EP0418928A2
Expired / Lapsed
EP
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Scanning microscope and scanning mechanism for the same
Assignee: Fujifilm Holdings Corp
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Filing: 1990-09-21
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Granted: —
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Expires: 2010-09-21
Abstract
Abstract A confocal scanning microscope comprises a sample supporting member on which a sample is supported, and a light source which produces a light beam. A light projecting device forms an image of the light beam as a small light spot on the sample. A light receiving device condenses the light beam, which has been radiated out of the sample, and forms an image of the condensed light beam as point image. A photodetector detects the point image. A movable member supports the light projecting device and the light receiving device. A main scanning device reciprocally moves the movable member such that the light spot scans the sample in main scanning directions. A sub-scanning device moves the sample supporting member with respect to the movable member in sub-scanning directions, which are normal to the main scanning directions, and at a speed lower than the speed at which the light spot scans the sample in the main scanning directions, whereby the sample is scanned with the light spot in the sub-scanning directions.
Inventors
- 👤 Osamu Iwasaki
- 👤 Koji Yoshida
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 07:28
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/0004; G02B21/002; G02B21/0024; G02B21/0032; G02B21/0036
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
193 words
A confocal scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said sample, iv) a light receiving optical means with which the light beam radiated out of solid sample is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a movable member which supports said light projecting optical means and said light receiving optical means together, viii) a main scanning means which reciprocally moves said movable member such that said light spot scans said sample in main scanning directions, and viii) a sub-scanning means which moves said sample supporting member with respect to said movable member in sub-scanning directions, which are approximately normal to said main scanning directions, and at a speed lower than the speed at which said light spot scans said sample in said main scanning directions, whereby said sample is scanned with said light spot in said sub-scanning directions.
Claim 2
Dependent Claim
193 words
A confocal scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said sample, iv) a light receiving optical means with which the light beam radiated out of solid sample is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a movable member which supports said light projecting optical means and said light receiving optical means together, viii) a main scanning means which reciprocally moves said movable member such that said light spot scans said sample in main scanning directions, and viii) a sub-scanning means which moves said sample supporting member with respect to said movable member in sub-scanning directions, which are approximately normal to said main scanning directions, and at a speed lower than the speed at which said light spot scans said sample in said main scanning directions, whereby said sample is scanned with said light spot in said sub-scanning directions.
Claim 3
Dependent Claim
21 words
A confocal scanning microscope as defined in Claim 1 wherein said movable member also supports said light source and said photodetector.
Claim 4
Dependent Claim
35 words
A confocal scanning microscope as defined in Claims 1 or 2 wherein said confocal scanning microscope is of a reflection type, and said light projecting optical means also serves as said light receiving optical means.
Claim 5
Dependent Claim
41 words
A confocal scanning microscope as defined in at least one of claims 1 to 3 wherein a means is provided which reciprocally moves said sample supporting member in directions, which are normal to said main scanning directions and said sub-scanning directions.
Claim 6
Dependent Claim
22 words
A confocal scanning microscope as defined in at least one of claims 1 to 4 wherein said light source is a laser.
Claim 7
Dependent Claim
229 words
A confocal scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said sample, iv) a light receiving optical means with which the light beam radiated out of said sample is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a scanning means which moves said light projecting optical means and said light receiving optical means in synchronization with each other with respect to said sample supporting member such that said light spot scans said sample in main scanning directions and sub-scanning directions, and vii) an optical fiber having a first edge surface, on which an image of the light beam coming from said light receiving optical means is formed, and a second edge surface from which the light beam, which has entered said optical fiber from said first edge surface, is radiated to said photodetector, wherein a pinhole is formed in a core part at said first edge surface of said optical fiber, and the image of the light beam coming from said light receiving optical means is formed at the position at which said pinhole is formed.
Claim 8
Dependent Claim
229 words
A confocal scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said sample, iv) a light receiving optical means with which the light beam radiated out of said sample is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a scanning means which moves said light projecting optical means and said light receiving optical means in synchronization with each other with respect to said sample supporting member such that said light spot scans said sample in main scanning directions and sub-scanning directions, and vii) an optical fiber having a first edge surface, on which an image of the light beam coming from said light receiving optical means is formed, and a second edge surface from which the light beam, which has entered said optical fiber from said first edge surface, is radiated to said photodetector, wherein a pinhole is formed in a core part at said first edge surface of said optical fiber, and the image of the light beam coming from said light receiving optical means is formed at the position at which said pinhole is formed.
Claim 9
Dependent Claim
35 words
A confocal scanning microscope as defined in Claim 6 wherein a means is provided which reciprocally moves said sample supporting member in directions, which are normal to said main scanning directions and said sub-scanning directions.
Claim 10
Dependent Claim
18 words
A confocal scanning microscope as defined in Claims 6 or 7 wherein said light source is a laser.
