EP0393682A2
Expired / Lapsed
EP
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Semiconductor integrated circuit device
Assignee: UMC Japan Co Ltd
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Filing: 1990-04-19
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Granted: —
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Expires: 2010-04-19
Abstract
Abstract 1. A semiconductor integrated circuit device having a protective film made of a polymer having a fluorine-containing aliphatic cyclic structure. i
Inventors
- 👤 Shinzou Nomura
- 👤 Hiroshi Katsushima
- 👤 Toru Kawasaki
- 👤 Masao Unoki
- 👤 Masaru Nakamura
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 08:05
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W42/00; H10W42/20; H10W42/25
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
19 words
A semiconductor integrated circuit device having a protective film made of a polymer having a fluorine-containing aliphatic cyclic structure.
Claim 2
Dependent Claim
19 words
A semiconductor integrated circuit device having a protective film made of a polymer having a fluorine-containing aliphatic cyclic structure.
Claim 3
Dependent Claim
27 words
The semiconductor integrated circuit device according to Claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by cyclic polymerization.
Claim 4
Dependent Claim
42 words
The semiconductor integrated circuit device according to Claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by cyclic polymerization of a monomer having two carbon-carbon multiple bonds differing in the polymerizability in its molecule.
Claim 5
Dependent Claim
36 words
The semiconductor integrated circuit device according to Claim 3, wherein the monomer is the one wherein the straight chain portion of the linking chain connecting the two carbon-carbon multiple bonds has from 2 to 7 atoms.
Claim 6
Dependent Claim
47 words
The semiconductor integrated circuit device according to Claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by cyclic polymerization of at least one monomer selected from the group consisting of a perfluoroallyl vinyl ether and a perfluorobutenyl vinyl ether.
Claim 7
Dependent Claim
31 words
The semiconductor integrated circuit device according to Claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by radical polymerization of a cyclic monomer.
Claim 8
Dependent Claim
29 words
The semiconductor integrated circuit device according to Claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by radical polymerization of perfluoro-2,2-dimethyl-1,3-dioxol.
Claim 9
Dependent Claim
29 words
The semiconductor integrated circuit device according to any one of the preceding Claims, wherein the polymer is a polymer having a fluorine content of at least 30% by weight.
Claim 10
Dependent Claim
28 words
The semiconductor integrated circuit device according to any one of the preceding Claims, wherein the polymer is a polymer containing at least 20 mol% of the cyclic structure.
Claim 11
Dependent Claim
38 words
The semiconductor integrated circuit device according to any one of the preceding Claims, wherein the protective film is an α-ray shielding film, a buffer coat film, an interlayer insulating film, a passivation film or an exterior sealing film.
References Cited (Backward Citations)
No citation records indexed.
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