Ink recording apparatus
Abstract
Abstract An ink recording apparatus used with printers or the like and manufactured by applying semiconductor device manufacturing techniques. One wall of an ink chamber (20) is formed of a single-crystal substrate (21) and an ink jet port (21a) is formed by etching on the single-crystal substrate (21). A shutter (25) and electrodes (24a to 24h) composed of polycrystalline-silicon film are formed on the single-crystal substrate by film forming in the LPCVD method and patterning through plasma etching. A front wall (28) is formed by coating the shutter (25) and electrodes (24a to 24h) further with a polycrystalline-silicon film. The shutter (25) is movable between the wall surface of the ink chamber (20) and the front wall (28), being driven through electrostatic attracting force produced between voltage-applied electrodes (24a to 24h) and the shutter (25). The electrodes (24a to 24h) are formed at positions corresponding to those where the shutter (25) blocks the ink jet port (21a) and releases the same.
Inventors
- 👤 Narito Shibaike
- 👤 Soichiro Mima
Bibliographic Details
Claims Analysis
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