EP0398330A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Discharge exciting pulse laser device
Assignee: Mitsubishi Electric Corp
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Filing: 1990-05-17
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Granted: —
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Expires: 2010-05-17
Abstract
Abstract A discharge exciting pulse laser device such as an exima laser device. The laser device is capable of accelerating the timing of rise of the voltage between an auxiliary electrode (4) and one of main electrodes (3) without decreasing a discharge start voltage between the main electrodes (2, 3), so that the laser output power is increased and the laser oscillation efficiency is improved.
Inventors
- 👤 Hajime C/O Mitsubishi Denki K.K. Nakatani
- 👤 Atsushi C/O Mitsubishi Denki K.K. Sugitatsu
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 19:13
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/09; H01S3/097; H01S3/0971; H01S3/09713; H01S3/02; H01S3/03; H01S3/038; H01S3/0384; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
197 words
A discharge exciting pulse laser device having a pair of first and second main electrodes for generating a main discharge, an auxiliary electrode cooperating said second main electrode to generate a corona discharge, a switch having a first terminal is connected to said second main electrode, a series of a saturable reactor and a first charge capacitor, which is connected between a second terminal of said switch and said main electrode, a first charge circuit element connected between said main electrodes, a second charge capacitor for said corona discharge connected between the second terminal of said switch and said auxiliary electrode, and a second charge circuit element connected between said second main electrode and said auxiliary electrode, wherein said first and second charge capacitors are charged with said switch being turned-off, and said switch is then turned-on after completion of charge, so that a corona discharge is generated between said auxiliary electrode and said second main electrode and said corona discharge preliminarily ionizes a space between said main electrodes to cause a main discharge therebetween, an inductance of said saturable reactor being reduced after a voltage has risen between said auxiliary electrode and said second main electrode.
Claim 2
Dependent Claim
197 words
A discharge exciting pulse laser device having a pair of first and second main electrodes for generating a main discharge, an auxiliary electrode cooperating said second main electrode to generate a corona discharge, a switch having a first terminal is connected to said second main electrode, a series of a saturable reactor and a first charge capacitor, which is connected between a second terminal of said switch and said main electrode, a first charge circuit element connected between said main electrodes, a second charge capacitor for said corona discharge connected between the second terminal of said switch and said auxiliary electrode, and a second charge circuit element connected between said second main electrode and said auxiliary electrode, wherein said first and second charge capacitors are charged with said switch being turned-off, and said switch is then turned-on after completion of charge, so that a corona discharge is generated between said auxiliary electrode and said second main electrode and said corona discharge preliminarily ionizes a space between said main electrodes to cause a main discharge therebetween, an inductance of said saturable reactor being reduced after a voltage has risen between said auxiliary electrode and said second main electrode.
Claim 3
Dependent Claim
56 words
A discharge exciting pulse laser as defined in claim 1 further comprising a delay circuit connected in series to said second charging capacitor, so that the leading edge of a pulse voltage applied between said auxiliary electrode and said second main electrode coincides with the leading edge of a pulse voltage applied between said main electrodes.
Claim 4
Dependent Claim
31 words
A discharge exciting pulse laser as defined in claim 1 wherein said auxiliary electrode comprises a pair of rod-shaped members which are arranged in parallel near to said second main electrode.
References Cited (Backward Citations)
No citation records indexed.
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