Claim 11
Dependent Claim
91 words
A scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) an optical means which irradiates a light beam to said sample, and iii) a scanning means which moves said optical means with respect to said sample supporting member such that said light beam scans said sample, wherein the improvement comprises the provision of a mechanism for keeping a member, which is moved during said scanning, and a guide member, which supports and guides said member, such that they are not in contact with each other.
Claim 12
Dependent Claim
91 words
A scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) an optical means which irradiates a light beam to said sample, and iii) a scanning means which moves said optical means with respect to said sample supporting member such that said light beam scans said sample, wherein the improvement comprises the provision of a mechanism for keeping a member, which is moved during said scanning, and a guide member, which supports and guides said member, such that they are not in contact with each other.
Claim 13
Dependent Claim
43 words
A scanning microscope as defined in Claim 9 wherein said mechanism for keeping said member, which is moved during the scanning, and said guide member such that they are not in contact with each other jets a gas to the region between them.
Claim 14
Dependent Claim
46 words
A scanning microscope as defined in claims 9 or 10 wherein said mechanism for keeping said member, which is moved during the scanning, and said guide member such that they are not in contact with each other causes them to repulse each other by magnetic force.
Claim 15
Dependent Claim
19 words
A scanning microscope as defined in Claim 9, 10 or 11 wherein said light beam is a laser beam.
Claim 16
Dependent Claim
189 words
A confocal scanning mechanism comprising: i) a material supporting member on which a material to be scanned is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said material to be scanned, iv) a light receiving optical means with which the light beam radiated out of said material to be scanned is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a movable member which supports said light projecting optical means and said light receiving optical means together, vii) a main scanning means which reciprocally moves said movable member such that said light spot scans said material, which is to be scanned, in main scanning directions, and viii) a sub-scanning means which moves said material supporting member with respect to said movable member in sub-scanning directions, which are approximately normal to said main scanning directions, whereby said material to be scanned is scanned with said light spot in said sub-scanning directions.
Claim 17
Dependent Claim
189 words
A confocal scanning mechanism comprising: i) a material supporting member on which a material to be scanned is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said material to be scanned, iv) a light receiving optical means with which the light beam radiated out of said material to be scanned is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a movable member which supports said light projecting optical means and said light receiving optical means together, vii) a main scanning means which reciprocally moves said movable member such that said light spot scans said material, which is to be scanned, in main scanning directions, and viii) a sub-scanning means which moves said material supporting member with respect to said movable member in sub-scanning directions, which are approximately normal to said main scanning directions, whereby said material to be scanned is scanned with said light spot in said sub-scanning directions.
Claim 18
Dependent Claim
21 words
A confocal scanning mechanism as defined ih Claim 13 wherein said movable member also supports said light source and said photodetector.
Claim 19
Dependent Claim
25 words
A confocal scanning mechanism as defined in claims 13 or 14 wherein said light projecting optical means also serves as said light receiving optical means.
Claim 20
Dependent Claim
38 words
A confocal scanning mechanism as defined in Claims 13, 14 or 15 wherein a means is provided which reciprocally moves said material supporting member in directions, which are normal to said main scanning directions and said sub-scanning directions.
Claim 21
Dependent Claim
22 words
A confocal scanning mechanism as defined in at least one of claims 13 to 16 wherein said light source is a laser.
Claim 22
Dependent Claim
100 words
A scanning mechanism comprising: i) a material supporting member on which a material to be scanned is supported, ii) an optical means which irradiates a light beam to said material to be scanned, and iii) a scanning means which moves said optical means with respect to said material supporting member such that said light beam scans said material to be scanned, wherein the improvement comprises the provision of a mechanism for keeping a member, which is moved during said scanning, and a guide member, which supports and guides said member, such that they are not in contact with each other.
Claim 23
Dependent Claim
100 words
A scanning mechanism comprising: i) a material supporting member on which a material to be scanned is supported, ii) an optical means which irradiates a light beam to said material to be scanned, and iii) a scanning means which moves said optical means with respect to said material supporting member such that said light beam scans said material to be scanned, wherein the improvement comprises the provision of a mechanism for keeping a member, which is moved during said scanning, and a guide member, which supports and guides said member, such that they are not in contact with each other.
Claim 24
Dependent Claim
44 words
A scanning mechanism as defined in Claim 18 wher in said mechanism for keeping said member, which is moved during the scanning, and said guide member such that they are not in contact with each other jets a gas to the region between them.
Claim 25
Dependent Claim
46 words
A scanning mechanism as defined in claims 18 or 19 wherein said mechanism for keeping said member, which is moved during the scanning, and said guide member such that they are not in contact with each other causes them to repulse each other by magnetic force.
Claim 26
Dependent Claim
19 words
A scanning mechanism as defined in Claims 18, 19 or 20 wherein said light beam is a laser beam.
References Cited (Backward Citations)
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