Manufacturing method of a detector using resistance elements

Claim 1

A method of manufacturing a sensor using resistance element, comprising: a step of defining, on a first substrate (100), a working region (110), a fixed region (130), and a flexible region (120) positioned therebetween, a step of forming a resistance element (R) within said flexible region on a first surface of said first substrate, a step of partially removing said first substrate in order to allow said flexible region to have flexibility, a step of connecting a second substrate (200) to a second surface of said first substrate, and a step of cutting said second substrate to thereby form a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed-region of said first substrate and constituted by a portion of said second substrate.

Claim 2

A method of manufacturing a sensor using resistance element, comprising: a step of defining, on a first substrate (100), a working region (110), a fixed region (130), and a flexible region (120) positioned therebetween, a step of forming a resistance element (R) within said flexible region on a first surface of said first substrate, a step of partially removing said first substrate in order to allow said flexible region to have flexibility, a step of connecting a second substrate (200) to a second surface of said first substrate, and a step of cutting said second substrate to thereby form a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed-region of said first substrate and constituted by a portion of said second substrate.

Claim 3

A method of manufacturing a sensor using resistance element, comprising: a step of defining a plurality of unit regions on a first substrate (100), and defining, within each unit region, a working region (110), a fixed region (130), and a flexible region (120) positioned therebetween, a step of forming resistance elements (R) within said respective flexible regions on a first surface of said first substrate, a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility, a step of connecting a second substrate (200) to a second surface of said first substrate, a step of cutting said second substrate to thereby form, within each unit region, a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed region of said first substrate and constituted by a portion of said second substrate, and a step of cutting off said first and second substrates every unit regions to form independent sensors (500), respectively.

Claim 4

A method of manufacturing a sensor using resistance element, comprising: a step of defining a plurality of unit regions on a first substrate (100), and defining, within each unit region, a working region (110), a fixed region (130), and a flexible region (120) positioned therebetween, a step of forming resistance elements (R) within said respective flexible regions on a first surface of said first substrate, a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility, a step of connecting a second substrate (200) to a second surface of said first substrate, a step of cutting said second substrate to thereby form, within each unit region, a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed region of said first substrate and constituted by a portion of said second substrate, and a step of cutting off said first and second substrates every unit regions to form independent sensors (500), respectively.

Claim 5

A method of manufacturing a sensor using resistance element, comprising: a step of defining a plurality of unit regions on a first substrate (100), and defining, within each unit region, a working region (110), a fixed region (130), and a flexible region (120) positioned therebetween, a step of forming resistance elements (R) within said respective flexible regions on a first surface of said first substrate, a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility, a step of connecting a first surface of a second substrate (200) to a second surface of said first substrate, a step of cutting said second substrate to thereby form, within each unit region, a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed region of said first substrate and constituted by a portion of said second substrate, a step of forming, on the side of a first surface of a third substrate (300), a groove (301) such that said working body can move with a predetermined degree of freedom thereafter to connect said first surface of said third substrate to a second surface of said second substrate, and a step of cutting off said first, second and third substrates every unit regions to form independent sensors (500), respectively.

Claim 6

A method of manufacturing a sensor using resistance element, comprising: a step of defining a plurality of unit regions on a first substrate (100), and defining, within each unit region, a working region (110), a fixed region (130), and a flexible region (120) positioned therebetween, a step of forming resistance elements (R) within said respective flexible regions on a first surface of said first substrate, a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility, a step of connecting a first surface of a second substrate (200) to a second surface of said first substrate, a step of cutting said second substrate to thereby form, within each unit region, a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed region of said first substrate and constituted by a portion of said second substrate, a step of forming, on the side of a first surface of a third substrate (300), a groove (301) such that said working body can move with a predetermined degree of freedom thereafter to connect said first surface of said third substrate to a second surface of said second substrate, and a step of cutting off said first, second and third substrates every unit regions to form independent sensors (500), respectively.

Claim 7

A method of manufacturing a sensor using resistance element, comprising: a step of defining a plurality of unit regions on a first substrate (100), and defining, within each unit region, a working region (110), a fixed region (130), and a flexible region (120) positioned therebetween, a step of forming resistance elements (R) within said respective flexible regions on a first surface of said first substrate, a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility, a step of connecting a first surface of a second substrate (200) to a second surface of said first substrate. a step of cutting said second substrate to thereby form, within each unit region, a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed region of said first substrate and constituted by a portion of said second substrate, a step of forming, on the side of a first surface of a third substrate (400), a groove (401) such that said working portion of said first substrate can move with a predetermined degree of freedom thereafter to connect said first surface of said third substrate to said first surface of said first substrate, and a step of cutting off said first, second and third substrates every unit regions to form independent sensors (500), respectively.

Claim 8

A method of manufacturing a sensor using resistance element, comprising: a step of defining a plurality of unit regions on a first substrate (100), and defining, within each unit region, a working region (110), a fixed region (130), and a flexible region (120) positioned therebetween, a step of forming resistance elements (R) within said respective flexible regions on a first surface of said first substrate, a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility, a step of connecting a first surface of a second substrate (200) to a second surface of said first substrate. a step of cutting said second substrate to thereby form, within each unit region, a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed region of said first substrate and constituted by a portion of said second substrate, a step of forming, on the side of a first surface of a third substrate (400), a groove (401) such that said working portion of said first substrate can move with a predetermined degree of freedom thereafter to connect said first surface of said third substrate to said first surface of said first substrate, and a step of cutting off said first, second and third substrates every unit regions to form independent sensors (500), respectively.

Claim 9

A method of manufacturing a sensor using resistance element comprising: a step of defining a plurality of unit regions on a first substrate (100), and defining, within each unit region, a working region (110) at a central portion of each unit a region, a flexible region (120) around said working region, and a fixed region (130) around said flexible region, respectively, a step of forming resistance elements (R) within said respective flexible regions on a first surface of said first substrate so as to enable detection of a force exerted on said each working region with respect to at least two axis directions of three axis directions of a first axis and a second axis included in a plane defining said first surface of said first substrate and perpendicular to each other, and a third axis perpendicular to said first axis and said second axis, a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility, a step of connecting a first surface of a second substrate (200) to a second surface of said first substrate, a step of cutting said second substrate to form, within each unit region, a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed region of said first substrate and constituted by a portion of said second substrate, and a step of cutting off said first substrate and said second substrate every unit regions to form independent sensors (500), respectively.

Claim 10

A method of manufacturing a sensor using resistance element comprising: a step of defining a plurality of unit regions on a first substrate (100), and defining, within each unit region, a working region (110) at a central portion of each unit a region, a flexible region (120) around said working region, and a fixed region (130) around said flexible region, respectively, a step of forming resistance elements (R) within said respective flexible regions on a first surface of said first substrate so as to enable detection of a force exerted on said each working region with respect to at least two axis directions of three axis directions of a first axis and a second axis included in a plane defining said first surface of said first substrate and perpendicular to each other, and a third axis perpendicular to said first axis and said second axis, a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility, a step of connecting a first surface of a second substrate (200) to a second surface of said first substrate, a step of cutting said second substrate to form, within each unit region, a working body (210) connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal (220) connected to said fixed region of said first substrate and constituted by a portion of said second substrate, and a step of cutting off said first substrate and said second substrate every unit regions to form independent sensors (500), respectively.