EP0399299A2
Expired / Lapsed
EP
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Electrically conductive polymeric materials and uses thereof
Assignee: International Business Machines Corp
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Filing: 1990-05-10
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Granted: —
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Expires: 2010-05-10
Abstract
Abstract Structures containing conducting polymers and methods of fabrication thereof. Electrical conductivity can be induced in polymers selected from the group consisting of substituted and unsubstituted polyanilines, polyparaphenylenevinylenes, substituted and unsubstituted polythiophenes, substituted and unsubstituted poly-p-phenylene sulfides, substituted polyfuranes, substituted polypyrroles, substituted polyselenophenes, polyacetylenes formed from soluble precursors, combinations thereof and blends thereof with other polymers. The polymer contains a doping precursor, selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides. Conductivity can be selectively induced in the polymer by selectively doping upon selective exposure to a source of energy such as electromagnetic radiation, an electron beam and heat. The electrically conductive polymers of the present invention are useful as electron discharge layers for electron beam applications, such as SEM observations, as electromagnetic interference coatings on dielectric surfaces and as an electron beam resist which acts as a discharge layer.
Inventors
- 👤 Marie Angelopoulos
- 👤 Wu-Song Huang
- 👤 Richard D. Kaplan
- 👤 Marie-Annick Le Corre
- 👤 Stanley E. Perreault
- 👤 Jane M. Shaw
- 👤 Michel R. Tissier
- 👤 George F. Walker
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-26 07:27
CPC Classifications
H; H05; H05K; H05K9/00; H05K9/0073; H05K9/0079; C; C08; C08G; C08G61/00; C08G61/12; H01; H01B; H01B1/00; H01B1/06; H01B1/12; H01B1/124; H01B1/127; H01B1/128; H01J; H01J29/00; H01J29/86; H01J29/867; H01J29/868; H05K9/0081; H10; H10W; H10W42/00; H10W42/60; H10W70/00; H10W70/60; H10W70/67; H10W70/69; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31855
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
66 words
A structure comprising: a polymeric material; said polymeric material being selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors and combinations thereof and blends thereof with other polymers; preselected regions of said polymer material being electrically conductive; said conductive regions being substantially insoluble; and the remainder of said material being substantially soluble.
Claim 2
Dependent Claim
66 words
A structure comprising: a polymeric material; said polymeric material being selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors and combinations thereof and blends thereof with other polymers; preselected regions of said polymer material being electrically conductive; said conductive regions being substantially insoluble; and the remainder of said material being substantially soluble.
Claim 3
Dependent Claim
40 words
The structure of claim 1, wherein said electrically conductive regions contain dissociated doping precursors selected from the group consisting of onium salts, iodonium salts, borate salts, tosylate salts, triflate salts and sulfonyloxyimides, said dissociated precursors doping said polymeric material constituent.
Claim 4
Dependent Claim
23 words
The structure of claim 1, wherein said structure is a resist, selected from the group consisting of electron beam resist and optical resist.
Claim 5
Dependent Claim
33 words
The structure of claim 2 wherein said polymeric material is a polyaniline and wherein said precursor is selected from the group consisting of triphenylsulfonium hexafluoroantimonate, diethyl-ammonium trifluoromethane sulfonate and diisopropyl animmonium trifluoromethane sulfonate.
Claim 6
Dependent Claim
15 words
The structure of claim 4, wherein said polyaniline is an emeraldine base form of polyaniline.
Claim 7
Dependent Claim
34 words
The structure of claim 2 wherein said polythiophene is selected from the group consisting of poly(3-butylthiophene) and 3-methylthiophene-3-butylthiophene-copolymer and wherein said precursor is selected from the group consisting of trifluoromethylsulfonyloxybicyclo (2,2,1)-hept-5-ene-2,3-dicarboximide(MDT)and triphenyl sulfonium hexafluorantimonate.
Claim 8
Independent Claim
95 words
A method comprising: forming a solid solution of a doping precursor selected from the group consisting of onium salts, triflate salts, iodonium salts, borate salts, tosylate salts and sulfonyloxyimides and a polymer selected from the group consisting of substituted or unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenyl sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors, combinations thereof and blends thereof with other polymers; and selectively exposing said solid solution to a source of energy selected from the group consisting of electromagnetic radiation, an electron beam and heat, inducing electrical conductivity within said selectively exposed regions.
