EP0397029A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Carrier for disc shaped workpieces, and vacuum process chamber
Assignee: OC Oerlikon Balzers AG
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Filing: 1990-05-03
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Granted: —
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Expires: 2010-05-03
Abstract
Abstract In order to transfer heat under vacuum conditions to a workpiece, a carrier is proposed which has gas outlets (58) and gas return openings (59) distributed on its surface. As a result, a dynamic gas layer is realised between the carrier (55) and workpiece, the gas effecting the conduction of heat between the carrier (55) and workpiece. The gas outlets (58) end in a distributor chamber constructed as a groove (52). <IMAGE>
Inventors
- 👤 Rudolf Wagner
- 👤 Hans Dr. Hirscher
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:27
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7608; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/54; C23C14/541; C23C16/00; C23C16/44; C23C16/46; C23C16/463; C23C16/466; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/12; C30B31/00; C30B31/06; C30B31/14; H10P72/7602; H10P72/7624; H10P72/7626; H10P72/78; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136; Y10S414/139; Y10S414/141
Claims Analysis
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