EP0406751A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method and apparatus for the acquisition of measured data during the treatment of disks
Assignee: OC Oerlikon Balzers AG
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Filing: 1990-07-02
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Granted: —
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Expires: 2010-07-02
Abstract
Abstract In order to acquire treatment parameters for discs (1), for example in a vacuum coating process, it is proposed to insert into the discs to be treated spy discs on which sensors (3, 3a) are provided. The electrical connections of said sensors are led to the periphery of the discs (1), where they are contacted by taps (21) at a mount (13) also provided for the remaining discs to be treated. <IMAGE>
Inventors
- 👤 Hans Dr. Hirscher
- 👤 Eberhard Dr. Moll
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 14:52
CPC Classifications
G; G01; G01K; G01K13/00
Claims Analysis
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References Cited (Backward Citations)
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