Claim 9
Independent Claim
95 words
A method comprising: forming a solid solution of a doping precursor selected from the group consisting of onium salts, triflate salts, iodonium salts, borate salts, tosylate salts and sulfonyloxyimides and a polymer selected from the group consisting of substituted or unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenyl sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors, combinations thereof and blends thereof with other polymers; and selectively exposing said solid solution to a source of energy selected from the group consisting of electromagnetic radiation, an electron beam and heat, inducing electrical conductivity within said selectively exposed regions.
Claim 10
Dependent Claim
19 words
The method of claim 7, wherein said polymer has a partially conjugated π system, said polymer being a dielectric.
Claim 11
Dependent Claim
37 words
The method of claim 7 further including exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 12
Independent Claim
26 words
The method of claims 7 or 8, wherein said solvent is selected from the group consisting of N-methylpyrrolidinone (NMP), DMSO, DMF, CHCl₃, CH₂Cl₂ and aqueous base.
Claim 13
Dependent Claim
29 words
The method of claim 7, wherein said solid solution is an electrical discharge layer for electron beam irradiation, the electron beam preferably being provided by a scanning electron microscope.
Claim 14
Dependent Claim
17 words
The method of claim 11, wherein said polymeric material has a surface conductivity greater than about 10⁻⁶OHM⁻¹.
Claim 15
Dependent Claim
83 words
A structure comprising: a substrate; at least a part of a surface of said substrate having thereon a solid solution; said solid solution containing materials selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes , poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors, and combinations thereof and blends thereof with other polymers and containing a dissociated doping precursor selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts and tosylate salts and sulfonyloxyimides.
Claim 16
Dependent Claim
83 words
A structure comprising: a substrate; at least a part of a surface of said substrate having thereon a solid solution; said solid solution containing materials selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes , poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors, and combinations thereof and blends thereof with other polymers and containing a dissociated doping precursor selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts and tosylate salts and sulfonyloxyimides.
Claim 17
Dependent Claim
16 words
The structure of claim 13, wherein said substrate is a dielectric body housing an electronic device.
Claim 18
Dependent Claim
21 words
The structure of claims 13 or 14, further including a first resist material disposed between said surface and said solid solution.
Claim 19
Dependent Claim
19 words
The structure of anyone of claims 13 to 15, further including a resist material disposed over said solid solution.
Claim 20
Independent Claim
122 words
A method comprising: providing a surface at least a part of which is a dielectric; disposing over at least a part of said surface a nonmetallic electrically conductive material containing a dissociated doping precursor, said nonmetallic electrically conductive material preferably being a polymeric material selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors, combinations thereof and blends thereof with other polymers and containing a dissociated doping precursor being selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides, and exposing said surface with said nonmetallic conductive material thereon to an electron beam, said nonmetallic material substantially preventing charge accumulation on said surface.
Claim 21
Independent Claim
122 words
A method comprising: providing a surface at least a part of which is a dielectric; disposing over at least a part of said surface a nonmetallic electrically conductive material containing a dissociated doping precursor, said nonmetallic electrically conductive material preferably being a polymeric material selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors, combinations thereof and blends thereof with other polymers and containing a dissociated doping precursor being selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides, and exposing said surface with said nonmetallic conductive material thereon to an electron beam, said nonmetallic material substantially preventing charge accumulation on said surface.
Claim 22
Dependent Claim
16 words
The method of claim 17, wherein the conductivity of said material is greater than about 10⁻⁶OHM⁻¹.
Claim 23
Dependent Claim
86 words
A resist comprising: a polymeric composition selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polyarines, polythiophenes, polyazines, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors, combinations thereof and blends thereof with other polymers, the solubility and electrical conductivity of said composition being dependent upon the presence of a dopant; and a dopant precursor which generates said dopant upon exposure to energy, said precursor being selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides.
Claim 24
Dependent Claim
86 words
A resist comprising: a polymeric composition selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polyarines, polythiophenes, polyazines, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes formed from soluble precursors, combinations thereof and blends thereof with other polymers, the solubility and electrical conductivity of said composition being dependent upon the presence of a dopant; and a dopant precursor which generates said dopant upon exposure to energy, said precursor being selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides.
References Cited (Backward Citations)
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