, wherein said conductive network layers are photolithographically patterned to establish desired interconnections within said IC network.
Claim 18
Dependent Claim
48 words
An integrated circuit (IC) assembly, comprising: a substrate having a plurality of recesses extending in from one surface thereof, and a plurality of IC chips retained in respective recesses in said substrate, said substrate being formed from a material that is generally thermally matched with said IC chips.
Claim 19
Dependent Claim
48 words
An integrated circuit (IC) assembly, comprising: a substrate having a plurality of recesses extending in from one surface thereof, and a plurality of IC chips retained in respective recesses in said substrate, said substrate being formed from a material that is generally thermally matched with said IC chips.
Claim 20
Dependent Claim
32 words
The IC assembly of claim 15, wherein said IC chips are formed from silicon, and said substrate is formed from a material selected from the group consisting of silicon and aluminum nitride.
Claim 21
Dependent Claim
154 words
A 3-D integrated circuit (IC) assembly, comprising: a plurality of stacked IC layers, each layer comprising: a substrate having first and second opposed surfaces, and a plurality of recesses extending into the substrate from the first surface, a plurality of IC chips retained in respective recesses in the substrate, a plurality of conductive feedthroughs extending through the substrate between said first and second surfaces, connector means electrically connecting said IC chips to said feedthroughs along the first surface side of the substrate, said feedthroughs providing electrical paths between said chips and the opposite side of the substrate, and a network of conductive connections interconnecting said feedthroughs adjacent said second substrate surface, means retaining said layers in a stack with their substrates mutually aligned and spaced apart from each other, and interlayer connector means electrically connecting selected locations on the IC chips with selected facing locations on the conductive interconnection network of the adjacent layer.
Claim 22
Dependent Claim
154 words
A 3-D integrated circuit (IC) assembly, comprising: a plurality of stacked IC layers, each layer comprising: a substrate having first and second opposed surfaces, and a plurality of recesses extending into the substrate from the first surface, a plurality of IC chips retained in respective recesses in the substrate, a plurality of conductive feedthroughs extending through the substrate between said first and second surfaces, connector means electrically connecting said IC chips to said feedthroughs along the first surface side of the substrate, said feedthroughs providing electrical paths between said chips and the opposite side of the substrate, and a network of conductive connections interconnecting said feedthroughs adjacent said second substrate surface, means retaining said layers in a stack with their substrates mutually aligned and spaced apart from each other, and interlayer connector means electrically connecting selected locations on the IC chips with selected facing locations on the conductive interconnection network of the adjacent layer.
Claim 23
Dependent Claim
36 words
The 3-D assembly of claim 17, said interlayer connector means comprising bridge springs on the IC chip sides of the substrates bearing against opposed bridge springs on the facing conductive interconnection network of the adjacent layer.
Claim 24
Dependent Claim
23 words
The 3-D IC assembly of claim 17, the network for each IC layer comprising a series of alternating conductive and non-conductive network layers.
Claim 25
Dependent Claim
23 words
The 3-D IC assembly of claim 19, wherein said conductive network layers are photolithographically patterned to establish desired interconnections between said IC chips.
Claim 26
Dependent Claim
25 words
The 3-D IC assembly of claim 17, wherein said substrates are formed from a material that is generally thermally matched with their respective IC chips.
Claim 27
Dependent Claim
32 words
The 3-D IC assembly of claim 21, wherein said IC chips are formed from silicon, said substrates are formed from a material selected from the group consisting of silicon and aluminum nitride.
Claim 28
Dependent Claim
143 words
A 3-D integrated circuit (IC) assembly, comprising: a plurality of stacked IC layers, each layer comprising: a substrate having first and second opposed surfaces, an IC network disposed generally along the first substrate surface, a plurality of electrically conductive feedthroughs extending through the substrate between said first and second surfaces, connector means electrically connecting selected locations in said IC network to said feedthroughs from the first surface side thereof, said feedthroughs pro viding electrical paths between said IC network and the opposite side of the substrate, and a network of conductive connectors between said feedthroughs adjacent said second substrate surface, means retaining said layers in a stack with their substrates mutually aligned and spaced apart from each other, and interlayer connector means electrically connecting selected locations on the IC chips with selected facing locations on the conductive interconnection network of the adjacent layer.
Claim 29
Dependent Claim
143 words
A 3-D integrated circuit (IC) assembly, comprising: a plurality of stacked IC layers, each layer comprising: a substrate having first and second opposed surfaces, an IC network disposed generally along the first substrate surface, a plurality of electrically conductive feedthroughs extending through the substrate between said first and second surfaces, connector means electrically connecting selected locations in said IC network to said feedthroughs from the first surface side thereof, said feedthroughs pro viding electrical paths between said IC network and the opposite side of the substrate, and a network of conductive connectors between said feedthroughs adjacent said second substrate surface, means retaining said layers in a stack with their substrates mutually aligned and spaced apart from each other, and interlayer connector means electrically connecting selected locations on the IC chips with selected facing locations on the conductive interconnection network of the adjacent layer.
Claim 30
Dependent Claim
35 words
The 3-D assembly of claim 23, said interlayer connector means comprising bridge springs on the IC chip sides of the substrates bearing against bridge springs on the facing conductive interconnection network of the adjacent layer.
Claim 31
Dependent Claim
23 words
The 3-D IC assembly of claim 23, the network for each IC layer comprising a series of alternating conductive and non-conductive network layers.
Claim 32
Dependent Claim
22 words
The IC assembly of claim 25, wherein said conductive network layers are photolithographically patterned to establish desired interconnections between said IC chips.
References Cited (Backward Citations)
No citation records indexed.
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